Characterization of Dislocations in GaAs Grown on Si and Ge

1987 ◽  
Vol 91 ◽  
Author(s):  
N.-H. Cho ◽  
S. Mckernan ◽  
C. B. Carter ◽  
B. C. De Cooman ◽  
K. Wagner
Keyword(s):  
Lattice Mismatch ◽  
Imaging Technique ◽  
Layer Structure ◽  
Misfit Dislocations ◽  
Structure Model ◽  
Polar Material ◽  
Weak Beam ◽  
Transmission Electron ◽  
Prepared Layer

ABSTRACTDislocations are produced at the interface between epilayers and the substrate when there is a lattice mismatch. When GaAs is grown on Ge substrates, these dislocations can propagate into the epilayers. They can then interact with one another or with antiphase boundaries which are generated when the polar-material is grown on a non-polar materials.The interactions between these defects have been investigated using the weak-beam imaging technique of transmission electron microscopy. Possible interactions between the misfit dislocations and heterojunctions were examined in a specially prepared layer structure model of GaAs-AlxGal−xAs.

A Weak Beam Imaging Technique for the Characterization of Interfacial Roughness in (InGa)As/GaAs Strained Layer Structures

1989 ◽  
Vol 159 ◽  
Author(s):  
J. Y. Yao ◽  
T. G. Andersson ◽  
G. L. Dunlop
Keyword(s):  
Imaging Technique ◽  
Interfacial Roughness ◽  
Strained Layers ◽  
Strained Layer ◽  
Weak Beam ◽  
Kinematic Theory ◽  
Transmission Electron ◽  
Layer Structures ◽  
Made In

ABSTRACTA transmission electron microscope weak beam imaging technique has been developed for the characterization of interfacial roughness in lattice strained (InGa)As/GaAs multiple layered structures. In this technique, the heterointerfaces of (100) type strained layers are imaged in an inclined projection with a g311 diffracted reflection at off-Bragg conditions which gives an enhanced contrast from variations in strained layer thickness. A calculation based on the kinematic theory of contrast was made in order to gain a better understanding of the contrast. The calculation suggests that the observed contrast is due to monolayer scale variations in thickness of the strained layers.

Dissociation of Misfit Dislocations in GeSi/{111}Si Interfaces

1993 ◽  
Vol 319 ◽  
Author(s):  
Frank Ernst
Keyword(s):  
Lattice Mismatch ◽  
Stacking Faults ◽  
Chemical Vapor ◽  
Interfacial Area ◽  
Dark Field ◽  
Dislocation Network ◽  
Misfit Dislocations ◽  
Si Substrates ◽  
Weak Beam ◽  
Transmission Electron

AbstractThe accommodation of lattice mismatch is studied in Ge0.15Si0.85 layers grown epitaxially on {111}-oriented Si substrates by chemical vapor deposition (CVD) at 1100°C. Weak beam dark field microscopy reveals a regular misfit dislocation network, which resembles the honeycomb network of edge-type dislocations anticipated by the O-lattice theory. In contrast to the latter, however, the real network exhibits extended nodes where the misfit dislocations dissociate into misfit partial dislocations. Between the partials, high resolution transmission electron microscopy (HRTEM) reveals intrinsic and extrinsic stacking faults. Owing to the presence of these stacking faults, three different atomistic structures of the GeSi/Si interface coexist and compete for the interfacial area according to their energy. The observed configuration is shown to minimize the total energy of the interface.

Characterization of ErAs/GaAs and GaAs/ErAs/GaAs Structures

1989 ◽  
Vol 160 ◽  
Author(s):  
Jane G. Zhu ◽  
Chris J. Palmstrøm ◽  
Suzanne Mounier ◽  
C. Barry Carter
Keyword(s):  
Electron Microscopy ◽  
High Resolution Electron Microscopy ◽  
Gaas Layer ◽  
Misfit Dislocations ◽  
Weak Beam ◽  
Transmission Electron ◽  
Resolution Electron ◽  
Small Grains ◽  
Major Defect

AbstractA series of ErAs/GaAs and GaAs/ErAs/GaAs epilayers have been grown on (100) GaAs substrates by molecular-beam epitaxy. Misfit dislocations at the ErAs/GaAs interface have been analyzed using the weak-beam technique of transmission electron microscopy. The microstructure of GaAs/ErAs/GaAs layers have been characterized using conventional and high-resolution electron microscopy. Twinning inside the upper GaAs layer is the major defect. Although the desired epitactic (100) GaAs on (100) ErAs does dominate, small grains of GaAs with (111) or {122} orientations have been observed at the GaAs/ErAs heterojunction.

