Effect of Poly-Si on Electromigration Behaviors and Microstructure Characteristics of Au Metallization

1998 ◽  
Vol 516 ◽  
Author(s):  
T. Lee ◽  
B.R. York ◽  
B. Lindgren ◽  
H. Kentzinger ◽  
J. Lee ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Line Length ◽  
Current Gain ◽  
X Ray Diffraction ◽  
X Ray ◽  
Microstructure Characteristics ◽  
Oxide Reliability ◽  
Thermal Oxide ◽  
The Impact ◽  
Dc Stress

AbstractFor BJT and MOSFET, poly-Si is the most critical layer used as an emitter to improve the current gain in BJT and as a gate to improve the gate oxide reliability in MOSFET. In both cases, the poly-Si is then connected to the conductor. It is very important to understand how poly-Si affects the microstructure and the electromigration behavior of conductor. NIST test structures (length = 800μ, thickness = 0.7μ, widths = 1, 5, 10 μ) with Au conductor and TiW/TiWN/TiW barrier were used to study the impact of poly-Si. Two groups of samples were used: one with poly-Si under the barrier and the other without poly-Si. Thermal oxide was used to isolate the substrate from the conductor and Si3N4, was used as passivation. DC stress was performed at 175, 200, and 225°C. Microbeam X-ray Diffraction (μ XRD) was used to characterize the microstructure of the TiW barrier and Au metallization layers as a function of line length and width. The data indicates that samples with poly-Si have lower electromigration resistance for Au conductors for all widths and temperatures, with higher initial deformation fault densities on poly-Si.

scholarly journals The impact of point defects in n-type GaN layers on thermal decomposition of InGaN/GaN QWs

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Mikolaj Grabowski ◽  
Ewa Grzanka ◽  
Szymon Grzanka ◽  
Artur Lachowski ◽  
Julita Smalc-Koziorowska ◽  
...  
Keyword(s):  
Quantum Wells ◽  
High Temperatures ◽  
Point Defects ◽  
X Ray Diffraction ◽  
Helium Ions ◽  
X Ray ◽  
Sapphire Substrates ◽  
Transmission Electron ◽  
The Impact ◽  
Ingan Quantum Wells

AbstractThe aim of this paper is to give an experimental evidence that point defects (most probably gallium vacancies) induce decomposition of InGaN quantum wells (QWs) at high temperatures. In the experiment performed, we implanted GaN:Si/sapphire substrates with helium ions in order to introduce a high density of point defects. Then, we grew InGaN QWs on such substrates at temperature of 730 °C, what caused elimination of most (but not all) of the implantation-induced point defects expanding the crystal lattice. The InGaN QWs were almost identical to those grown on unimplanted GaN substrates. In the next step of the experiment, we annealed samples grown on unimplanted and implanted GaN at temperatures of 900 °C, 920 °C and 940 °C for half an hour. The samples were examined using Photoluminescence, X-ray Diffraction and Transmission Electron Microscopy. We found out that the decomposition of InGaN QWs started at lower temperatures for the samples grown on the implanted GaN substrates what provides a strong experimental support that point defects play important role in InGaN decomposition at high temperatures.

The impact of F contamination induced by the process on the gate oxide reliability

1998 ◽  
Vol 38 (2) ◽  
pp. 255-258 ◽  
Author(s):  
G Ghidini ◽  
C Clementi ◽  
D Drera ◽  
F Maugain
Keyword(s):  
Gate Oxide ◽  
Oxide Reliability ◽  
The Impact

Ionic conductivity in nanocrystalline Gd doped ceria

2008 ◽  
Vol 1122 ◽  
Author(s):  
Gianguido Baldinozzi ◽  
David Simeone ◽  
Dominique Gosset ◽  
Mickael Dollé ◽  
Georgette Petot-Ervas
Keyword(s):  
Grain Size ◽  
Ionic Conductivity ◽  
Sol Gel ◽  
Doped Ceria ◽  
Narrow Size Distribution ◽  
Conductivity Measurements ◽  
X Ray Diffraction ◽  
X Ray ◽  
Grain Sizes ◽  
The Impact

AbstractWe have synthesized Gd-doped ceria polycrystalline samples (5, 10, 15 %mol), having relative densities exceeding 95% and grain sizes between 30 and 160 nm after axial hot pressing (750 °C, 250 MPa). The samples were prepared by sintering nanopowders obtained by sol-gel chemistry methods having a very narrow size distribution centered at about 16 nm. SEM and X-ray diffraction were performed to characterize the sample microstructures and to assess their structures. We report ionic conductivity measurements using impedance spectroscopy. It is important to investigate the properties of these systems with sub-micrometric grains and as a function of their composition. Therefore, samples having micrometric and nanometric grain sizes (and different Gd content) were studied. Evidence of Gd segregation near the grain boundaries is given and the impact on the ionic conductivity, as a function of the grain size and Gd composition, is discussed and compared to microcrystalline samples.

