Studies on Chemical Methods to Expose Gate/Tunnel Oxide and Identification of Gate/Tunnel Oxide Defects in Wafer Fabrication

Author(s):  
Y. N. Hua ◽  
G. B. Ang ◽  
S. Redkar ◽  
Yogaspari ◽  
Wilma Richter

Abstract In failure analysis of wafer fabrication, currently, three different types of chemical methods including 6:6:1 (Acetic Acid/HNO3/HF), NaOH and Choline are used in removing polysilicon (poly) layer and exposing the gate/tunnel oxide underneath. However, usage is limited due to their disadvantages. For example, 6:6:1 is a relatively fast etchant, but it is difficult to control the etch time and keep the oxide layer intact. Also, while using NaOH to remove poly and expose the silicon oxide, the solution needs to be heated. It is also difficult to etch a poly layer with a WSix or a CoSix silicide using NaOH. In this paper, we will discuss these 3 etchants in terms of their advantages and disadvantages. We will then introduce a new poly etchant, called HB91. HB91 is useful for removing poly to expose the gate/tunnel oxide for identification of related defects. HB91 is actually a mixture of two chemicals namely nitric acid (HNO3) and buffer oxide etchant (BOE) in a 9:1 ratio. The experimental results show that it is highly selective in poly removal with respect to the gate/tunnel oxide and is a suitable poly etchant especially for removing polysilicon with/without WSix and CoSix in the large capacitor structure. Application results of this poly etchant (HB91) will be presented.

1974 ◽  
Vol 20 (4) ◽  
pp. 502-504 ◽  
Author(s):  
Daniel M Baer

Abstract Several technical difficulties diminish the usefulness of serum triglyceride estimation by the method of Stone and Thorp [Clin. Chim. Acta 14, 812 (1966)]. An artificial and somewhat unstable material is used in the standardization. Falsely elevated readings caused by scratched cuvettes are a frequent problem. Conventional quality-control procedures cannot be used because stable preparations are not available. Specimen stability is a greater problem than with conventional chemical methods. In spite of these difficulties, the method can be useful, if its limitations are recognized, in measurements made on nonfasting individuals.


2019 ◽  
Vol 9 (20) ◽  
pp. 4350 ◽  
Author(s):  
Minh Hieu Ho ◽  
Thien Bui-Thuan Do ◽  
Nhi Ngoc-Thao Dang ◽  
An Nguyen-My Le ◽  
Hanh Thi-Kieu Ta ◽  
...  

Green electrospinning has attracted great interest since non-toxic solvents were shown to be applicable in the fabrication of fibrous materials while ensuring health safety and environmental protection. Less harmful reagents such as acetone (AC) and acetic acid (AA) have been employed in this field in recent years. However, research in this area is still rare, yielding only preliminary results. In this study, two different types of solvents (pure AC and an AA/AC mixture) were used to fabricate electrospun polycaprolactone (PCL) membranes. Sample morphology, wettability, tensile strength, and chemical composition were compared between two types of membranes. Cell–scaffold interaction was also examined by cell adhesion and proliferation assays. The results demonstrate that the two types of solvents had significant effects on membrane morphology, physical strength, and cell adherence behaviors, which should be considered for different application purposes.


2021 ◽  
pp. 32-51
Author(s):  
Elena V. Generalova ◽  

The aim of the article is to review the ways of dictionary presentation of stable prepositional combinations and the factors essential for their lexical-grammatical status and the type of optimal lexicographic description. The object of the study is twocomponent prepositional combinations with stable meanings and the “preposition+noun” structure. The material of the article is data of different dictionaries of Russian presenting stable prepositional combinations. In the course of the study, the following questions were answered: why the definition and interpretation of the lexical-grammatical nature of stable prepositional combinations are so difficult and ambiguous; what lexicographic interpretation these units have in dictionaries of different types; what the advantages and disadvantages of different ways of dictionary interpretation of such language material are. The following methods were used: introspective (observation, generalization, classification), systematic lexicographic description according to dictionary parameters, dictionary definition analysis. The summary table of the lexicographic presentation of stable combinations allows seeing both the unresolved question of dictionary interpretation of such units and the patterns of their interpretation depending on the type of a dictionary. As a result of the analysis the following conclusions were drawn. 1) In modern Russian there is a rather large (about 2,000 units) class of language units (prepositional combinations), the lexical-grammatical status of which is not defined, and there is no term for their definition; this class is historically formed and continues to replenish. 2) The type of dictionary presentation of stable prepositional combinations is determined by the dictionary concept, grammatical and syntactic properties, presence of figurative meaning and possibility of component variation of such combinations. 3) The unresolved theoretical issues have as a result the lexicographic discrepancy in the presentation of these language units. Extreme lexicographic solutions are a separate dictionary entry for each combination and the presentation of such units only as stable combinations in the entry of a noun (presented in academic explanatory dictionaries). 4) Taking into account only the factor of presence/absence of a gap seems to formalize the dictionary presentation of adverbs with both conjoined and split spelling, really existing in Russian, and the position of recognition of these units with independent words and their isolate presentation is not impeccable for dictionary users. 5) In the author’s opinion, the presentation of stable prepositional combinations exclusively as independent vocabules is inferior to the traditional lexicographic approach because the isolated presentation of this material breaks the semantic connections of these complex lexical units; the most complex issue is the differentiation of adverbs with split spelling and stable combinations.