Structural analysis of a Σ5 grain boundary in YBa2Cu3O7δ

1993 ◽  
Vol 51 ◽  
pp. 942-943
Author(s):  
J.-Y. Wang ◽  
Y. Zhu ◽  
A.H. King ◽  
M. Suenaga
Keyword(s):  
Grain Boundary ◽  
Lattice Mismatch ◽  
Weak Link ◽  
Coincidence Site Lattice ◽  
Large Angle ◽  
Dislocation Core ◽  
Superconducting Order Parameter ◽  
Outstanding Problem ◽  
Transmission Electron

One outstanding problem in YBa2Cu3O7−δ superconductors is the weak link behavior of grain boundaries, especially boundaries with a large-angle misorientation. Increasing evidence shows that lattice mismatch at the boundaries contributes to variations in oxygen and cation concentrations at the boundaries, while the strain field surrounding a dislocation core at the boundary suppresses the superconducting order parameter. Thus, understanding the structure of the grain boundary and the grain boundary dislocations (which describe the topology of the boundary) is essential in elucidating the superconducting characteristics of boundaries. Here, we discuss our study of the structure of a Σ5 grain boundary by transmission electron microscopy. The characterization of the structure of the boundary was based on the coincidence site lattice (CSL) model.Fig.l shows two-beam images of the grain boundary near the projection. An array of grain boundary dislocations, with spacings of about 30nm, is clearly visible in Fig. 1(a), but invisible in Fig. 1(b).

MBE Growth of Low Dislocation and High Mobility GaAs-on-Si

1986 ◽  
Vol 67 ◽  
Author(s):  
Jhang Woo Lee
Keyword(s):  
Layer Structure ◽  
High Mobility ◽  
Gaas Layer ◽  
Buffer Layers ◽  
Misfit Dislocations ◽  
Si Substrates ◽  
Molecular Beam Epitaxial ◽  
Transmission Electron ◽  
Low Dislocation Density ◽  
Molecular Beam Epitaxial Growth

ABSTRACTData is presented on the optimization of several molecular beam epitaxial growth processes to provide low dislocation density and high mobility GaAs single crystals on (100) Si wafers. The substrate tilt angle, the growth temperature, and the first buffer layer structure, were investigated Tor this purpose. Using Hall measurements the GaAs layers grown on 2 or 3-degree tilt (100) Si showed consistently high mobilities which are equivalent to the homoepitaxial GaAs mobility. Transmission electron microscopy (TEM) revealed that on tilted (100) Si substrates most of the misfit dislocations were confined within the first 50 Å GaAs layer by forming a type of edge dislocation at the Si surface step edges. Also low temperature grown buffer layers always gave better morphologies and lower etch pit densities while keeping the high mobilities on overgrown GaAs layers.

Characterization of Structural Defects in Germanium Epitaxially Grown on Nano-Structured Silicon

2011 ◽  
Vol 178-179 ◽  
pp. 43-49 ◽  
Author(s):  
Peter Zaumseil ◽  
Yuji Yamamoto ◽  
Joachim Bauer ◽  
Markus Andreas Schubert ◽  
Jana Matejova ◽  
...  
Keyword(s):  
Oxide Thickness ◽  
Growth Conditions ◽  
Structural Defects ◽  
Misfit Dislocations ◽  
Strain Partitioning ◽  
X Ray Diffraction ◽  
Reduced Pressure ◽  
Periodic Arrays ◽  
Transmission Electron

Selective epitaxial growth of germanium (Ge) on nano-structured Si(001) wafers is studied to evaluate the applicability of the nano-heteroepitaxy (NHE) approach on Ge-Si system. Based on a gate spacer technology established in advanced silicon microelectronics periodic arrays of nano-scaled Si islands are prepared, where Ge is deposited on top by reduced pressure CVD. The spacing of these structures is 360 nm. The structural perfection of the deposited Ge is investigated by transmission electron microscopy and X-ray diffraction. It is found that SiO2used as masking material is responsible for the suppression of the desired strain partitioning effect according to NHE. Even for 10 nm oxide thickness, the lattice of Ge layers deposited on Si nano-islands relaxes completely by generation of misfit dislocations at the interface. The occurrence of additional structural defects like stacking faults and micro twins can be controlled by suited growth conditions.

Strain Relaxation in GaN/AlN Films Grown on Vicinal and On-Axis SiC Substrates

2006 ◽  
Vol 527-529 ◽  
pp. 1513-1516
Author(s):  
J. Bai ◽  
X. Huang ◽  
Balaji Raghothamachar ◽  
Michael Dudley ◽  
B. Wagner ◽  
...  
Keyword(s):  
High Resolution ◽  
Lattice Mismatch ◽  
Strain Relaxation ◽  
Crystalline Quality ◽  
Misfit Dislocations ◽  
Vicinal Surface ◽  
Burgers Vector ◽  
Surface Steps ◽  
Transmission Electron ◽  
Initial Stage

Strain relaxation in the GaN/AlN/6H-SiC epitaxial system grown by vicinal surface epitaxy (VSE) is investigated and compared with that in on-axis epitaxy. High resolution x-ray diffraction (HRXRD) measurements show that GaN films grown by VSE have improved crystalline quality. High resolution transmission electron microscope (HRTEM) studies reveal that there are two types of misfit dislocations (MDs) at AlN/6H-SiC interfaces: 60˚ complete dislocations along <1120 > directions with Burgers vector 1/3<1120 > and 60˚ Shockley partials along <10 10 > directions with Burgers vector 1/3<10 10 >. The latter are usually geometrical partial misfit dislocations (GPMDs) that are dominant in VSE to accommodate the lattice mismatch and stacking sequence mismatch simultaneously. In VSE, it is the high-density GPMDs formed at the vicinal surface steps that facilitate rapid strain relaxation at the initial stage of deposition and hence lead to superior crystalline quality of the subsequently grown GaN films.

