scholarly journals Structural Characterization of the Thermal Evolution of Tetrahedrally Coordinated Amorphous Carbon Films

1997 ◽  
Vol 498 ◽  
Author(s):  
L. J. Martinez-Miranda ◽  
J. P. Sullivan ◽  
T. A. Friedmann ◽  
M. P. Siegal ◽  
N. J. DiNardo
Keyword(s):  
Thermal Evolution ◽  
Periodic Structures ◽  
Structural Features ◽  
Carbon Films ◽  
Interface Roughness ◽  
X Ray ◽  
Film Density ◽  
Angle Scattering ◽  
Post Deposition

ABSTRACTWe present the results of a post-deposition annealing structural study on amorphous tetrahedrally-coordinated carbon (a-tC) films on Si(100) prepared by pulsed-laser deposition. Films as-deposited and post-annealed at 200, 300, 400, 500 and 600 °C, respectively, are studied using combined x-ray reflectivity and low-angle scattering measurements. The scans are fit to the Fresnel equations to obtain values for average film density, film and interface thickness, and film and interface roughness. We observe a correlation between the evolution of film density, roughness and the spacing of quasi-periodic structures in the films as a function of annealing temperature. We relate the evolution of these structural features with previous measurements of the resistivity and the observed stress release in these films.

Grazing-incidence X-Ray Analysis of Surfaces and Thin Films

1991 ◽  
Vol 35 (A) ◽  
pp. 143-150 ◽  
Author(s):  
T. C. Huang
Keyword(s):  
Thin Films ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Bragg Diffraction ◽  
Interface Roughness ◽  
Phase Identification ◽  
X Ray ◽  
Types Of Information

AbstractGrazing-incidence X-ray analysis techniques which are commonly used for the nondestructive characterization of surfaces and thin films are reviewed. The X-ray reflectivity technicue is used to study surface uniformity and oxidation, layer thickness and density, interface roughness and diffusion, etc. The grazing-incidence in-plane diffraction technique is used to determine in-plane crystallography of epitaxial films. The grazing-incidence asymmetric-Bragg diffraction is used for surface phase identification and structural depth profiling determination of polycrystalline films. Typical examples to illustrate the types of information that can be obtained by the techniques are presented.

Characterization of Polyquinoline Blends Using Small Angle Scattering

1989 ◽  
Vol 171 ◽  
Author(s):  
Wen-Li Wu ◽  
John K. Stille ◽  
Joseph W. Tsang ◽  
Alex J. Parker
Keyword(s):  
Small Angle ◽  
Quantitative Information ◽  
Flexible Chain ◽  
X Ray ◽  
Molecular Dispersion ◽  
Angle Scattering ◽  
Scattering Measurements ◽  
Rigid Rod ◽  
Scattering Contribution

ABSTRACTTo determine the compatibility between the rigid rod and the flexible chain polyquinolines, both small angle x-ray and neutron scattering measurements were conducted on blends containing deuterated flexible chains. The scattering intensities from both x-ray and neutron were reduced to their absolute scales in order to remove the scattering contribution from microvoids which tended to overshadow the signal of molecular origin. Quantitative information regarding the molecular dispersion in a 50/50 rigid rod and flexible chain blend was obtained. The result indicated that this material was partially segregated but not to the point of single component phases.

Characterization of Carbon Films on the Japanese Smoked Roof Tile “Ibushi-Kawara” by High-Resolution Soft X-ray Spectroscopy

2003 ◽  
Vol 42 (Part 1, No. 10) ◽  
pp. 6551-6555 ◽  
Author(s):  
Yasuji Muramatsu ◽  
Muneyuki Motoyama ◽  
Jonathan D. Denlinger ◽  
Eric M. Gullikson ◽  
Rupert C. C. Perera
Keyword(s):  
High Resolution ◽  
Carbon Films ◽  
X Ray ◽  
Roof Tile

Structural Investigation of a Surfactant-Templated Silica Aerogel by Small-angle Scattering