scholarly journals Lanthanoid Complexes Supported by Retro-Claisen Condensation Products of β-Triketonates

2018 ◽  
Author(s):  
Laura Abad Galán ◽  
Alexandre N. Sobolev ◽  
Eli Zysman-Colman ◽  
Mark Ogden ◽  
Massimiliano Massi
Keyword(s):  
Chelating Ligands ◽  
X Ray Diffraction ◽  
Reaction Conditions ◽  
Claisen Condensation ◽  
X Ray ◽  
Condensation Products ◽  
Complexation Reactions ◽  
The Impact ◽  
Low Solubility

<i>β</i>-Triketonates have been recently used as chelating ligands for lanthanoid ions, presenting unique structures varying from polynuclear assemblies to polymers. In an effort to overcome low solubility of the complexes of tribenzoylmethane, four <i>β</i>-triketones with higher lipophilicity were synthesised. Complexation reactions were performed for each of these molecules using different alkaline bases in alcoholic media. X-ray diffraction studies suggested that the ligands were undergoing decomposition under the reaction conditions. This is proposed to be caused by <i>in situ</i>retro-Claisen condensation reactions, consistent with two examples that have been reported previously. The lability of the lanthanoid cations in the presence of a varying set of potential ligands gave rise to structures where one, two, or three of the molecules involved in the retro-Claisen condensationreaction were linked to the lanthanoid centres. These results, along with measurements of ligand decomposition in the presence of base alone, suggest that using solvents of lower polarity will mimimise the impact of the retro-Claisen condensation in these complexes. <br>

scholarly journals Influence of the Para-Substituent in Lanthanoid Complexes of Bistetrazole Substituted Calix[4]arenes

2019 ◽  
Author(s):  
Rene Z.H. Phe ◽  
Brian Skelton ◽  
Massimiliano Massi ◽  
Mark Ogden
Keyword(s):  
Structural Changes ◽  
Cluster Formation ◽  
Ammonium Cation ◽  
Ammonium Salts ◽  
X Ray Diffraction ◽  
One Dimensional ◽  
X Ray ◽  
Mononuclear Complexes ◽  
Scattering Measurements ◽  
The Impact

5,11,17,23-Tetra-tert-butyl-25,27-dihydroxy-26,28-bis(tetrazole-5-ylmethoxy)calix[4]arene has been reported to form remarkable Ln19 and Ln12 elongated clusters, upon addition of aqueous ammonium carboxylates. The impact of the <i>para</i> substituent on lanthanoid cluster formation has been studied by synthesising two new bis-tetrazole calixarenes, with <i>p</i>-H, and <i>p</i>-allyl substituents. Solution phase dynamic light scattering measurements of the reaction mixtures indicated that clusters are not formed with the <i>p</i>-H and <i>p</i>-allyl derivatives, in contrast with the behaviour of the <i>t-</i>butyl analogue. Lanthanoid complexes of the <i>p</i>-H and <i>p</i>-allyl calixarenes were characterised by single crystal X-ray diffraction, and were found to form mononuclear complexes, linked to form a one-dimensional coordination polymer for the <i>p</i>-allyl system. All of the complexes were isolated as ammonium salts, with ammonium cation included in the calixarene cavity in most cases. It is concluded that the nature of the <i>para</i> substituent has a profound impact on the lanthanoid cluster formation process, and derivatives with more subtle structural changes will be required to determine if additional lanthanoid “bottlebrush” clusters can be isolated.<br><br>

Experimental Investigation on Intensity and Residual Stress in Superficial Layers Induced by Water Cavitation Peening with Aeration

2008 ◽  
Vol 373-374 ◽  
pp. 754-757 ◽  
Author(s):  
Dong Ying Ju ◽  
B. Han
Keyword(s):  
Residual Stress ◽  
Process Capability ◽  
Diffraction Method ◽  
Spring Steel ◽  
Bubble Collapse ◽  
Process Conditions ◽  
X Ray Diffraction ◽  
X Ray ◽  
Enhancement Method ◽  
The Impact

Water cavitation peening (WCP) with aeration is a novel surface enhancement method. A new ventilation nozzle with aeration is adopted to improve the process capability of WCP by increasing the impact pressure induced by the bubble collapse on the surface of components. In this study, in order to investigate the process capability of the WCP with aeration, a standard N-type almen strips of spring steel SAE 1070 was treated by WCP with various process conditions, and the arc height value and the residual stress in the superficial layers were measured by X-ray diffraction method. The optimal fluxes of aeration and the optimal standoff distances were achieved.