Growth of a-plane ZnO Thin Films on r-plane Sapphire by Plasma-assisted MBE

2005 ◽  
Vol 891 ◽  
Author(s):  
Junqing Q. Xie ◽  
J. W. Dong ◽  
A. Osinsky ◽  
P. P. Chow ◽  
Y. W. Heo ◽  
...  
Keyword(s):  
Thin Films ◽  
Lattice Mismatch ◽  
Defect Density ◽  
Zno Thin Films ◽  
Rf Plasma ◽  
Misfit Dislocations ◽  
Epitaxial Relationship ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Small Lattice

ABSTRACTZnO thin films have been epitaxially grown on r-plane sapphire by RF-plasma-assisted molecular beam epitaxy. X-ray diffraction (XRD) and transmission electron microscopy (TEM) studies indicate that the epitaxial relationship between ZnO and r-plane sapphire is (1120)ZnO // (1102)sapphire and [0001]ZnO // [1101]sapphire. Atomic force microscopy measurements reveal islands extended along the sapphire [1101] direction. XRD omega rocking curves for the ZnO (1120) reflection measured either parallel or perpendicular to the island direction suggest the defect density anisotropy along these directions. Due to the small lattice mismatch along the ZnO [0001] direction, few misfit dislocations were observed at the ZnO/Al2O3 interface in the high-resolution cross-sectional TEM image with the zone axis along the ZnO [1100] direction.

Microstructural and Electrical Characterization of Misfit Dislocations at the InAs/GaP Heterointerface

1997 ◽  
Vol 500 ◽  
Author(s):  
V. Gopal ◽  
T. P. Chin ◽  
A. L. Vasiliev ◽  
J. M. Woodall ◽  
E. P. Kvam
Keyword(s):  
Misfit Dislocation ◽  
Lattice Mismatch ◽  
Electrical Characterization ◽  
Growth Conditions ◽  
Misfit Dislocations ◽  
Ir Detectors ◽  
Mbe Growth ◽  
Transmission Electron ◽  
Hall Effect Measurements ◽  
Edge Dislocations

ABSTRACTInAs is a narrow band gap semiconductor with potential for such applications as IR detectors, low temperature transistors, etc‥ However, the lack of suitable substrates has hampered progress in the development of InAs based devices. In the present study, InAs was grown by Molecular Beam Epitaxy on (001) GaP substrates. Though this system has a high lattice mismatch, (∼11%), certain MBE growth conditions result in 80% relaxed InAs layers on GaP with the mismatch accommodated predominantly by 90° pure edge dislocations. Misfit dislocation microstructures were studied using Transmission Electron Microscopy. Electrical characterization using lateral conductance and Hall effect measurements were also performed. Preliminary results indicate the possibility of misfit dislocation related conductivity. The possible correlation between interface structure and electrical properties is discussed.

Structure Determination of Clusters Formed in Ultra-Low Energy High-Dose Implanted Silicon

2005 ◽  
Vol 108-109 ◽  
pp. 303-308 ◽  
Author(s):  
N. Cherkashin ◽  
Martin J. Hÿtch ◽  
Fuccio Cristiano ◽  
A. Claverie
Keyword(s):  
Electron Microscopy ◽  
Geometric Phase ◽  
Low Energy ◽  
High Dose ◽  
Dislocation Loops ◽  
Weak Beam ◽  
Transmission Electron ◽  
Geometric Phase Analysis

In this work, we present a detailed structural characterization of the defects formed after 0.5 keV B+ implantation into Si to a dose of 1x1015 ions/cm2 and annealed at 650°C and 750°C during different times up to 160 s. The clusters were characterized by making use of Weak Beam and High Resolution Transmission Electron Microscopy (HRTEM) imaging. They are found to be platelets of several nanometer size with (001) habit plane. Conventional TEM procedure based on defect contrast behavior was applied to determine the directions of their Burger’s vectors. Geometric Phase Analysis of HRTEM images was used to measure the displacement field around these objects and, thus, to unambiguously determine their Burger’s vectors. Finally five types of dislocation loops lying on (001) plane are marked out: with ] 001 [1/3 ≅ b and b ∝ [1 0 1], [-1 0 1], [0 1 1], [0 -1 1].

Sign in / Sign up

Export Citation Format

Share Document