1998 ◽  
Vol 520 ◽  
Author(s):  
Thomas P. Riekerlt ◽  
Mark T. Anderson ◽  
Patricia S. Sawyer ◽  
Shrish Rane ◽  
Gregory Beaucage
Keyword(s):  
Light Scattering ◽  
Small Angle ◽  
Silica Aerogel ◽  
Large Scale ◽  
Structural Investigation ◽  
Structural Information ◽  
Structural Features ◽  
Length Scales ◽  
X Ray ◽  
Angle Scattering

ABSTRACTThe structure of a surfactant-templated silica aerogel is studied by small-angle x-ray and light scattering. By combining the two techniques, we obtain structural information on length scales from Ångstroms to 0.1 millimeters. For this sample, we find five structural features, including the morphology of large scale aggregates.

Characterization of Stress and Texture in Rtcvd Poly-Si Layers by X-Ray Diffraction

1991 ◽  
Vol 239 ◽  
Author(s):  
István Bársony ◽  
Jos G.E. Klappe ◽  
Tom W. Ryan
Keyword(s):  
Deposition Temperature ◽  
Polycrystalline Silicon ◽  
Columnar Structure ◽  
Film Stress ◽  
Grain Structure ◽  
X Ray Diffraction ◽  
X Ray ◽  
Residual Film ◽  
Post Deposition

ABSTRACTThe properties of polycrystalline silicon layers deposited by RTCVD have been studied by texture, stress and electrical analyse. The intrinsic layers intended for applications in integrated IC processing are very much textured with the preferred orientation depending on deposition temperature and atmosphere. Very low residual film stress in the order of 10 dyn/cm2 was detected, and a transition from compressive to tensile stress with increasing deposition temperature around 800°C was observed. This was associated with the development of the columnar structure by the (110) orientation becoming dominant at the expense of the (100) texture. Also the effect of post-deposition anneal ambience on the grain structure has been studied. Grain size and grain-boundary trapping in after doped layers have been evaluated in P-implanted RTA activated layers.

scholarly journals Structural features and near infra-red (NIR) luminescence of isomeric Yb(iii) bipyridyl-N,N′-dioxide coordination polymers

2015 ◽  
Vol 44 (29) ◽  
pp. 13378-13383 ◽  
Author(s):  
Gail M. Sequeira ◽  
Wayne Y. Tan ◽  
Evan G. Moore
Keyword(s):  
Coordination Polymers ◽  
Structural Characterization ◽  
Lanthanide Complexes ◽  
Structural Features ◽  
X Ray ◽  
X Ray Crystallography ◽  
Infra Red ◽  
Nir Luminescence

The synthesis and structural characterization of a series of lanthanide complexes formed from YbX3 salts (X = NO3− or CF3SO3−) and the isomeric 4,4′-bipyridine-N,N′-dioxide (4,4′-bpdo) or 3,3′-bipyridine-N,N′-dioxide (3,3′-bpdo) ligands has been undertaken by X-ray crystallography.

Electrical Resistivity Improvement by Precipitation and Strain in Al-Cu Thin Films

2010 ◽  
Vol 305-306 ◽  
pp. 33-37 ◽  
Author(s):  
S. Lallouche ◽  
M.Y. Debili
Keyword(s):  
Thin Films ◽  
Copper Content ◽  
Room Temperature ◽  
Structural Features ◽  
X Ray Diffraction ◽  
X Ray ◽  
Glass Substrates ◽  
Transmission Electron ◽  
Hall Method

This work deals with Al-Cu thin films, deposited onto glass substrates by RF (13.56MHz) magnetron sputtering, and annealed at 773K. The film thickness was approximately the same 3-4µm. They are characterized with respect to microstructure, grain size, microstrain, dislocation density and resistivity versus copper content. Al (Cu) deposits containing 1.8, 7.21, 86.17 and 92.5at%Cu have been investigated. The use of X-ray diffraction analysis and transmission electron microscopy lead to the characterization of different structural features of films deposited at room temperature (< 400K) and after annealing (773K). The resistivity of the films was measured using the four-point probe method. The microstrain profile obtained from XRD thanks to the Williamson-Hall method shows an increase with increasing copper content.

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