Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating
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A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.
2021 ◽
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2001 ◽
Vol 16
(4)
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pp. 1145-1154
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