scholarly journals Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications

2021 ◽  
Vol 11 (19) ◽  
pp. 9012
Author(s):  
Mengru Jiao ◽  
Minghao Wang ◽  
Ye Fan ◽  
Bangbang Guo ◽  
Bowen Ji ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Maximum Error ◽  
Anodic Bonding ◽  
Temperature Range ◽  
Wide Range ◽  
Wide Pressure Range ◽  
Bonding Technology ◽  
Protection Layer ◽  
Wide Pressure

In this work, a MEMS piezoresistive micro pressure sensor (1.5 × 1.5 × 0.82 mm) is designed and fabricated with SOI-based micromachining technology and assembled using anodic bonding technology. In order to optimize the linearity and sensitivity over a wide effective pressure range (0–5 MPa) and temperature range (25–125 °C), the diaphragm thickness and the insulation of piezoresistors are precisely controlled by an optimized micromachining process. The consistency of the four piezoresistors is greatly improved by optimizing the structure of the ohmic contact pads. Furthermore, the probability of piezoresistive breakdown during anodic bonding is greatly reduced by conducting the top and bottom silicon of the SOI. At room temperature, the pressure sensor with 40 µm diaphragm demonstrates reliable linearity (0.48% F.S.) and sensitivity (33.04 mV/MPa) over a wide pressure range of 0–5.0 MPa. In addition, a polyimide protection layer is fabricated on the top surface of the sensor to prevent it from corrosion by a moist marine environment. To overcome the linearity drift due to temperature variation in practice, a digital temperature compensation system is developed for the pressure sensor, which shows a maximum error of 0.43% F.S. in a temperature range of 25–125 °C.

Transparent Pressure Sensor with High Linearity over a Wide Pressure Range for 3D Touch Screen Applications

2020 ◽  
Vol 12 (14) ◽  
pp. 16691-16699 ◽  
Author(s):  
Han Byul Choi ◽  
Jinwon Oh ◽  
Youngsoo Kim ◽  
Mikhail Pyatykh ◽  
Jun Chang Yang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Touch Screen ◽  
High Linearity ◽  
Wide Pressure Range ◽  
Wide Pressure

A resonant high-pressure sensor based on dual cavities

2021 ◽  
Vol 31 (12) ◽  
pp. 124002
Author(s):  
Jie Yu ◽  
Yulan Lu ◽  
Deyong Chen ◽  
Junbo Wang ◽  
Jian Chen ◽  
...  
Keyword(s):  
High Pressure ◽  
Temperature Sensitivity ◽  
Pressure Sensor ◽  
Pressure Range ◽  
High Vacuum ◽  
Pressure Sensors ◽  
Anodic Bonding ◽  
Temperature Range ◽  
Pressure Sensitive ◽  
Ocean Sciences

Abstract High-pressure sensors enable expansive demands in ocean sciences, industrial controls, and oil explorations. Successful sensor realized in piezoresistive high-pressure sensors which suffer from the key issue of compromised accuracies due to serious temperature drifts. Herein, this paper presents a high accuracy resonant high-pressure sensor with the pressure range of 70 MPa. Different from conventional resonant high-pressure sensor, the developed sensor utilized a dual-resonator-cavity design to minimize temperature disturbances and improve the pressure sensitivities. Besides, four circle cavities were used to maintain a high vacuum level for resonators after anodic bonding process. In details, Dual resonators, which is parallelly placed in the tensile and compressive stresses areas of a rectangular pressure sensitive diaphragm, are separated vacuum-packaged in the parallel dual cavities. Thus, pressure under measurement bends the pressure sensitive diaphragm, producing an increased pressure sensitivity and a decreased temperature sensitivity by the differential outputs of the dual resonators. Parameterized mathematical models of the sensor were established and the parameters of the models were optimized to adjust the pressure sensitivities and the temperature sensitivities of the sensor. Simplified deep reactive ion etching was used to form the sensing structure of the sensor and only once anodic bonding was used to form vacuum packaging for the dual resonators. Experimental results confirmed that the Q values of the resonators were higher than 32 000. Besides, the temperature sensitivity of the sensor was reduced from 44 Hz °C−1 (494 ppm °C−1) to 1 Hz °C−1 (11 ppm °C−1) by the differential outputs of the dual resonators in the temperature range of −10 °C–60 °C under the pressure of 1000 kPa. In addition, the accuracy of the sensor was better than 0.02% FS within the pressure range of 110–6500 kPa and the temperature range of −10 °C–60 °C by using a polynomial algorithm.

