In-Line Moisture Monitoring in Semiconductor Process Gases by a Reactive-Metal-Coated Quartz Crystal Microbalance

1997 ◽  
Vol 40 (2) ◽  
pp. 43-48
Author(s):  
Jian Wei ◽  
John Pillion ◽  
Chi Hoang
Keyword(s):  
Quartz Crystal Microbalance ◽  
Distribution System ◽  
Quartz Crystal ◽  
Limit Of Detection ◽  
Fast Response ◽  
Ionization Mass ◽  
Reactive Metal ◽  
Process Gas ◽  
Moisture Detection ◽  
Pressure Ionization Mass Spectrometry

A new in-line sensor for trace moisture monitoring has been developed based on a piezoelectric quartz crystal microbalance (QCM) coated with a reactive metal thin film. The properties of the metal coating and QCM allow the sensor to have fast response and fast recovery to moisture in the process gas stream. The properties of the metal-coated QCM also allow the sensor to be compact so it can be in-line in the gas distribution system and readily integrated into the process tools. This paper presents the principle of moisture detection using this technology. The experimental results of accuracy, limit of detection (< 1 ppb), and error analysis of this sensor in parallel with atmospheric pressure ionization mass spectrometry (APIMS) are presented. The experimental setup and procedures are described. The effect of an upstream gas purifier on its rate of response was also studied and the results are presented and discussed. The applications of this technology in semiconductor processing are briefly mentioned.

scholarly journals A Real-Time Method for Improving Stability of Monolithic Quartz Crystal Microbalance Operating under Harsh Environmental Conditions

Sensors ◽  
2021 ◽  
Vol 21 (12) ◽  
pp. 4166
Author(s):  
Román Fernández ◽  
María Calero ◽  
Yolanda Jiménez ◽  
Antonio Arnau
Keyword(s):  
Real Time ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Limit Of Detection ◽  
Quartz Substrate ◽  
Low Cost ◽  
Discrete Wavelet ◽  
Reagent Consumption ◽  
Measurement Cell ◽  
The Stability

Monolithic quartz crystal microbalance (MQCM) has recently emerged as a very promising technology suitable for biosensing applications. These devices consist of an array of miniaturized QCM sensors integrated within the same quartz substrate capable of detecting multiple target analytes simultaneously. Their relevant benefits include high throughput, low cost per sensor unit, low sample/reagent consumption and fast sensing response. Despite the great potential of MQCM, unwanted environmental factors (e.g., temperature, humidity, vibrations, or pressure) and perturbations intrinsic to the sensor setup (e.g., mechanical stress exerted by the measurement cell or electronic noise of the characterization system) can affect sensor stability, masking the signal of interest and degrading the limit of detection (LoD). Here, we present a method based on the discrete wavelet transform (DWT) to improve the stability of the resonance frequency and dissipation signals in real time. The method takes advantage of the similarity among the noise patterns of the resonators integrated in an MQCM device to mitigate disturbing factors that impact on sensor response. Performance of the method is validated by studying the adsorption of proteins (neutravidin and biotinylated albumin) under external controlled factors (temperature and pressure/flow rate) that simulate unwanted disturbances.

Fabrication and Formaldehyde-Sensing Property of Quartz Crystal Microbalance (QCM) Coated with PVP-MWCNTs Composites

2015 ◽  
Vol 645-646 ◽  
pp. 719-723 ◽  
Author(s):  
Ying Fei He ◽  
Ya Dong Jiang ◽  
Hui Ling Tai ◽  
Guang Zhong Xie
Keyword(s):  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Absorption Spectrometry ◽  
Fast Response ◽  
Formaldehyde Concentration ◽  
Multiwalled Carbon ◽  
Low Concentration ◽  
Spray Process ◽  
Formaldehyde Sensing ◽  
Low Concentration Formaldehyde

In this paper, the quartz crystal microbalance (QCM) sensors coated with polyvinyl pyrrolidone (PVP)-multiwalled carbon nanotubes (MCWNTs) nanocomposite thin films were developed by the spray process, which were used for the detection of low concentration formaldehyde at room temperature. The surface morphology and structure of films was analyzed by scanning electron microscope (SEM), UV-Vis absorption spectrometry, respectively, and the formaldehyde-sensing properties of sensors were investigated. The results showed that the prepared QCM gas sensor exhibited the linear characteristic, fast response, good reproducibility to low concentration formaldehyde within 6 ppm, and the poisoning of films was observed when the formaldehyde concentration exceeded 6ppm. Moreover, the sensitivity of the sensor could achieve up to 1Hz/ppm and had the good stability of response values.

