Mechanical-Stress-Controlled Silicide Interconnections for Highly Reliable Semiconductor Devices

2002 ◽  
Vol 716 ◽  
Author(s):  
Hiromi Shimazu ◽  
Hideo Miura

AbstractMechanical stress develops in silicide interconnection structures due to the volumetric shrinkage of newly grown silicide film during silicidation. Silicidation-induced stress of about 1 GPa was measured by inducing a reaction between a silicon wafer and a titanium film deposited on the wafer. The stress developed near the interface between the grown silicide film. The remaining silicon was analyzed using a finite-element method. The critical stress for delamination at the interface was determined by comparing the results of the estimated stress at the interface with the cross-sectional observation results of different interconnection-structures test samples. We also determined the critical thickness of TiSi2 and the diameter of silicide contacts for eliminating delamination at the interface.

Author(s):  
Van-Trang Nguyen ◽  
Minh-Quy Le

We study through molecular dynamics finite element method with Stillinger-Weber potential the uniaxial compression of (0, 24) armchair and (31, 0) zigzag black phosphorene nanotubes with approximately equal diameters. Young's modulus, critical stress and critical strain are estimated with various tube lengths. It is found that under uniaxial compression the (0, 24) armchair black phosphorene nanotube buckles, whereas the failure of the (31, 0) zigzag one is caused by local bond breaking near the boundary.


2001 ◽  
Author(s):  
Masaru Higa ◽  
Ikuya Nishimura ◽  
Hiromasa Tanino ◽  
Yoshinori Mitamura

Abstract The three-dimensional shape optimization of cemented total hip arthroplasty (THA) was introduced in this paper. The P-version Finite Element Method (FEM) combined with an optimization procedure was used to minimize the peak stress in the bone cement near the tip of the implant. Six-design variables were used in this study. Each variable represents the dimension of the medial-lateral width and anterior-posterior width of the three levels (proximal, distal and middle) of cross sectional area of the prosthesis. The results of the design optimization showed considerable reduction in stress concentration compared to the initial design that is currently used clinically.


Geophysics ◽  
1978 ◽  
Vol 43 (3) ◽  
pp. 550-562 ◽  
Author(s):  
H. M. Bibby

The finite element method is used to determine numerically the apparent resistivity anomaly caused by the presence of any body with a vertical axis of symmetry embedded in a uniform half‐space. The potential for a point source of current, and hence the apparent resistivity, is determined in the form of a Fourier series. The use of the finite element method enables certain classes of resistivity anisotropy to be modeled. Several examples of bipole‐dipole apparent resistivity enable us to examine assumptions that are necessarily made when inhomogeneities are approximated by models for which explicit solutions exist for the potential. An application to the Broadlands geothermal field suggests that the horizontal cross‐sectional area of the geothermal reservoir increases with depth, consistent with a decrease in the permeability with depth.


1980 ◽  
Vol 102 (3) ◽  
pp. 297-301 ◽  
Author(s):  
A. Hamed ◽  
E. Baskharone

The present analysis describes the three dimensional compressible inviscid flow in the scroll and the vaneless nozzle of a radial inflow turbine. The solution to this flow field, which is further complicated by the geometrical shape of the boundaries, is obtained using the finite element method. Symmetric and nonsymmetric scroll cross sectional geometries are investigated to determine their effect on the general flow field and on the exit flow condiitons.


2012 ◽  
Vol 525-526 ◽  
pp. 93-96
Author(s):  
Xue Cheng Ping ◽  
Lin Leng ◽  
Si Hai Wu

A super wedge tip element for application to a bi-material wedge is develop utilizing the thermo-mechanical stress and displacement field solutions in which the singular parts are numerical solutions. Singular stresses near apex of an arbitrary bi-material wedge under mechanical and thermal loading can be obtained from the coupling between the super wedge tip element and conventional finite elements. The validity of this novel finite element method is established through existing asymptotic solutions and conventional detailed finite element analysis.


2018 ◽  
Vol 49 ◽  
pp. 00073 ◽  
Author(s):  
Michał Musiał

This article presents the results of experimental research, carried out on the elements of vertical and internal blinds, containing phase-change material in its. The research was aimed at determining the significance of such factors as: ambient temperature, shape of profiles containing PCM and the intensity of their heating to the actual amount of energy required for complete melting of PCM Samples of aluminum profiles of various cross-sectional shapes containing commercial RT 28 phase-changing material. The author carried out the research presented below on the basis of a poly-selective orthogonal plan. The analysis was performed using the finite element method, in the Statistica 12 program. The obtained effects of the performed tests and the conducted analysis enabled an independent statistical evaluation of the factors of the approximate polynomial.


1996 ◽  
Vol 34 (3-4) ◽  
pp. 213-222 ◽  
Author(s):  
Claës Lindeborg ◽  
Niklas Wiberg ◽  
Alexander Seyf

This study concerns the dynamic behaviour of a primary sedimentation tank in a municipal WWTP. It is a part of the effort to estimate the varying biological load on the activated sludge stage under different operating conditions. The primary settlers have been investigated with several methods: (i) cross sectional sampling of suspended solids; (ii) tracer tests with lithium-solution; (iii) finite element method (FEM); (iv) flow measurement with a turbine-type sensor; and (v) cross-sectional flow measurement with a cross-bar metering device. The choice of measurement positions, the number of samples and the methods selected for analyses have all been guided by the ambition to avoid erroneous conclusions due to odd single measurement data. The study demonstrates how modern graphical computer methods like Finite Element Method and MATLAB Toolboxes can be used to increase our understanding of the settler.


2015 ◽  
Vol 137 (2) ◽  
Author(s):  
Fei Su ◽  
Zheng Zhang ◽  
Yuan Wang ◽  
Weijia Li

This study designed and produced a special microsolder specimen (Sn3.8Ag0.7Cu) to equalize current density under stressing. The specimen was generated to avoid temperature gradient and thermal migration. The inelastic deformation of the solder with electromigration (EM) alone was then measured with moiré interferometry. In addition, the EM-induced solder stress was evaluated using a finite element method (FEM). The precision of the FEM model was verified by comparing the simulated results with the experimental results with respect to EM-induced deformation. Findings indicated that the maximum spherical stress in the solder can reach 50 MPa. Moreover, the vacancy concentration is much higher on the cathode end than on the anode end. The simulation results can illustrate the failure mode of a solder and can therefore provide a basis for the comprehensive evaluation of solder reliability under EM.


Sign in / Sign up

Export Citation Format

Share Document