Experimental Study on Fabrication of CVD Diamond Micro Milling Tool by Picosecond Pulsed Laser

Because of the many advantages of high-precision micromachining, picosecond pulsed lasers (PSPLs) can be used to process chemical-vapor-deposited diamonds (CVD-D). With the appropriate PSPL manufacturing technique, sharp and smooth edges of CVD-D micro tools can be generated. In this study, a PSPL is used to cut CVD-D. To optimize PSPL cutting, the effects of its parameters including fluence, pulse pitch, and wavelength on the cutting results were investigated. The results showed that the wavelength had the greatest impact on the sharpness of CVD-D. With PSPL cutting, sharp cutting edges, and smooth fabricated surfaces of the CVD-D, micro tools were achieved. Finally, the fabrication of CVD-D micro milling tools and micro milling experiments were also demonstrated.

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Comparative Studies on the Cutting Performance of HFCVD Diamond and DLC Coated WC-Co Milling Tools in Dry Machining Al/SiC-MMC

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.126-128.220 ◽

2010 ◽

Vol 126-128 ◽

pp. 220-225 ◽

Cited By ~ 1

Author(s):

Bin Shen ◽

Fang Hong Sun ◽

Dong Can Zhang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Arc Discharge ◽

Chemical Vapor ◽

Cvd Diamond ◽

Cutting Edge ◽

Cutting Performance ◽

Vacuum Arc ◽

Milling Tool ◽

Milling Tools

The chemical vapor deposition (CVD) diamond and diamond-like carbon (DLC) films are deposited on the cobalt cemented tungsten carbide (WC-Co) cutting tools respectively using the hot filament chemical vapor deposition (HFCVD) technique and the vacuum arc discharge with a graphite cathode. The scanning electron microscope (SEM), optical interferometer profiler and Raman spectroscopy were adopted to characterize the as-deposited diamond and DLC films. The cutting performance of as-fabricated CVD diamond and DLC coated milling tools is evaluated in dry milling SiC particulate reinforced Al-metal matrix composite material (Al/SiC-MMCs), comparing with the uncoated WC-Co milling tool. The milling results demonstrate that the uncoated WC-Co milling tool suffers severest wear in its circumferential cutting edge, while the wear of DLC coated milling tool is slightly lower. Comparatively, the CVD diamond coated milling tool exhibits much stronger wear resistance. The wear on its circumferential cutting edge is less than 0.07 mm at the end of milling test, only a half of that of DLC coated milling tool. This result is attributed to the extremely high hardness and strong adhesive strength of CVD diamond film covered on the WC-Co milling tool.

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Optimization of the Grinding Parameters for CVD Diamond Micro-Tools

Materials Science Forum ◽

10.4028/www.scientific.net/msf.800-801.633 ◽

2014 ◽

Vol 800-801 ◽

pp. 633-638 ◽

Cited By ~ 1

Author(s):

Rabin Shrestha ◽

Zhong Bo Zhan ◽

Ning He ◽

Liang Li

Keyword(s):

Process Parameters ◽

Feed Rate ◽

Cvd Diamond ◽

Grinding Force ◽

Micro Milling ◽

Grinding Process ◽

Grinding Parameters ◽

Milling Tool ◽

Micro Tool ◽

Micro Tools

This study is focused on the optimization of the grinding process parameters for the grinding of the CVD diamond micro-milling tool. Two types of CVD diamond i.e. CDM and CDE are used for the study. Feed rate and the grinding velocity are used as the grinding parameters. The optimizations of the parameters are done by studying the two results i.e. grinding force and cutting edge radius. Highest grinding velocity and medium feed rate is found to have the best result for the grinding of the CVD diamond. Keywords: CVD diamond, Grinding, Micro-tool

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Crystalline perfection of chemical vapor deposited diamond films

Journal of Materials Research ◽

10.1557/jmr.1990.1591 ◽

1990 ◽

Vol 5 (8) ◽

pp. 1591-1594 ◽

Cited By ~ 55

Author(s):

