The Helium Ion Microscope for High Resolution Imaging, Materials Analysis, Circuit Edit and FA Applications

2009 ◽  
Author(s):  
William B. Thompson ◽  
John Notte ◽  
Larry Scipioni ◽  
Mohan Ananth ◽  
Lewis Stern ◽  
...  
Keyword(s):  
Ion Source ◽  
Injection System ◽  
Analysis Tool ◽  
High Resolution Imaging ◽  
Ion Imaging ◽  
Materials Analysis ◽  
Ion Optics ◽  
Helium Ion ◽  
Scanning Transmission ◽  
Resolution Imaging

Abstract Currently, the helium ion microscope (HIM) can be operated in three imaging modes; ion induced secondary electron (SE) mode, Rutherford backscatter imaging (RBI) mode, and scanning transmission ion imaging (STIM) mode. This paper will provide an overview of microscope’s ion source, its ion optics, the system architecture, the fundamentals of these three imaging modes and many FA related examples. Recently integrated with the microscope are a Rutherford Backscatter (RBS) detector for materials analysis and a gas injection system (GIS) for material modification. We will describe this new hardware and suggest how these additions could also contribute to the helium ion microscope being an important failure analysis tool.

scholarly journals X-Ray Imaging: Status and Trends

1987 ◽  
Vol 31 ◽  
pp. 35-52 ◽  
Author(s):  
R.W. Ryon ◽  
H.E. Martz ◽  
J.M. Hernandez ◽  
J.J. Haskins ◽  
R.A. Day ◽  
...  
Keyword(s):  
High Resolution ◽  
High Resolution Imaging ◽  
Rapid Progress ◽  
Optical Elements ◽  
Materials Analysis ◽  
X Ray ◽  
X Ray Imaging ◽  
Status And Trends ◽  
Resolution Imaging ◽  
Material Fabrication

There is a veritable renaissance occurring in x-ray imaging. X-ray imaging by radiography has been a highly developed technology in medicine and industry for many years. However, high resolution imaging has not generally been practical because sources have been relatively dim and diffuse, optical elements have been nonexistant for most applications, and detectors have been slow and of low resolution. Materials analysis needs have therefore gone unmet. Rapid progress is now taking place because we are able to exploit developments in microelectronics and related material fabrication techniques, and because of the availability of intense x-ray sources.

scholarly journals Functional Collaborative Remote Microscopy: Inter-Continental Atomic Resolution Imaging

2008 ◽  
Vol 16 (3) ◽  
pp. 46-49
Author(s):  
J. M. Perkins ◽  
D. A. Blom ◽  
D. W. McComb ◽  
L. F. Allard
Keyword(s):  
Electron Microscopy ◽  
High Resolution Imaging ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Resolution Imaging ◽  
Electron Microscopes ◽  
Realtime Control ◽  
Aberration Corrected ◽  
Instantaneous Control ◽  
Remote Microscopy

In recent years the development of remote microscopy, specifically in electron microscopes, has begun to emerge as a useful research tool rather than simply an educational or teaching aid. Scientists have long been able to work collaboratively at a distance; however, it is often in terms of receiving data or sending some instructions where there may be a delay in receipt of the information. When defining remote control it is important to note that electron microscopy requires instantaneous control and receipt of the feedback (in most cases via images on a screen). Without realtime control it is impossible to conduct high resolution imaging and analysis work. In terms of electron microscopy, there are several reasons for conducting experiments remotely: With sub-Ångström aberration-corrected scanning transmission electron microscopes, the environment within which the microscope itself sits is of utmost importance.

High Resolution Imaging Of The Rat Kidney Epithelium By Helium Ion Microscopy

2012 ◽  
Vol 18 (S2) ◽  
pp. 828-829
Author(s):  
W.L. Rice ◽  
A. Van Hoek ◽  
D. Brown ◽  
C. Huynh ◽  
L. Scipioni
Keyword(s):  
High Resolution ◽  
Rat Kidney ◽  
High Resolution Imaging ◽  
Helium Ion ◽  
Resolution Imaging ◽  
Ion Microscopy

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Contrast Mechanisms and Image Formation in Helium Ion Microscopy

2009 ◽  
Vol 15 (2) ◽  
pp. 147-153 ◽  
Author(s):  
David C. Bell
Keyword(s):  
Imaging System ◽  
Ion Source ◽  
Ion Imaging ◽  
Small Surface ◽  
Surface Sensitivity ◽  
Helium Ion ◽  
Contrast Mechanisms ◽  
Ion Microscopy ◽  
Imaging Instrument ◽  
Enhanced Surface

AbstractThe helium ion microscope is a unique imaging instrument. Based on an atomic level imaging system using the principle of field ion microscopy, the helium ion source has been shown to be incredibly stable and reliable, itself a remarkable engineering feat. Here we show that the image contrast is fundamentally different to other microscopes such as the scanning electron microscope (SEM), although showing many operational similarities due to the physical ion interaction mechanisms with the sample. Secondary electron images show enhanced surface contrast due the small surface interaction volume as well as elemental contrast differences, such as for nanowires imaged on a substrate. We present images of nanowires and nanoparticles for comparison with SEM imaging. Applications of Rutherford backscattered ion imaging as a unique and novel imaging mechanism are described. The advantages of the contrast mechanisms offered by this instrument for imaging nanomaterials are clearly apparent due to the high resolution and surface sensitivity afforded in the images. Future developments of the helium ion microscope should yield yet further improvements in imaging and provide a platform for continued advances in microscope science and nanoscale research.

