scholarly journals Air-Based Contactless Wafer Precision Positioning System

2021 ◽  
Vol 11 (16) ◽  
pp. 7588
Author(s):  
Rico Hooijschuur ◽  
Niranjan Saikumar ◽  
S. Hassan HosseinNia ◽  
Ron A. J. van Ostayen

This paper presents the development of a contactless sensing system and the dynamic evaluation of an air-bearing-based precision wafer positioning system. The contactless positioning stage is a response to the trend seen in the high-tech industry, where the substrates are becoming thinner and larger to reduce the cost and increase the yield. Using contactless handling it is possible to avoid damage and contamination. The system works by floating the substrate on a thin film of air. A viscous traction force is created on the substrate by steering the airflow. A cascaded control design structure has been implemented on the contactless positioning system, where the inner loop controller (ILC) controls the actuator which steers the airflow and the outer loop controller (OLC) controls the position of the substrate by controlling the reference of the ILC. The dynamics of the ILC are evaluated and optimized for the performance of the positioning of the substrate. The vibration disturbances are also handled by the ILC. The bandwidth of the system has been improved to 300 Hz. For the OLC, a linear charge-coupled device has been implemented as a contactless sensor. The performance of the sensing system has been analysed. During control in steady-state, this resulted in a position error of the substrate of 12.9 μm RMS, which is a little more than two times the resolution. The bandwidth of the OLC is approaching 10 Hz.

2019 ◽  
Vol 69 ◽  
pp. 00148
Author(s):  
Yury Doroshenko ◽  
Irina Malykhina ◽  
Irina Somina ◽  
Starikova Maria

Relevance of the research topic is due to the specificity and growing strategic importance of the development of high-tech industry, the production of high-tech products, as well as the desire of business owners to constantly increase its value. The main problems and prospects for the intensification of innovation in terms of its impact on the speed and quality of its development are reviewed. The essential characteristics of innovation and investment activity are analyzed, the progressiveness of the stages of functioning of the subjects of the innovation and investment process, united by a common goal, is revealed. Contributed by the author to the definition of high-tech business. Analyzed the main methodological approaches to assessing the value of the business. The factors that have the greatest influence on the formation of conditions for increasing the cost of high-tech business have been studied. The methodological tools for assessing the contribution of the innovation and investment component to the increase in the value of the high-tech business have been improved. The nature of the relationship and interdependence of two types of activity: innovation and investment, as well as opportunities for the development of high-tech business and the growth of its value are analyzed.


2020 ◽  
Vol 19 (9) ◽  
pp. 1723-1735
Author(s):  
A.Yu. Pronin

Subject. The article investigates the program-targeted planning methodology, which is implemented in the Russian Federation and leading foreign countries, for high-tech industry development. Objectives. The aim is to identify the specifics of program-targeted planning for the development of high-tech industries, to shape programs and plans for innovative development in the Russian Federation and leading foreign countries. Methods. The study employs general scientific methods of systems analysis, including the statistical and logical analysis. Results. I reviewed methods of program-targeted planning, implemented by the world’s leading countries (the Russian Federation, United States of America, France, Great Britain, Netherlands, Norway, Japan, Canada), in the interests of the development of various high-tech sectors of the economy. The study established that the methodology of program-targeted management is an effective tool for resource allocation by various types of economic activities in accordance with national priorities. I developed proposals by priority areas for improving the methodology for program-targeted planning and management in the Russian Federation in modern economic conditions. Conclusions. The findings and presented proposals can be used to improve methods for program-targeted planning to develop high-tech sectors of the economy; to design various long-term programs and plans, reducing the risk of their implementation; to determine the ways and methods of sustainable socio-economic and innovative and technological development of the world's leading economies.


2021 ◽  
Vol 13 (10) ◽  
pp. 5467
Author(s):  
Barbara Grabinska ◽  
Dorota Kedzior ◽  
Marcin Kedzior ◽  
Konrad Grabinski

So far, CSR’s role in the high-tech industry is not fully explained by academic research, especially concerning the most burdensome obstacle to firms’ growth: acquiring debt financing. The paper aims to solve this puzzle and investigate whether young high-tech companies can attract more debt by engaging in CSR activity. To address the high-tech industry specificity, we divided CSR-reporting practice into three broad categories: employee, social, and environmental and analyzed their impact on the capital structure. Our sample consists of 92 firm-year observations covering the period 2014–2018. Using a regression method, we found out that only employee CSR plays a statistically significant role in shaping capital structure. We did not find evidence for the influence of the other types of CSR-reporting practices. The results suggest that employees are the key resource of high-tech companies, and, for this reason, they are at the management’s focus. This fact is visible at the financial reporting level and, as we interpret results, is also considered by credit providers. In a more general way, our results suggest that firms tend to choose CSR based on the importance of crucial resources.


Mathematics ◽  
2021 ◽  
Vol 9 (15) ◽  
pp. 1715
Author(s):  
Shih-Chia Chang ◽  
Ming-Tsang Lu ◽  
Mei-Jen Chen ◽  
Li-Hua Huang

Since its conception, corporate social responsibility (CSR) has seen continuous growth and become a highly discussed issue. In this paper, we propose an evaluation of how the COVID-19 pandemic could impact CSR applications. The pandemic has provided an opportunity for commerce to move on to being more authentic, to offer genuine CSR applications and to contribute toward dealing with pressing environmental and social issues. Hence, this purpose of the research is to obtain a better understanding of whether the integration of environment, social, corporate governance and economic (ESGE) aspects into CSR strategies can support sustainable development toward more sustainable growth during the COVID-19 pandemic. To meet this challenge, we offer a mixture multiple-criteria decision making (MCDM) model. Very few empirical studies have discussed CSR in the high-tech industry and proposed strategies and planning for ESGE efficiency. Using interviews with experts and a literature review, we identify the elements related to actual practices of the high-tech industry’s appraisal and the integrated MCDM techniques to suggest efficient enhancement models. The best worst method (BWM) and modified VIKOR are implemented to estimate the strategic weights and the gaps of the aspiration value. The results are valuable for classifying the priorities of CSR and are therefore helpful for those who are associated with high-tech industry management, practices and implementation.


Kobunshi ◽  
1987 ◽  
Vol 36 (1) ◽  
pp. 36-39
Author(s):  
Tadao Kiyonari
Keyword(s):  

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