EBAC for Isolating Partially-Localized FEOL Electrical Shorts on Test Structures during Sub-14 nm Technology Development

2017 ◽  
Author(s):  
John Masnik ◽  
Noor Jehan Saujauddin ◽  
Kevin Davidson ◽  
Esther P.Y. Chen ◽  
Felix Beaudoin
Keyword(s):  
High Resolution ◽  
Case Studies ◽  
Technology Development ◽  
Static Technique

Abstract EBAC is a high-resolution, static technique that can be used for isolating electrical shorts, but it begins to fail for large, interconnected, test structures. In such cases, localization can be achieved when combined with optical localization techniques such as OBIRCH. This paper presents two case studies of subtle, FEOL shorts on a sub-14nm technology that required the resolution of EBAC

Nanoprobing and EBAC for Improving Failure Analysis Success Rates on Sub-14nm Logic and SRAM

2018 ◽  
Author(s):  
John Masnik ◽  
Noor Jehan Saujauddin ◽  
Kevin Davidson ◽  
Esther P.Y. Chen
Keyword(s):  
High Resolution ◽  
Failure Analysis ◽  
Case Studies ◽  
Electrical Measurement ◽  
Success Rates ◽  
Electron Microscopic ◽  
Microscopic Scale ◽  
Static Technique

Abstract Nanoprobing, electrical probing (DC electrical measurement of semiconductors using nanoscale probes) on an electron microscopic scale, and EBAC, a high-resolution, static technique, can be used for isolating defects and improving failure analysis success rates on both logic and SRAM devices. This paper presents three case studies of subtle defects on a technology beyond 14nm that required nanoprobing.

SEM-Based Nanoprobing on 40, 32 and 28 nm CMOS Devices Challenges for Semiconductor Failure Analysis

2013 ◽  
Author(s):  
Erik Paul ◽  
Holger Herzog ◽  
Sören Jansen ◽  
Christian Hobert ◽  
Eckhard Langer
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Failure Analysis ◽  
Case Studies ◽  
State Of The Art ◽  
Root Cause ◽  
Highly Efficient ◽  
Technology Nodes ◽  
Scanning Electron

Abstract This paper presents an effective device-level failure analysis (FA) method which uses a high-resolution low-kV Scanning Electron Microscope (SEM) in combination with an integrated state-of-the-art nanomanipulator to locate and characterize single defects in failing CMOS devices. The presented case studies utilize several FA-techniques in combination with SEM-based nanoprobing for nanometer node technologies and demonstrate how these methods are used to investigate the root cause of IC device failures. The methodology represents a highly-efficient physical failure analysis flow for 28nm and larger technology nodes.

Radargrammetric Digital Surface Models Generation from High Resolution Satellite SAR Imagery: Methodology and Case Studies

2015 ◽  
pp. 233-240 ◽  
Author(s):  
Andrea Nascetti ◽  
Paola Capaldo ◽  
Francesca Pieralice ◽  
Martina Porfiri ◽  
Francesca Fratarcangeli ◽  
...  
Keyword(s):  
High Resolution ◽  
Case Studies ◽  
Surface Models ◽  
Sar Imagery

Introduction to this special section: Seismic imaging below complex overburdens

2021 ◽  
Vol 40 (5) ◽  
pp. 322-323
Author(s):  
Eric Duveneck ◽  
Michael Kiehn
Keyword(s):  
Case Studies ◽  
Model Building ◽  
Seismic Imaging ◽  
Technology Development ◽  
Special Section ◽  
Shallow Gas ◽  
Imaging Algorithm ◽  
Model Acquisition

Despite decades of technology development and experience, seismic imaging below complex overburdens, such as salt bodies, basalt flows, or shallow gas accumulations, remains a challenge. For successful imaging in such settings, a number of key elements need to be in place: the overburden complexity needs to be properly captured and represented in the subsurface model (acquisition/model building), the target below the complex overburden needs to be sufficiently well illuminated (acquisition), and, finally, the target needs to be properly imaged through the complex overburden (imaging algorithm). All of these elements are discussed in the papers collected in this special section, which consists of contributions that demonstrate recent technology developments as well as insightful case studies that show how the different elements come together to make a successful imaging project.

Embodied Digital Rhetoric

2014 ◽  
pp. 312-327 ◽  
Author(s):  
Nonny de la Peña
Keyword(s):  
Virtual Reality ◽  
High Resolution ◽  
Case Studies ◽  
Philosophy Of Mind ◽  
Digital Rhetoric ◽  
Immersive Virtual Reality ◽  
The World ◽  
Technological Tools ◽  
Pass Through

A new embodied digital rhetoric emerges when using nonfiction narratives built in fully immersive virtual reality systems that take advantage of the plasticity of our sensations of presence. The feeling of “being-in-the-world” as described by phenomenologists, including philosophy of mind, film, and virtual reality theorists, is part of the adaptability that humans show in their relationship to technological tools. Andy Clark's “soft selves” and our “plastic presence” merge as the high resolution graphics of the latest virtual reality goggles and robust audio captured at real events tricks our minds into having an embodied connection with the stories portrayed in these new spaces. By putting people into news or documentary pieces on scene as themselves, opportunities for persuasive and effective rhetoric arise. This chapter cites theory, psychology and virtual reality research as well as the author's specific case studies to detail the potential for this new embodied digital rhetoric that allows us to pass through the screen and become present as witnesses to a nonfiction story.

Technology Adoption and Economic Development

2012 ◽  
pp. 58-73
Author(s):  
Taiwo E. Mafimisebi
Keyword(s):  
Economic Development ◽  
Technology Adoption ◽  
Case Studies ◽  
Agricultural Sector ◽  
Technology Development ◽  
Adoption Process ◽  
Agricultural Technologies ◽  
Improved Varieties ◽  
Cultural Conditions ◽  
African Agriculture

Africa’s economic development will result from conscious efforts directed towards diversification and increased productivity in its low-performing agricultural sector. Technology development, transfer and uptake, which are low for now, are indispensible necessities in this respect. The purpose of this chapter is to review the characteristics, importance, constraints and technology adoption process of African agriculture to identify factors that enhance or hinder technology uptake. This is with a view to isolating lessons for developers or packagers of new agricultural or other technologies for Africa, especially nanotechnology and microelectronics which are evolving and transformational. The attributes of technologies that have made desired impact in African agriculture included cheapness, simplicity, observability, visibility of results, usefulness, compatibility with existing technologies and farm- or farmer-specific socio-economic or socio-cultural conditions. Case studies of the welfare-enhancing impacts of adopted agricultural technologies were examined under use of fertilizers, improved varieties and biotechnology. Useful lessons for development and transfer of nanotechnology and micro-electronics to Africa were highlighted.

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