Optimizing Contact Resistance at a Resistor/Conductor Interface via Thin Film Microanalysis and Process Design of Experiments

1999 ◽  
Author(s):  
J.H. Linn ◽  
T.K. Thompson ◽  
M.G. Shlepr
Keyword(s):  
Thin Film ◽  
Contact Resistance ◽  
Amorphous Layer ◽  
Transmission Electron Microscopy Data ◽  
Silicon Carbon ◽  
Transmission Electron ◽  
Two Factors ◽  
Designed Experiment ◽  
Thin Film Resistors ◽  
Microscopy Data

Abstract Electrical data from chromium-silicon-carbon (CrSiC) thin film resistors (tfr) consistently showed highly variable contact resistance (Rc) to the aluminum (Al) interconnect. Transmission electron microscopy data from CrSiC/Al interfaces exhibiting high Rc showed a conformal, amorphous layer sandwiched between the tfr and Al. Auger data from the tfr/Al interface showed this ‘crud’ layer to contain increased C, S, and SiOx. Auger data from CrSiC films on test wafers exposed to the process steps before Al deposition showed additional growth of the ‘crud’ layer after each photoresist (PR) operation. In addition, Rc variability was reduced on product wafers from split lots when 2x the normal PR strip time was used compared to the normal strip time. A Designed Experiment (DOE) to examine improving the removal of this ‘crud’ layer was run on product lots utilizing two factors: the standard strip and a two-step strip. Electrical results for both Rc and die yield were significantly improved using the two-step process. The variability of the Rc was also reduced.

scholarly journals What makes a feather shine? A nanostructural basis for glossy black colours in feathers

2010 ◽  
Vol 278 (1714) ◽  
pp. 1973-1980 ◽  
Author(s):  
Rafael Maia ◽  
Liliana D'Alba ◽  
Matthew D. Shawkey
Keyword(s):  
Thin Film ◽  
Single Layer ◽  
Transmission Electron Microscopy Data ◽  
Specular Reflectance ◽  
Transmission Electron ◽  
Ordered Nanostructures ◽  
Thin Film Interference ◽  
Morphological Differences ◽  
Microscopy Data ◽  
Keratin Layer

Colours in feathers are produced by pigments or by nanostructurally organized tissues that interact with light. One of the simplest nanostructures is a single layer of keratin overlying a linearly organized layer of melanosomes that create iridescent colours of feather barbules through thin-film interference. Recently, it has been hypothesized that glossy (i.e. high specular reflectance) black feathers may be evolutionarily intermediate between matte black and iridescent feathers, and thus have a smooth keratin layer that produces gloss, but not the layered organization of melanosomes needed for iridescence. However, the morphological bases of glossiness remain unknown. Here, we use a theoretical approach to generate predictions about morphological differences between matte and glossy feathers that we then empirically test. Thin-film models predicted that glossy spectra would result from a keratin layer 110–180 nm thick and a melanin layer greater than 115 nm thick. Transmission electron microscopy data show that nanostructure of glossy barbules falls well within that range, but that of matte barbules does not. Further, glossy barbules had a thinner and more regular keratin cortex, as well as a more continuous underlying melanin layer, than matte barbules. Thus, their quasi-ordered nanostructures are morphologically intermediate between matte black and iridescent feathers, and perceived gloss may be a form of weakly chromatic iridescence.

Initial Dynamic Susceptibility of Maghemite Nanoparticles Dispersed in Surface-Treated Polymeric Template

2021 ◽  
Vol 21 (11) ◽  
pp. 5694-5697
Author(s):  
A. F. R. Rodriguez ◽  
R. F. Lacerda ◽  
L. E. Maggi ◽  
Hory Mohammadpour ◽  
Mohammad Niyaifar ◽  
...  
Keyword(s):  
Ex Situ ◽  
Transmission Electron Microscopy Data ◽  
Dynamic Susceptibility ◽  
Maghemite Nanoparticles ◽  
X Ray Diffraction ◽  
Chemical Treatments ◽  
Dynamical Susceptibility ◽  
Transmission Electron ◽  
Microscopy Data ◽  
Polymeric Template

Magnetic nanocomposites based on maghemite nanoparticles supported (ex situ route) on styrene- divinilbenzene (Sty-DVB) copolymer templates were produced and characterized for their structure and morphology. The as-produced nanocomposites were further chemically-treated with different oxidant agents and surface-coated with stearic acid. X-ray diffraction and transmission electron microscopy data show that the incorporated nanoparticles are preserved despite the aggressive chemical treatments employed. From the dynamical susceptibility measurements performed on the nanocomposites, the values of the saturation magnetization (76 emu/g) and the effective magnetic anisotropy (1.7 × 104 J/m3) were obtained, in excellent agreement with the values reported in the literature for maghemite. This finding strongly supports the preservation of the magnetic properties of the supported nanosized maghemite throughout the entire samples’ processing.