Novel 4,4′-{(diphenylmethylene) bis(4,1-phenylene)bis(oxy)}-bridged ball-type phthalocyanines: Electrochemical, electrocatalytic oxygen reducing and heavy metals ions sensing properties

2016 ◽  
Vol 20 (08n11) ◽  
pp. 1319-1333 ◽  
Author(s):  
Elvan Doğan ◽  
Metin Özer ◽  
Ahmet Altındal ◽  
Ali Rıza Özkaya ◽  
Bekir Salih ◽  
...  
Keyword(s):  
Heavy Metal ◽  
Metal Ions ◽  
Quartz Crystal Microbalance ◽  
Metal Ion ◽  
Heavy Metal Ions ◽  
Quartz Crystal ◽  
Structural Difference ◽  
Ionization Mass ◽  
Metal Free ◽  
Quartz Crystal Microbalance Sensor

Novel 4,4′-{(diphenylmethylene)bis(4,1-phenylene)bis(oxy)} bridged ball-type metal-free, zinc(II), cobalt(II) and iron(II) ball-type metallophthalocyanines were achieved by the reaction of the bisphthalonitrile derivative in 2-dimetylaminoethanol. The isolation of the metal-free and metallophthalocyanines were carried out by both planar and column chromatography and also by hot soxhalet extraction. Their structures have been characterized by infrared, ultraviolet-visible,1H nuclear magnetic resonance and matrix assisted laser desorption/ionization mass spectroscopies. The redox characters of the ball-type metallophthalocyanines have been investigated by cyclic voltammetry, square wave voltammetry, controlled potential coulometry and spectroelectrochemistry in nonaqueous media. The investigation suggested that the ball-type complexes form ring-based and/or metal-based mixed-valence species as a result of the remarkable interaction between the two Pc rings and/or metal centers. Furthermore, these species were found to be stable as evidenced by the splitting of the relevant redox processes. The electrocatalytic oxygen reducing performances of the dinuclear ball-type complexes were also studied. The compound involving Fe(II) centers at the phthalocyanine cores displayed higher catalytic performance towards oxygen reduction than those of other ones. By using these compounds as sensing materials, a flow type quartz crystal microbalance sensor was developed for the detection of small concentrations of heavy metal ions. A cadmium ion sensitivity of 2.85 × 104Hz/mg.L[Formula: see text] was observed with ball-type iron(II) phthalocyanine coated quartz crystal microbalance sensor. Detection of other metal ions including Fe[Formula: see text], Zn[Formula: see text], Ag[Formula: see text] and Sn[Formula: see text] were also performed. The results indicated that 1– 4 functionalized quartz crystal microbalance sensors can be used for the detection of heavy metal ions in aqueous solution. Partition coefficients obtained from the linear response regimes of the calibration curves are in the 8.6 × 104–5.4 × 105range. Results show that the minor structural difference between metal free and metallophthalocyanine poses significant impact on metal ion partitioning.

scholarly journals Acoustic Immunosensing of Exosomes Using a Quartz Crystal Microbalance with Dissipation Monitoring

2019 ◽  
Author(s):  
Jugal Suthar ◽  
Edward Parsons ◽  
Bart Hoogenboom ◽  
Gareth Williams ◽  
Stefan Guldin
Keyword(s):  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Lipid Membrane ◽  
Acoustic Analysis ◽  
Limit Of Detection ◽  
Culture Media ◽  
Transmembrane Protein ◽  
Protein Profile ◽  
Size Exclusion ◽  
Label Free

