scholarly journals Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition

Micromachines ◽  
2020 ◽  
Vol 11 (8) ◽  
pp. 769
Author(s):  
Markus Rohdenburg ◽  
Johannes E. Fröch ◽  
Petra Martinović ◽  
Charlene J. Lobo ◽  
Petra Swiderek
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Carbon Content ◽  
Surface Science ◽  
Environmental Scanning ◽  
Science Study ◽  
The Impact ◽  
Scanning Electron ◽  
Surface Science Study

Ammonia (NH3)-assisted purification of deposits fabricated by focused electron beam-induced deposition (FEBID) has recently been proven successful for the removal of halide contaminations. Herein, we demonstrate the impact of combined NH3 and electron processing on FEBID deposits containing hydrocarbon contaminations that stem from anionic cyclopentadienyl-type ligands. For this purpose, we performed FEBID using bis(ethylcyclopentadienyl)ruthenium(II) as the precursor and subjected the resulting deposits to NH3 and electron processing, both in an environmental scanning electron microscope (ESEM) and in a surface science study under ultrahigh vacuum (UHV) conditions. The results provide evidence that nitrogen from NH3 is incorporated into the carbon content of the deposits which results in a covalent nitride material. This approach opens a perspective to combine the promising properties of carbon nitrides with respect to photocatalysis or nanosensing with the unique 3D nanoprinting capabilities of FEBID, enabling access to a novel class of tailored nanodevices.

X-Ray Energy Dispersive Spectroscopy in the Environmental Scanning Electron Microscope

1998 ◽  
Vol 4 (S2) ◽  
pp. 182-183
Author(s):  
John F. Mansfield ◽  
Brett L. Pennington
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Energy Dispersive Spectroscopy ◽  
Primary Electron ◽  
Environmental Scanning ◽  
Primary Electron Beam ◽  
X Ray ◽  
Environmental Sem ◽  
Scanning Electron

The environmental scanning electron microscope (Environmental SEM) has proved to be a powerful tool in both materials science and the life sciences. Full characterization of materials in the environmental SEM often requires chemical analysis by X-ray energy dispersive spectroscopy (XEDS). However, the spatial resolution of the XEDS signal can be severely degraded by the gaseous environment in the sample chamber. At an operating pressure of 5Torr a significant fraction of the primary electron beam is scattered after it passes through the final pressure limiting aperture and before it strikes the sample. Bolon and Griffin have both published data that illustrates this effect very well. Bolon revealed that 45% of the primary electron beam was scattered by more than 25 μm in an Environmental SEM operating at an accelerating voltage of 30kV, with a water vapor pressure of 3Torr and a working distance of 15mm.

Review of Techniques for Overcoming XEDS Problems in the Environmental Scanning Electron Microscope

1997 ◽  
Vol 3 (S2) ◽  
pp. 1207-1208
Author(s):  
John Mansfield
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Primary Electron ◽  
Environmental Scanning Electron Microscope ◽  
Significant Fraction ◽  
Environmental Scanning ◽  
Primary Electron Beam ◽  
Environmental Sem ◽  
Scanning Electron

Full characterization of materials in the environmental scanning electron microscope (Environmental SEM) often requires chemical analysis by X-ray energy dispersive spectroscopy (XEDS). However, a major problem arises because the spatial resolution of the XEDS signal is severely degraded by the gaseous environment in the sample chamber. The significant fraction of the primary electron beam is scattered after it passes through the final pressure limiting aperture and before it strikes the sample. Bolon and Griffin have both published data that illustrates this effect very well. Bolon revealed that 45% of the primary electron beam was scattered by more than 25μm in an Environmental SEM operating at an accelerating voltage of 30kV, with a water vapor pressure of 3Torr and a working distance of 15mm. Griffin’s work demonstrated that even at higher voltages (30 kV), shorter working distances (<10mm) and lower chamber pressures (2Torr), there is a significant fraction of the electron beam scattered out to over 400 μm away from the point where the primary beam strikes the sample.