A. V. Hetherington ◽

C. J. H. Wort ◽

P. Southworth

Keyword(s):

Grain Boundaries ◽

Microwave Plasma ◽

Diamond Films ◽

Stacking Faults ◽

Chemical Vapor ◽

Cvd Diamond ◽

Growth Conditions ◽

Crystalline Perfection ◽

Planar Defects ◽

Chemical Vapor Deposited

The crystalline perfection of microwave plasma assisted chemical vapor deposited (MPACVD) diamond films grown under various conditions has been examined by TEM. Most CVD diamond films thus far reported contain a high density of defects, predominantly twins and stacking faults on {111} planes. We show that under appropriate growth conditions, these planar defects are eliminated from the center of the crystallites, and occur only at grain boundaries where the growing crystallites meet.

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Characterization of Low Temperature Chemical Vapor Deposited Gd2O3 Doped CeO2 Films

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.485.133 ◽

2011 ◽

Vol 485 ◽

pp. 133-136 ◽

Cited By ~ 3

Author(s):

Ryoichi Saotome ◽

Naoki Wakiya ◽

Takanori Kiguchi ◽

Jeffrey S. Cross ◽

Osamu Sakurai ◽

...

Keyword(s):

Activation Energy ◽

Vapor Deposition ◽

Electrochemical Impedance ◽

Pulsed Laser ◽

Chemical Vapor ◽

Partial Pressures ◽

Chemical Vapor Deposited ◽

Electrical Conductivities ◽

Deposited Films

Highly oriented and polycrystalline Gd2O3 doped CeO2 thin films were prepared on α-Al2O3(0001) substrates by chemical vapor deposition, using Ce(C5H4C2H5)3 and Gd(C5H4C2H5)3 as precursors. The compositions of the films were controlled by optimizing the vaporization pressure of Gd precursor under the constant vaporization condition of Ce precursor. In-plane electrical conductivities of the films at various temperatures and oxygen partial pressures were evaluated by electrochemical impedance spectroscopy measurements. The activation energy of the film was determined as 0.94 eV, which is comparable with that of pulsed laser deposited films.

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Study on Micro Milling Tool with Hot-Pressed Sintered Ti(C7N3)-Based Cermet

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.693.906 ◽

2016 ◽

Vol 693 ◽

pp. 906-913

Author(s):

Kai Tao Xu ◽

Bin Zou ◽

Chuan Zhen Huang ◽

Hui Jun Zhou ◽

Han Lian Liu ◽

...

Keyword(s):

Static Load ◽

Electrical Discharge Machining ◽

Negative Impact ◽

Micro Milling ◽

Stress And Strain ◽

End Mill ◽

Milling Performance ◽

Milling Tool ◽

Minimum Stress ◽

Milling Tools

Micro milling is most flexible to create 3D features for application. However, how to design and fabrication of high precision micro milling tools are one of big challenges for mechanical micro milling. Commercially available micro milling tools are usually simply made from downsizing of macro milling tools, which have negative impact on milling performance. Therefore, in this paper, firstly, various structural of micro milling tools were optimized with abaqus that investigated stress and strain under certain static load on the cutting edges. Then, results showed the minimum stress and strain was a micro hexagonal end mill. Finally, a Ti (C7N3) cermet micro hexagonal end mill with a radius of 0.5mm was fabricated by wire electrical discharge machining, and the evaluation experiments for the hexagonal mill have been processed on a micro milling centre.

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Thermal conductivity and the microstructure of state-of-the-art chemical-vapor-deposited (CVD) diamond

Diamond and Related Materials ◽

10.1016/0925-9635(93)90273-5 ◽

1993 ◽

Vol 2 (5-7) ◽

pp. 1059-1063 ◽

Cited By ~ 41

Author(s):

J.E. Graebner ◽

S. Jin ◽

G.W. Kammlott ◽

Y.-H. Wong ◽

J.A. Herb ◽

...