Exosomes are endocytic lipid-membrane bound bodies with potential to be used as biomarkers in cancer and neurodegenerative disease. The limitations and scarcity of current exosome characterisation approaches has led to a growing demand for translational techniques, capable of determining their molecular composition and physical properties in physiological fluids. Here, we investigate label-free immunosensing, using a quartz crystal microbalance with dissipation (QCM-D), to detect exosomes by exploiting their surface protein profile. Exosomes expressing the transmembrane protein CD63 were isolated by size-exclusion chromatography from cell culture media. QCM-D sensors functionalised with anti-CD63 antibodies formed a direct immunoassay towards CD63-positive exosomes, exhibiting a limit-of-detection of 1.7x10^8 and 1.1x10^8 exosome sized particles (ESPs) ml^-1 for frequency and dissipation response respectively, i.e., clinically relevant concentrations. Our proof-of-concept findings support the adoption of dual-mode acoustic analysis of exosomes, leveraging both frequency and dissipation monitoring for use in diagnostic assays.

Hybrid hydrogel films with graphene oxide for continuous saliva-level monitoring

2020 ◽  
Vol 8 (28) ◽  
pp. 9655-9662 ◽  
Author(s):  
Zifeng Zhang ◽  
Qian Dou ◽  
Shiwen Wang ◽  
Debo Hu ◽  
Xiangdong Guo ◽  
...  
Keyword(s):  
Graphene Oxide ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Limit Of Detection ◽  
Hybrid Hydrogel ◽  
Saliva Level ◽  
Level Monitoring ◽  
Hydrogel Films

Hybrid hydrogel films with graphene oxide were designed and coated on a quartz crystal microbalance (QCM) to continuously monitor the saliva glucose, resulting in a greatly-improved limit of detection.

A New Concept for Development of Quartz Crystal Microbalance Fire Prevention Sensors Modified with Nano-Assembled Thin Films

2015 ◽  
Vol 10 (4) ◽  
pp. 595-603
Author(s):  
Seung-Woo Lee ◽  
Keyword(s):  
Thin Films ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Environmental Changes ◽  
Limit Of Detection ◽  
Fire Prevention ◽  
Layer By Layer ◽  
Base Interaction ◽  
Monitoring Devices ◽  
Acid Base Interaction

In this report, we describe a new concept for the development of quartz crystal microbalance (QCM) fire prevention sensors modified with nano-assembled thin films. The first example is the fabrication of QCM gas sensors based on alternate adsorption of TiO2and poly(acrylic acid) (PAA) for the sensitive detection of amine odors. The QCM sensors showed a linear response to ammonia at concentrations of 0.3--15 ppm, depending on the deposition cycle of the alternate TiO2/PAA layers. Ammonia binding is based on acid--base interaction with the free carboxylic acid groups of PAA, and the limit of detection of the 20-cycle TiO2/PAA400film under exposure to ammonia was estimated to be 0.1 ppm. The second example, monitoring of relative humidity, used porphyrin-based nano-assembled thin films prepared by a layer-by-layer approach on QCM resonators. These films were also used to detect significant environmental changes (due to smoke, humidity, or hazardous material release), and the results revealed that QCM-based real-environment monitoring devices can be implemented.

A fast-response and highly linear humidity sensor based on quartz crystal microbalance

2019 ◽  
Vol 283 ◽  
pp. 659-665 ◽  
Author(s):  
Xinyu Zheng ◽  
Rongrong Fan ◽  
Chunru Li ◽  
Xingyue Yang ◽  
Huizi Li ◽  
...  
Keyword(s):  
Quartz Crystal Microbalance ◽  
Humidity Sensor ◽  
Quartz Crystal ◽  
Fast Response

scholarly journals Pocket Mercury-Vapour Detection System Employing a Preconcentrator Based on Au-TiO2 Nanomaterials

Sensors ◽  
2021 ◽  
Vol 21 (24) ◽  
pp. 8255
Author(s):  
Emiliano Zampetti ◽  
Paolo Papa ◽  
Andrea Bearzotti ◽  
Antonella Macagnano
Keyword(s):  
Quartz Crystal ◽  
Limit Of Detection ◽  
Detection System ◽  
Low Cost ◽  
Fast Response ◽  
Mercury Vapour ◽  
Detection Capability ◽  
Frequency Shifts ◽  
Tio2 Nanomaterials ◽  
Sampling Times