The radiation chemistry of focused electron-beam induced etching of copper in liquids

Nanoscale ◽  
2019 ◽  
Vol 11 (24) ◽  
pp. 11550-11561 ◽  
Author(s):  
Sarah K. Lami ◽  
Gabriel Smith ◽  
Eric Cao ◽  
J. Todd Hastings
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Film Thickness ◽  
Radiation Chemistry ◽  
Environmental Scanning ◽  
System P ◽  
Scanning Electron

Well-controlled, focused electron-beam induced etching of copper thin films has been successfully conducted on bulk substrates in an environmental scanning electron microscope by controlling liquid-film thickness with an in situ correlative interferometry system.

scholarly journals The morphology of ice and liquid brine in an environmental scanning electron microscope: a study of the freezing methods

2019 ◽  
Vol 13 (9) ◽  
pp. 2385-2405 ◽  
Author(s):  
Ľubica Vetráková ◽  
Vilém Neděla ◽  
Jiří Runštuk ◽  
Dominik Heger
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Time Lapse ◽  
Solute Concentration ◽  
Environmental Scanning Electron Microscope ◽  
Environmental Scanning ◽  
Air Bubbles ◽  
Naturally Occurring ◽  
The Impact ◽  
Scanning Electron

Abstract. The microstructure of polycrystalline ice with a threading solution of brine controls its numerous characteristics, including the ice mechanical properties, ice–atmosphere interactions, sea ice albedo, and (photo)chemical behavior in and on the ice. Ice samples were previously prepared in laboratories in order to study various facets of ice–impurity interactions and (photo)reactions to model natural ice–impurity behavior. We examine the impact of the freezing conditions and solute (CsCl used as a proxy for naturally occurring salts) concentrations on the microscopic structure of ice samples via an environmental scanning electron microscope. The method allows us to observe the ice surfaces in detail, namely, the free ice, brine puddles, brine-containing grain boundary grooves, individual ice crystals, and imprints left by entrapped air bubbles at temperatures higher than −25 ∘C. The amount of brine on the external surface is found proportional to the solute concentration and is strongly dependent on the sample preparation method. Time-lapse images in the condition of slight sublimation reveal subsurface association of air bubbles with brine. With rising temperatures (up to −14 ∘C), the brine surface coverage increases to remain enhanced during the subsequent cooling and until the final crystallization below the eutectic temperature. The ice recrystallization dynamics identify the role of surface spikes in retarding the ice boundaries' propagation (Zener pinning). The findings thus quantify the amounts of brine exposed to incoming radiation, available for the gas exchange, and influencing other mechanical and optical properties of ice. The results have straightforward and indirect implications for artificially prepared and naturally occurring salty ice, respectively.

Assessing Charging Effects on Spectral Quality for X-ray Microanalysis in Low Voltage and Variable Pressure/Environmental Scanning Electron Microscopy

2004 ◽  
Vol 10 (6) ◽  
pp. 739-744 ◽  
Author(s):  
Dale E. Newbury
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Low Voltage ◽  
Incident Beam ◽  
Careful Examination ◽  
Variable Pressure ◽  
Environmental Scanning ◽  
X Ray ◽  
The Impact ◽  
Scanning Electron

Energy dispersive X-ray spectrometry of uncoated insulators performed at low beam energy (incident energy ≤ 5 keV) and in the variable pressure scanning electron microscope and the environmental scanning electron microscope is subject to spectral artifacts. Charging decelerates the incident beam electrons and reduces the impact energy, lowering the available overvoltage to excite characteristic X-ray peaks. The Duane–Hunt limit of the X-ray bremsstrahlung continuum is commonly used as a diagnostic of charging. Dynamic charging effects can hide the true impact of charging on the X-ray spectrum. Careful examination of the behavior of the X-ray spectrum with time and other variables is needed to avoid spectral artifacts, particularly on relative X-ray intensities.

