Performance Evaluation of GAA Nanosheet FET with Varied Geometrical and Process Parameters
Abstract Nanosheet Field Effect Transistor (NSFET) is a viable contender for future scaling in sub-7-nm technology. This paper provides insights into the variations of DC FOMs for different geometrical configurations of the NSFET. In this script, DC performance of 3D GAA NSFET is analyzed by varying the width, thickness of the device. Moreover, the gate length is scaled from 20 nm to 5 nm to check for the device suitability in logic applications. The thickness and width of each nanosheet are varied in the range of 5 to 9 nm, and 10 to 50 nm respectively to analyse the performance dependency on the geometry of the device. The impact of geometry of NSFET on various DC performance metrics like transfer characteristics, sub-threshold swing (SS), on current (ION), off current (IOFF), switching ratio (ION/IOFF), threshold voltage (Vth) and drain induced barrier lowering (DIBL) are studied. On top of that, the device’s electrical characteristics are analyzed for a wide range of temperatures from -43oC to 127oC to identify the temperature compensation point and is observed at VGS = 0.55 V and ID = 3.86 × 10−6 A. Furthermore, the important process parameter, work function variations on transfer characteristics of the device is analyzed. Moreover, the analyses tell that, for sub -7 nm, the NSFET is a potential device for high performance and good logic applications.