Studia BAS ◽  
2021 ◽  
Vol 1 (65) ◽  
pp. 147-169
Author(s):  
Katarzyna Wójtowicz

The aim of this paper is to explore the rationale for the reform of the shares of local government units (LGUs) in national income taxes in Poland as well as to evaluate the selected proposals for changes in this area. The paper begins by outlining the definition and the basic features of tax sharing in the context of fiscal federalism. The next section provides an overview of the tax shares operating in some OECD countries. The main part of the article focuses on the key principles of the tax sharing system in Poland. The author briefly examines the fiscal efficiency of this source of local revenue in different types of Polish LGUs and the most significant dysfunctions of Polish local tax shares. The final section investigates the most important proposals for the reform of tax sharing and discusses their advantages and disadvantages.


2011 ◽  
Vol 403-408 ◽  
pp. 1776-1780
Author(s):  
Yan Ma ◽  
Chun Lan Ma

This article focuses on FECs which is an error correction coding method and its applications in Internet and wireless communications. First, this article begins with the principles and the types of FECs. Then some typical applications n Internet and Wireless communications for each type of FECs are outlined. The next step is a comparison of the advantages and disadvantages between different types of FECs.


Author(s):  
О. A Hodoskina ◽  
О. Y Moiseienkova

Purpose. Currently, the organization of sales at the enterprise is the main and continuous process that provides the enterprise with its economic efficiency and bringing the goods to the consumer. The purpose of this work is to analyze and compare modes of transport and its role in the marketing of products by an enterprise. Methodology. To build a model for the marketing activity of an enterprise, as well as when modeling the mechanism of functioning of its organizational, economic and production structure and the place of transport in the structure of an industrial enterprise, elements of economic and mathematical modeling were used. Analysis of the data obtained allows you to choose the best method of transportation, which is extremely important to ensure that the needs of the enterprise, as well as the needs of consumers, are met. Findings. Marketing and logistics services of the enterprise need, having studied all the advantages and disadvantages of all types of transport, to choose the most optimal mode of transport when transporting goods. For the sale of its products, the enterprise should take into account that over time, the costs of different types of transport may change, and the transportation schemes should be revised. The paper compares the modes of transport and the structure of freight turnover by mode of transport (as a percentage of the total). Originality. The use of a mathematical apparatus in the construction of functional dependencies that make up a general economic and mathematical model that characterizes the organization of the marketing activities of an enterprise will allow not only to identify «weak» points, but also to adjust the marketing policy of the enterprise accordingly, relying not on abstract conclusions, but on the obtained clear dependencies. Practical value. The result is, first of all, a reduction in costs in the marketing policy of the enterprise and an increase in competitiveness, an increase in profits and maximum satisfaction of consumer requirements.


2021 ◽  
Vol 8 (1) ◽  
pp. F11-F18
Author(s):  
S.M. Vaneev ◽  
V.S. Martsynkovskyy ◽  
A. Kulikov ◽  
D.V. Miroshnichenko ◽  
Ya.І. Bilyk ◽  
...  

The creation of energy-saving turbogenerators is an essential component of the development of small energy systems. The gradual growth of interest in distributed electricity generation necessitates the constant improvement of these units. Moreover, they implement a more environmentally friendly generation method than when using microturbine units that use fuel to carry out the work process. Nowadays, turbogenerators are created based on different types of expansion machines, which have their advantages and disadvantages, given in this article. Compared to competitors, vortex expansion machines have good prospects and the necessary potential to expand their research and produce turbogenerators. An experimental vortex expansion machine with a peripheral-lateral channel and ability to change the geometric parameters of its flowing part was created to meet these needs. Experimental studies of the machine were performed on a special stand with air as a working fluid. As a result of the tests, the data were successfully obtained and processed. They are presented in the form of tables and graphical dependencies. The nature of the influence of thermodynamic parameters and geometric parameters of the flow part on the efficiency of the vortex expansion machine and turbogenerator based on it to further improve and create new turbogenerators is clarified.


2018 ◽  
Vol 4 (3) ◽  
pp. 594 ◽  
Author(s):  
Davood Akbarimehr ◽  
Esmael Aflaki

With respect to the increasing production of tire wastes, the use of these wastes as an additive in civil engineering has always gained attentions of researchers due to their positive effects on material properties and reduction of environmental problems. Clay soils, as problematic soils, have always caused geotechnical problems including high Atterberg limits and consequently low workability. Tire powder, as one of the products of tire wastes, lacks clay cohesion and it can be effective in altering the plasticity of clay soils. As no comprehensive study has been conducted in this regard specifically on Tehran clay soil yet, this research studies experimentally the effect of adding different percentages of tire powder to clay soil at the Atterberg limits of clay soils with two different types of plasticity. More over according to previous studies, the effect of tire powder on other geotechnical properties of clay soils and the advantages and disadvantages of using tire powder in clay soils are discussed. The results indicate that addition of tire powder to clay soils has positive effects on reducing the Atterberg limits, increasing efficiency, and improving resistance, permeability, swelling reduction, and settlement properties, and reducing soil density and it can be used as an additive in improving clay soils.


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