What Do We Need to Look Out for When Doing Energy Dispersive Xray Analysis in the Environmental Scanning Electron Microscope?

1999 ◽  
Vol 5 (S2) ◽  
pp. 290-291
Author(s):  
Scott Wight
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Quantitative Analysis ◽  
Scanning Electron Microscope ◽  
High Vacuum ◽  
Environmental Scanning Electron Microscope ◽  
Energy Dispersive ◽  
Environmental Scanning ◽  
Eds Analysis ◽  
Scanning Electron

The environmental scanning electron microscope (ESEM) is not typically used for quantitative analysis by energy dispersive x-ray spectrometry (EDS) because the electron beam is scattered by the chamber gas forming a broad tail or skirt rather than a focused spot. Scattered electrons can contribute x-rays from areas not directly under the beam, which compromises the spectrum for quantitative analysis. For specimens compatible with high vacuum, quantitative EDS analysis in a conventional electron microscope is preferred. However, the ESEM has found its niche in providing a vehicle for investigating those specimens that for any of a variety of reasons are not suitable for high vacuum electron microscopy and microanalysis. For these specimens, it is important that we find the most accurate way to perform EDS analysis in the low vacuum environment.Research has focused on reducing, accounting for, predicting, or measuring the electron scattering on a simplified system. Instrumental tricks to reduce the scattering of the primary electron beam have been reported in the past.

scholarly journals Electron Beam Current Loss at the High-Vacuum– High-Pressure Boundary in the Environmental Scanning Electron Microscope

2001 ◽  
Vol 7 (5) ◽  
pp. 397-406 ◽  
Author(s):  
Gerasimos D. Danilatos ◽  
Matthew R. Phillips ◽  
John V. Nailon
Keyword(s):  
High Pressure ◽  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Electron Probe ◽  
High Vacuum ◽  
Environmental Scanning ◽  
Probe Current ◽  
Prototype Instrument ◽  
Scanning Electron

AbstractA significant loss in electron probe current can occur before the electron beam enters the specimen chamber of an environmental scanning electron microscope (ESEM). This loss results from electron scattering in a gaseous jet formed inside and downstream (above) the pressure-limiting aperture (PLA), which separates the high-pressure and high-vacuum regions of the microscope. The electron beam loss above the PLA has been calculated for three different ESEMs, each with a different PLA geometry: an ElectroScan E3, a Philips XL30 ESEM, and a prototype instrument. The mass thickness of gas above the PLA in each case has been determined by Monte Carlo simulation of the gas density variation in the gas jet. It has been found that the PLA configurations used in the commercial instruments produce considerable loss in the electron probe current that dramatically degrades their performance at high chamber pressure and low accelerating voltage. These detrimental effects are minimized in the prototype instrument, which has an optimized thin-foil PLA design.

X-ray micro tomography in the scanning electron microscope

1978 ◽  
Vol 36 (1) ◽  
pp. 106-107 ◽  
Author(s):  
W. Brünger
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Target Surface ◽  
The Body ◽  
X Rays ◽  
Cross Sectional ◽  
X Ray ◽  
Micro Tomography ◽  
Scanning Electron

Reconstructive tomography is a new technique in diagnostic radiology for imaging cross-sectional planes of the human body /1/. A collimated beam of X-rays is scanned through a thin slice of the body and the transmitted intensity is recorded by a detector giving a linear shadow graph or projection (see fig. 1). Many of these projections at different angles are used to reconstruct the body-layer, usually with the aid of a computer. The picture element size of present tomographic scanners is approximately 1.1 mm2.Micro tomography can be realized using the very fine X-ray source generated by the focused electron beam of a scanning electron microscope (see fig. 2). The translation of the X-ray source is done by a line scan of the electron beam on a polished target surface /2/. Projections at different angles are produced by rotating the object.During the registration of a single scan the electron beam is deflected in one direction only, while both deflections are operating in the display tube.

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