Effect of the Pulse Laser Radiation on the Stabilization of the ZrO2 and HFO2 High-Temperature Phases

2015 ◽  
Vol 245 ◽  
pp. 200-203 ◽  
Author(s):  
Maxim Alexandrovich Pugachevskii ◽  
Viktor Igorevich Panfilov
Keyword(s):  
High Temperature ◽  
Transmission Electron Microscopy Data ◽  
X Ray Diffraction ◽  
X Ray ◽  
Good Thermal Stability ◽  
Quantitative Content ◽  
Electron Microscopy Data ◽  
Cubic Phases ◽  
Transmission Electron ◽  
Microscopy Data

The conditions of formation of the ZrO2 and HfO2 high-temperature (tetragonal and cubic) phases in the ablated nanoparticles were investigated. X-ray diffraction and transmission electron microscopy data demonstrate that laser intensities above 109 W/m2 ensure the formation of the ZrO2 high-temperature phases, while intensities above 5·109 W/m2 do the formation of the HfO2 high-temperature phases. Quantitative content of the high-temperature phases in layers of the ablated nanoparticles increases with raising the intensity. The obtained nanoparticles exhibit good thermal stability.

A Critical Investigation on the Existence of Selective Microwave Absorption in the Synthesis of CdSe Quantum Dots

2014 ◽  
Vol 67 (9) ◽  
pp. 1180 ◽  
Author(s):  
Mojtaba Mirhosseini Moghaddam ◽  
C. Oliver Kappe
Keyword(s):  
Quantum Dots ◽  
Microwave Absorption ◽  
Transmission Electron Microscopy Data ◽  
Microwave Assisted Synthesis ◽  
Cdse Quantum Dots ◽  
X Ray Diffraction ◽  
Heating And Cooling ◽  
Transmission Electron ◽  
Microscopy Data ◽  
Heating Mode

The existence of selective microwave absorption phenomena in the synthesis of CdSe quantum dots has been investigated. These types of microwave effects involving selective microwave absorption by specific reagents have recently been proposed in the microwave-assisted synthesis of various nanoparticles. In the present study, the microwave synthesis of CdSe quantum dots was investigated according to a protocol published by Washington and Strouse to clarify the presence of selective microwave heating. Importantly, control experiments involving conventional conductive heating were executed under otherwise (except for the heating mode) identical conditions, ensuring the same heating and cooling profiles, stirring rates, and reactor geometries. Comparison of powder X-ray diffraction, UV-vis, photoluminescence, and transmission electron microscopy data of the obtained CdSe quantum dots reveals that identical types of nanoparticles are obtained independently of the heating mode. Therefore, no evidence for a selective microwave absorption phenomenon could be obtained.

Wafer Bonding of Diamond Films to Silicon for Silicon-on-Insulator Technology

2001 ◽  
Vol 686 ◽  
Author(s):  
Gleb N. Yushin ◽  
Scott D. Wolter ◽  
Alexander V. Kvit ◽  
Ramon Collazo ◽  
John T. Prater ◽  
...  
Keyword(s):  
Wafer Bonding ◽  
Diamond Films ◽  
Polycrystalline Diamond ◽  
Amorphous Layer ◽  
Silicon On Insulator ◽  
Acoustic Microscopy ◽  
Cross Sectional ◽  
Silicon Carbon ◽  
Transmission Electron ◽  
Silicon On Insulator Technology

AbstractPolycrystalline diamond films previously grown on silicon were polished to an RMS roughness of 15 nm and bonded to the silicon in a dedicated ultrahigh vacuum bonding chamber. Successful bonding under a uniaxial mechanical stress of 32 MPa was observed at temperatures as low as 950°C. Scanning acoustic microscopy indicated complete bonding at fusion temperatures above 1150°C. Cross-sectional transmission electron microscopy later revealed a 30 nm thick intermediate amorphous layer consisting of silicon, carbon and oxygen.

Short-range order in amorphous co-sputtered Ta-Al thin films

1986 ◽  
Vol 44 ◽  
pp. 860-861
Author(s):  
J.C. Barry ◽  
R.S. Timsit ◽  
D. Landheer
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Electron Microscope ◽  
High Resolution ◽  
Short Range ◽  
Short Range Order ◽  
Range Order ◽  
Transmission Electron ◽  
Thin Film Resistors ◽  
Diffraction Patterns

Tantalum-aluminium thin films have assumed considerable technological importance since the discovery in the late 1960's that the films are useful in the fabrication of thin film resistors and capacitors. It is generally claimed that these films, when prepared by co-sputtering Ta and Al, are amorphous over a range of Ta concentrations extending approximately from 15 to 75 at%, and are crystalline beyond this range. Diffuse electron diffraction patterns and ‘mottle pattern’ transmission electron micrographs are typical characteristics of the amorphous phase. In this present study we have attempted to identify any atomic short range order in the amorphous Ta-Al films and to follow the changes in this order as the Ta concentration increases across the amorphous/crystalline transition. The co-sputtered Ta-Al films of ≈100A thickness were examined in a high resolution 4000EX electron microscope (top entry, ±15°(x,y) tilt, Cs = 1.0mm ) at 400kV.

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