scholarly journals A Graphene-Based Resistive Pressure Sensor with Record-High Sensitivity in a Wide Pressure Range

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
He Tian ◽  
Yi Shu ◽  
Xue-Feng Wang ◽  
Mohammad Ali Mohammad ◽  
Zhi Bie ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
High Sensitivity ◽  
Wide Pressure Range ◽  
Wide Pressure

scholarly journals Crystallization of Isotactic Polypropylene Nanocomposites with Fibrillated Poly(tetrafluoroethylene) under Elevated Pressure

Polymers ◽  
2021 ◽  
Vol 14 (1) ◽  
pp. 88
Author(s):  
Przemyslaw Sowinski ◽  
Sivanjineyulu Veluri ◽  
Ewa Piorkowska
Keyword(s):  
Isotactic Polypropylene ◽  
Pressure Range ◽  
Elevated Pressure ◽  
Grain Structure ◽  
Crystallization Peak ◽  
Temperature Range ◽  
Fine Grain ◽  
Polypropylene Nanocomposites ◽  
Wide Pressure Range ◽  
Wide Pressure

Nanocomposites of isotactic polypropylene with 1–5 wt.% of fibrillated PTFE (PP/T) were prepared, and their crystallization during cooling under elevated pressure, in a wide pressure range, up to 300 MPa, as well as the resulting structure, were examined. The crystallization peak temperatures of PP/T, especially with 3 and 5 wt.% of PTFE, exceeded by up to 13 °C those of neat PP. Moreover, a fine-grain structure was formed in PP/T in the entire pressure range, which proved the ability of the fibrillated PTFE to nucleate crystallization of PP in the γ-form under elevated pressure. This also resulted in a higher crystallinity level developed in the γ-domain, before the temperature range of the α-domain was reached during cooling. Hence, the γ-content increased in comparison to that in neat PP, under the pressure up to 200 MPa, especially under 50–100 MPa.

Ultrathin, Biocompatible, and Flexible Pressure Sensor with a Wide Pressure Range and Its Biomedical Application

ACS Sensors ◽  
2020 ◽  
Vol 5 (2) ◽  
pp. 481-489 ◽  
Author(s):  
Yongrok Jeong ◽  
Jaeho Park ◽  
Jinwoo Lee ◽  
Kyuyoung Kim ◽  
Inkyu Park
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Biomedical Application ◽  
Wide Pressure Range ◽  
Flexible Pressure Sensor ◽  
Wide Pressure

Study of physisorption isotherm of water on technical nickel surface with a wide pressure range

Vacuum ◽  
2017 ◽  
Vol 145 ◽  
pp. 123-127 ◽  
Author(s):  
Yanwu Li ◽  
Yongjun Cheng ◽  
Wenjun Sun ◽  
Yongjun Wang ◽  
Meng Dong ◽  
...  
Keyword(s):  
Pressure Range ◽  
Nickel Surface ◽  
Wide Pressure Range ◽  
Wide Pressure

Adsorption isotherms and kinetics of carbon dioxide on Chinese dry coal over a wide pressure range

Adsorption ◽  
2015 ◽  
Vol 21 (1-2) ◽  
pp. 53-65 ◽  
Author(s):  
Yongchen Song ◽  
Wanli Xing ◽  
Yi Zhang ◽  
Weiwei Jian ◽  
Zhaoyan Liu ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Adsorption Isotherms ◽  
Pressure Range ◽  
Adsorption Isotherms And Kinetics ◽  
Wide Pressure Range ◽  
Kinetics Of ◽  
Wide Pressure

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

2013 ◽  
Vol 313-314 ◽  
pp. 666-670 ◽  
Author(s):  
K.J. Suja ◽  
Bhanu Pratap Chaudhary ◽  
Rama Komaragiri
Keyword(s):  
Pressure Sensor ◽  
Integrated Circuit ◽  
Output Voltage ◽  
Pressure Sensors ◽  
Micro Electro Mechanical System ◽  
Constant Thickness ◽  
Piezoresistive Pressure Sensor ◽  
Wide Pressure Range ◽  
Processing Techniques ◽  
Wide Pressure

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

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