Microstructure characteristics of non-monodisperse quantum dots: on the potential of transmission electron microscopy combined with X-ray diffraction

CrystEngComm ◽  
2020 ◽  
Vol 22 (21) ◽  
pp. 3644-3655
Author(s):  
Stefan Neumann ◽  
Christina Menter ◽  
Ahmed Salaheldin Mahmoud ◽  
Doris Segets ◽  
David Rafaja
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Quantum Dots ◽  
Cdse Quantum Dots ◽  
X Ray Diffraction ◽  
X Ray ◽  
Microstructure Characteristics ◽  
Scale Bridging ◽  
Transmission Electron ◽  
Hot Injection

Capability of TEM and XRD to reveal scale-bridging information about the microstructure of non-monodisperse quantum dots is illustrated on the CdSe quantum dots synthesized using an automated hot-injection method.

Hierarchical structure of the triclinic α-phase crystal in nylon 6,12 mediated by two-dimensional confinement

2020 ◽  
Vol 53 (1) ◽  
pp. 27-33
Author(s):  
Ziwei Lai ◽  
Shuailin Zhang ◽  
Nan Zheng ◽  
Shichen Yu ◽  
Masaki Ageishi ◽  
...  
Keyword(s):  
Hierarchical Structure ◽  
Phase Cell ◽  
X Ray Diffraction ◽  
X Ray ◽  
Hierarchical Nanostructure ◽  
Α Phase ◽  
Triclinic Symmetry ◽  
Phase Crystal ◽  
Unit Cells ◽  
The Impact

It has been recognized that macromolecular chains can self-assemble into a hierarchical structure from lamellae to spherulites in bulk crystallization. However, little account has been taken of crystal symmetry effects on the hierarchical nanostructure in polymers under cylindrical confinement. In this research, a model polymer, nylon 6,12, most commonly occurring in the triclinic α phase, was chosen in order to demonstrate the effect of triclinic symmetry on the 2D-constrained polymer nanostructure. The self-arranging unit of nylon 6,12 takes various forms, including stems, unit cells, hydrogen-bonded sheets, lamellae and complex spherulites, which is an essential structural feature for investigating hierarchical nanostructure. The rod nanostructure in confinement was examined by cross-checking electron and X-ray diffraction techniques. It is found that the a* axis of the α-phase cell is inclined at about ±6–11° to the rod long axis within the a*b* plane around the c axis (c axis ⊥ rod long axis). The rotation of the a*b* plane most likely results from the impact of the triclinic symmetry on the molecular chain packing under 2D confinement. A mechanism for this a*b* plane tilting is proposed.

scholarly journals E. S. Fedorov Promoting the Russian-German Scientific Interrelationship

Minerals ◽  
2020 ◽  
Vol 10 (2) ◽  
pp. 181 ◽  
Author(s):  
Peter Paufler ◽  
Stanislav K. Filatov
Keyword(s):  
Crystal Structure ◽  
Crystal Structures ◽  
Structure Analysis ◽  
Crystalline State ◽  
Crystal Structure Analysis ◽  
Present Knowledge ◽  
Personal Contact ◽  
X Ray Diffraction ◽  
X Ray ◽  
The Impact

At the dawn of crystal structure analysis, the close personal contact between researchers in Russia and Germany, well documented in the “Zeitschrift für Krystallographie und Mineralogie”, contributed significantly to the evolution of our present knowledge of the crystalline state. The impact of the Russian crystallographer E. S. Fedorov upon German scientists such as A. Schoenflies and P. Groth and the effect of these contacts for Fedorov are highlighted hundred years after the death of the latter. A creative exchange of ideas paved the way for the analysis of crystal structures with the aid of X-ray diffraction.

Imidazole-containing Bispidine Ligands: Synthesis, Structure and Cu(II) Complexation

2011 ◽  
Vol 66 (7) ◽  
pp. 721-728 ◽  
Author(s):  
Martin Walther ◽  
Madlen Matterna ◽  
Stefanie Juran ◽  
Silke Fähnemann ◽  
Holger Stephan ◽  
...  
Keyword(s):  
Solid State ◽  
Nmr Spectroscopy ◽  
Enol Form ◽  
Trans Configuration ◽  
X Ray Diffraction ◽  
X Ray ◽  
The Impact ◽  
Configurational Isomerism

The preparation and characterization of tris-pyridyl bispidine (3,7-diazabicyclo[3.3.1]nonane) derivatives with benzimidazole and imidazole donor groups at the N-3 position of the bispidine skeleton and their copper(II) complexes are reported. The impact of the hetaryl substituents on the configurational isomerism of piperidones and their corresponding bispidones has been studied by NMR spectroscopy, revealing the exclusive appearance in the enol form for the piperidones in solution and the trans-configuration regarding the two pyridyl substituents, as well as the sole formation of the unsymmetric exo-endo isomers for the corresponding bispidones. Thus, the bispidones are preorganized ligands for building pentacoordinated complexes, confirmed by the preparation and characterization of the corresponding Cu(II) complexes. Of the di-pyridyl piperidones with benzimidazole and imidazole substituents, and of the Cu(II) complex of the benzimidazole-containing bispidone, crystals have become available for the analysis by X-ray diffraction, showing that the piperidones form the enol tautomers also in the solid state.

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