In-Situ Depth Measurement of Laser Micromachining
Keyword(s):
Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical detection system utilizing an optical confocal structure, experimentally confirmed to achieve a >95% accuracy for micron-diameter holes that are tens-of-microns deep. This system can be easily integrated into commercial laser micromachining processes, and can be employed in laser drilling and three-dimensional active-feedback laser printing.
1974 ◽
Vol 32
◽
pp. 320-321
Keyword(s):
1978 ◽
Vol 36
(2)
◽
pp. 434-435
Keyword(s):
1978 ◽
Vol 36
(1)
◽
pp. 634-635
1995 ◽
Vol 53
◽
pp. 764-765
1996 ◽
Vol 54
◽
pp. 896-897
1996 ◽
Vol 54
◽
pp. 288-289