Keyword(s):

Thermal Conductivity ◽

State Of The Art ◽

Chemical Vapor ◽

Cvd Diamond ◽

Chemical Vapor Deposited

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Precision Cutting of Structured Ceramic Molds with Micro PCD Milling Tool

International Journal of Automation Technology ◽

10.20965/ijat.2011.p0277 ◽

2011 ◽

Vol 5 (3) ◽

pp. 277-282 ◽

Cited By ~ 6

Author(s):

Hirofumi Suzuki ◽

◽

Tatsuya Furuki ◽

Mutsumi Okada ◽

Katsuji Fujii ◽

...

Keyword(s):

Surface Roughness ◽

Tool Wear ◽

Tungsten Carbide ◽

Polycrystalline Diamond ◽

Micro Milling ◽

Grinding Wheels ◽

Form Accuracy ◽

Structured Surfaces ◽

Milling Tool ◽

Milling Tools

Micro milling tools made of PolyCrystalline Diamond (PCD) have been developed to machine ceramic micro dies and molds. Cutting edges are ground with diamond wheels. PCD milling tool wear is evaluated by cutting binder-less tungsten carbide spherical molds and machining structured surfaces for trial. Results of experiments clarified that PCD milling tool life is over 10 times that of resinoid diamond grinding wheels, and that form accuracy was 0.1 µm-0.3 µm P-V and surface roughness was 10 nm Rz.

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Precision Cutting of Ceramics with Milling Tool of Single Crystalline Diamond

International Journal of Automation Technology ◽

10.20965/ijat.2015.p0026 ◽

2015 ◽

Vol 9 (1) ◽

pp. 26-32 ◽

Cited By ~ 7

Author(s):

Hirofumi Suzuki ◽

◽

Mutsumi Okada ◽

Koichi Okada ◽

Yosuke Ito ◽

...

Keyword(s):

Surface Roughness ◽

Laser Beam ◽

Tungsten Carbide ◽

Micro Milling ◽

Form Accuracy ◽

Single Crystalline ◽

Flat Shape ◽

Ductile Mode ◽

Milling Tool ◽

Milling Tools

Micro milling tools made of Single Crystalline Diamond (SCD) have been developed to machine micro dies and molds made of ceramics. The milling tools of a cylindrical SCD having many sharp cutting edges are fabricated 3-dimensionally by scanning a laser beam. Flat shape of binder-less tungsten carbide mold was cut with the developed milling tool to evaluate the tool wears and its life. Some micro aspheric molds of tungsten carbide were cut with the milling tool at a rotational speed of 50,000 min-1. The ceramic molds were cut in the ductile mode. By cutting with the milling tool, the form accuracy obtained was about 100 nm P–V and the surface roughness 8 nm Rz.

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Electrical Properties in Cvd Diamond Films

MRS Proceedings ◽

10.1557/proc-302-257 ◽

1993 ◽

Vol 302 ◽

Cited By ~ 3

Author(s):

S. Zhao ◽

K.K. Gan ◽

H. Kagan ◽

R. Kass ◽

R. Malchow ◽

...

Keyword(s):

Electrical Properties ◽

Carrier Mobility ◽

Average Distance ◽

Diamond Films ◽

Chemical Vapor ◽

Cvd Diamond ◽

Time Resolved ◽

Chemical Vapor Deposited ◽

Natural Type ◽

Cvd Diamond Film

ABSTRACTThe electrical properties associated with carrier mobility, μ, and lifetime, τ, have been investigated for the chemical vapor deposited (CVD) diamond films using charged particle-induced conductivity and time resolved transient photo-induced conductivity. The collection distance, d, the average distance which electron and hole depart when driven by an applied electric field E, was measured by both methods. The collection distance is related to the carrier mobility and lifetime by d = μEτ Our measurements show that the collection distance increases linearly with sample thickness for CVD diamond films. The collection distance at the growth side of the CVD diamond film is comparable to that of single crystal natural type IIa diamond; at the substrate side of the film, the collection distance is near zero. No saturation of the collection distance is observed for film thickness up to 500 microns.

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