Alternative approaches to ultra-high resolution imaging

1991 ◽  
Vol 49 ◽  
pp. 650-651
Author(s):  
J.M. Cowley
Keyword(s):  
High Resolution ◽  
High Voltage ◽  
High Resolution Electron Microscopy ◽  
Crystal Defects ◽  
High Resolution Imaging ◽  
General Applicability ◽  
Resolution Electron ◽  
Radiation Resistant ◽  
Resolution Imaging ◽  
Alternative Approaches

By extrapolation of past experience, it would seem that the future of ultra-high resolution electron microscopy rests with the advances of electron optical engineering that are improving the instrumental stability of high voltage microscopes to achieve the theoretical resolutions of 1Å or better at 1MeV or higher energies. While these high voltage instruments will undoubtedly produce valuable results on chosen specimens, their general applicability has been questioned on the basis of the excessive radiation damage effects which may significantly modify the detailed structures of crystal defects within even the most radiation resistant materials in a period of a few seconds. Other considerations such as those of cost and convenience of use add to the inducement to consider seriously the possibilities for alternative approaches to the achievement of comparable resolutions.

4-dimensional, high-resolution imaging of living cells

1992 ◽  
Vol 50 (1) ◽  
pp. 416-417
Author(s):  
Shinya Inoué
Keyword(s):  
Light Microscope ◽  
Living Cells ◽  
Live Cells ◽  
Video Tape ◽  
Active Living ◽  
High Resolution Imaging ◽  
3 Dimensional ◽  
Dynamic Architecture ◽  
Resolution Imaging ◽  
Disk Memory

This paper reports progress of our effort to rapidly capture, and display in time-lapsed mode, the 3-dimensional dynamic architecture of active living cells and developing embryos at the highest resolution of the light microscope. Our approach entails: (A) real-time video tape recording of through-focal, ultrathin optical sections of live cells at the highest resolution of the light microscope; (B) repeat of A at time-lapsed intervals; (C) once each time-lapsed interval, an image at home focus is recorded onto Optical Disk Memory Recorder (OMDR); (D) periods of interest are selected using the OMDR and video tape records; (E) selected stacks of optical sections are converted into plane projections representing different view angles (±4 degrees for stereo view, additional angles when revolving stereos are desired); (F) analysis using A - D.

Aspects of high-resolution imaging with a scanning ion microprobe

1986 ◽  
Vol 44 ◽  
pp. 750-751
Author(s):  
R. Levi-Setti ◽  
J. M. Chabala ◽  
Y. L. Wang
Keyword(s):  
Metal Ion ◽  
Secondary Ion Mass Spectrometry ◽  
Chromatic Aberration ◽  
Ion Source ◽  
Ion Microprobe ◽  
Emission Pattern ◽  
Intrinsic Resolution ◽  
Resolution Imaging ◽  
20 Nm ◽  
Secondary Ion

We have shown the feasibility of 20 nm lateral resolution in both topographic and elemental imaging using probes of this size from a liquid metal ion source (LMIS) scanning ion microprobe (SIM). This performance, which approaches the intrinsic resolution limits of secondary ion mass spectrometry (SIMS), was attained by limiting the size of the beam defining aperture (5μm) to subtend a semiangle at the source of 0.16 mr. The ensuing probe current, in our chromatic-aberration limited optical system, was 1.6 pA with Ga+ or In+ sources. Although unique applications of such low current probes have been demonstrated,) the stringent alignment requirements which they imposed made their routine use impractical. For instance, the occasional tendency of the LMIS to shift its emission pattern caused severe misalignment problems.

Performance and applications of a field-emission gun TEM/STEM

1992 ◽  
Vol 50 (2) ◽  
pp. 942-943
Author(s):  
Judith M. Brock ◽  
Max T. Otten ◽  
Marc. J.C. de Jong
Keyword(s):  
Field Emission ◽  
High Resolution Imaging ◽  
High Quality ◽  
Small Energy ◽  
High Brightness ◽  
Small Probe ◽  
Resolution Imaging ◽  
Convergent Beam ◽  
Beam Patterns ◽  
Beam Diffraction

A Field Emission Gun (FEG) on a TEM/STEM instrument provides a major improvement in performance relative to one equipped with a LaB6 emitter. The improvement is particularly notable for small-probe techniques: EDX and EELS microanalysis, convergent beam diffraction and scanning. The high brightness of the FEG (108 to 109 A/cm2srad), compared with that of LaB6 (∼106), makes it possible to achieve high probe currents (∼1 nA) in probes of about 1 nm, whilst the currents for similar probes with LaB6 are about 100 to 500x lower. Accordingly the small, high-intensity FEG probes make it possible, e.g., to analyse precipitates and monolayer amounts of segregation on grain boundaries in metals or ceramics (Fig. 1); obtain high-quality convergent beam patterns from heavily dislocated materials; reliably detect 1 nm immuno-gold labels in biological specimens; and perform EDX mapping at nm-scale resolution even in difficult specimens like biological tissue.The high brightness and small energy spread of the FEG also bring an advantage in high-resolution imaging by significantly improving both spatial and temporal coherence.

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