In environments polluted by mercury vapors that are potentially harmful to human health, there is a need to perform rapid surveys in order to promptly identify the sources of emission. With this aim, in this work, a low cost, pocket-sized portable mercury measurement system, with a fast response signal is presented. It consists of a preconcentrator, able to adsorb and subsequently release the mercury vapour detected by a quartz crystal microbalance (QCM) sensor. The preconcentrator is based on an adsorbing layer of titania/gold nanoparticles (TiO2NP/AuNPs), deposited on a micro-heater that acts as mercury thermal desorption. For the detection of the released mercury vapour, gold electrodes QCM (20 MHz) have been used. The experimental results, performed in simulated polluted mercury-vapour environments, showed a detection capability with a prompt response. In particular, frequency shifts (−118 Hz ± 2 Hz and −30 Hz ± 2 Hz) were detected at concentrations of 65 µg/m3 Hg0 and 30 µg/m3 Hg0, with sampling times of 60 min and 30 min, respectively. A system limit of detection (LOD) of 5 µg/m3 was evaluated for the 30 min sampling time.

scholarly journals Acoustic Immunosensing of Exosomes Using a Quartz Crystal Microbalance with Dissipation Monitoring

2019 ◽  
Author(s):  
Jugal Suthar ◽  
Edward Parsons ◽  
Bart Hoogenboom ◽  
Gareth Williams ◽  
Stefan Guldin
Keyword(s):  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Lipid Membrane ◽  
Acoustic Analysis ◽  
Limit Of Detection ◽  
Culture Media ◽  
Transmembrane Protein ◽  
Protein Profile ◽  
Size Exclusion ◽  
Label Free

Exosomes are endocytic lipid-membrane bound bodies with potential to be used as biomarkers in cancer and neurodegenerative disease. The limitations and scarcity of current exosome characterisation approaches has led to a growing demand for translational techniques, capable of determining their molecular composition and physical properties in physiological fluids. Here, we investigate label-free immunosensing, using a quartz crystal microbalance with dissipation (QCM-D), to detect exosomes by exploiting their surface protein profile. Exosomes expressing the transmembrane protein CD63 were isolated by size-exclusion chromatography from cell culture media. QCM-D sensors functionalised with anti-CD63 antibodies formed a direct immunoassay towards CD63-positive exosomes, exhibiting a limit-of-detection of 1.7x10^8 and 1.1x10^8 exosome sized particles (ESPs) ml^-1 for frequency and dissipation response respectively, i.e., clinically relevant concentrations. Our proof-of-concept findings support the adoption of dual-mode acoustic analysis of exosomes, leveraging both frequency and dissipation monitoring for use in diagnostic assays.

scholarly journals Humidity Detection Using Metal Organic Framework Coated on QCM

2016 ◽  
Vol 2016 ◽  
pp. 1-8 ◽  
Author(s):  
Lakshmoji Kosuru ◽  
Adam Bouchaala ◽  
Nizar Jaber ◽  
Mohammad I. Younis
Keyword(s):  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Metal Organic Framework ◽  
Impedance Analysis ◽  
Resonance Frequencies ◽  
Recovery Times ◽  
Metal Organic ◽  
Response And Recovery ◽  
Moisture Detection ◽  
Organic Framework

Quartz crystal microbalance (QCM) coated with poly-4-vinylpyridine (PVP) and metal organic framework HKUST-1 are investigated and compared for humidity sensing. Drop casting method is employed to coat the PVP and HKUST-1 solutions onto the surface of a quartz crystal microbalance. The resonance frequencies of these sensors with varying relative humidity (RH) from 22% RH to 69% RH are measured using impedance analysis method. The sensitivity, humidity hysteresis, response, and recovery times of these sensors are studied. The sensitivities of uncoated, PVP, and HKUST-1 coated QCM sensors are 7 Hz, 48 Hz, and 720 Hz, respectively, in the range of 22% RH–69% RH. The extraction of desorption rate and adsorption energy associated with the adsorption and desorption of water molecules on these surfaces reveals that HKUST-1 has better sensing properties than PVP and uncoated QCM sensors. In this work, the HKUST-1 coated QCM is shown to be a promising material for moisture detection.

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