scholarly journals In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor

2021 ◽  
Vol 8 ◽  
Author(s):  
Rui Ma ◽  
Weiguo Liu ◽  
Xueping Sun ◽  
Shun Zhou
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Electromechanical Coupling ◽  
Substrate Material ◽  
Electromechanical Coupling Coefficient ◽  
Bonding Layer ◽  
Saw Sensor ◽  
Rayleigh Mode

This paper studied the manufacturing process of Piezoelectric-on-Silicon (POS) substrate which integrates 128° Y–X Lithium niobate thin film and silicon wafer using Smart-Cut technology. The blistering and exfoliation processes of the He as-implanted LN crystal under different annealing temperatures are observed by the in-situ method. Unlike the conventional polishing process, the stripping mechanism of the Lithium niobate thin film is changed by controlling annealing temperature, which can improve the surface morphology of the peeling lithium niobate thin film. We prepared the 128° Y–X POS substrate with high single-crystal Lithium niobate thin film and surface roughness of 3.91 nm through Benzocyclobutene bonding. After simulating the surface acoustic wave (SAW) characteristics of the POS substrate, the results demonstrate that the Benzocyclobutene layer not only performs as a bonding layer but also can couple more vibrations into the LN thin film. The electromechanical coupling coefficient of the POS substrate is up to 7.59% in the Rayleigh mode when hLN/λ is 0.3 and hBCB/λ is 0.1. Therefore, as a high-performance substrate material, the POS substrate has proved to be an efficient method to miniaturize and integrate the SAW sensor.

scholarly journals Effects of Thermal Annealing on the Characteristics of High Frequency FBAR Devices

Coatings ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 397
Author(s):  
Yu-Chen Chang ◽  
Ying-Chung Chen ◽  
Bing-Rui Li ◽  
Wei-Che Shih ◽  
Jyun-Min Lin ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Annealing ◽  
Electromechanical Coupling ◽  
Zno Thin Films ◽  
Electromechanical Coupling Coefficient ◽  
Back Side ◽  
Zno Thin Film ◽  
Frequency Responses ◽  
Sputtering System

In this study, piezoelectric zinc oxide (ZnO) thin film was deposited on the Pt/Ti/SiNx/Si substrate to construct the FBAR device. The Pt/Ti multilayers were deposited on SiNx/Si as the bottom electrode and the Al thin film was deposited on the ZnO piezoelectric layer as the top electrode by a DC sputtering system. The ZnO thin film was deposited onto the Pt thin film by a radio frequency (RF) magnetron sputtering system. The cavity on back side for acoustic reflection of the FBAR device was achieved by KOH solution and reactive ion etching (RIE) processes. The crystalline structures and surface morphologies of the films were analyzed by X-ray diffraction (XRD) and field emission scanning electron microscope (FE-SEM). The optimized as-deposited ZnO thin films with preferred (002)-orientation were obtained under the sputtering power of 80 W and sputtering pressure of 20 mTorr. The crystalline characteristics of ZnO thin films and the frequency responses of the FBAR devices can be improved by using the rapid thermal annealing (RTA) process. The optimized annealing temperature and annealing time are 400 °C and 10 min, respectively. Finally, the FBAR devices with structure of Al/ZnO/Pt/Ti/SiNx/Si were fabricated. The frequency responses showed that the return loss of the FBAR device with RTA annealing was improved from −24.07 to −34.66 dB, and the electromechanical coupling coefficient (kt2) was improved from 1.73% to 3.02% with the resonance frequency of around 3.4 GHz.

scholarly journals Fabrication of High-Performance Thin-Film Composite Nanofiltration Membrane by Dynamic Calcium-Carboxyl Intra-Bridging during Post-Treatment

Membranes ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 137
Author(s):  
Hongyi Han ◽  
Ruobin Dai ◽  
Zhiwei Wang
Keyword(s):  
Thin Film ◽  
Water Purification ◽  
High Performance ◽  
Rejection Rate ◽  
Post Treatment ◽  
Nanofiltration Membrane ◽  
Film Composite ◽  
Thin Film Composite ◽  
Post Modification

Widespread applications of nanofiltration (NF) and reverse osmosis (RO)-based processes for water purification and desalination call for high-performance thin-film composite (TFC) membranes. In this work, a novel and facile modification method was proposed to fabricate high-performance thin-film composite nanofiltration membrane by introducing Ca2+ in the heat post-treatment. The introduction of Ca2+ induced in situ Ca2+-carboxyl intra-bridging, leading to the embedment of Ca2+ in the polyamide (PA) layer. This post modification enhanced the hydrophilicity and surface charge of NF membranes compared to the pristine membrane. More interestingly, the modified membrane had more nodules and exhibited rougher morphology. Such changes brought by the addition of Ca2+ enabled the significant increase of water permeability (increasing from 17.9 L·m−2·h−1·bar−1 to 29.8 L·m−2·h−1·bar−1) while maintaining a high selectivity (Na2SO4 rejection rate of 98.0%). Furthermore, the intra-bridging between calcium and carboxyl imparted the NF membranes with evident antifouling properties, exhibiting milder permeability decline of 4.2% (compared to 16.7% of NF-control) during filtration of sodium alginate solution. The results highlight the potential of using Ca2+-carboxyl intra-bridging post-treatment to fabricate high-performance TFC membranes for water purification and desalination.

Characteristics Analysis of Saw Filter Using Al0.36Ga0.64N Thin Film

2002 ◽  
Vol 720 ◽  
Author(s):  
Sun-Ki Kim ◽  
Min-Jung Park ◽  
Cheol-Yeong Jang ◽  
Hyun-Chul Choi ◽  
Jung-Hee Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Insertion Loss ◽  
Coupling Coefficient ◽  
Electromechanical Coupling ◽  
Side Lobe ◽  
Electromechanical Coupling Coefficient ◽  
Device Performance ◽  
Saw Devices ◽  
Characteristics Analysis ◽  
Temperature Coefficient Of Frequency

AbstractAlxGa1-xN sample with x=0.36 was epitaxially grown on sapphire by MOCVD. SAW velocity of 5420 m/s and TCF (temperature coefficient of frequency) of -51.20 ppm/°C were measured from the SAW devices fabricated on the AlxGa1-xN sample, when kh value was 0.078, at temperatures between –30 °C and 60 °C Electromechanical coupling coefficient was ranged from 1.26 % to 2.22 %. The fabricated SAW filter have shown a good device performance with insertion loss of -33.853 dB and side lobe attenuation of 20 dB.

scholarly journals In situ lithiated quinone cathode for ALD/MLD-fabricated high-power thin-film battery

2018 ◽  
Vol 6 (16) ◽  
pp. 7027-7033 ◽  
Author(s):  
Mikko Nisula ◽  
Maarit Karppinen
Keyword(s):  
Thin Film ◽  
High Performance ◽  
High Capacity ◽  
Reaction Rates ◽  
Power Sources ◽  
Thin Film Battery ◽  
Microelectronic Devices ◽  
Ultrathin Layers ◽  
Organic Electrode

We demonstrate that the high-capacity organic electrode material, p-benzoquinone, is able to sustain ultrahigh redox reaction rates without any conductive additives when applied as ultrathin layers in an all-solid-state thin-film battery setup, viable for e.g. high-performance power sources in microelectronic devices.

In situ growth of zeolitic imidazolate framework-8 on a GO–PVDF membrane as a sorbent for thin-film microextraction of caffeine followed by quantitation through high-performance liquid chromatography

2020 ◽  
Vol 12 (13) ◽  
pp. 1736-1743 ◽  
Author(s):  
Zahra Jafari ◽  
Mohammad Reza Hadjmohammadi
Keyword(s):  
Thin Film ◽  
High Performance Liquid Chromatography ◽  
Liquid Chromatography ◽  
High Performance ◽  
In Situ Growth ◽  
Zeolitic Imidazolate Framework ◽  
Pvdf Membrane

In the present study, the applicability of ZIF-8/LDH/GO/PVDF as a sorbent for the thin film microextraction (TFME) method is introduced.

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