Creep Compensation in an Electrostatic PDMS-Membrane Actuator with Flexible Silver Nanowire Electrodes
An electrostatic membrane actuator with an elastomer membrane as movable part and silver nanowires (AgNWs) as flexible electrode material is built and characterized. A layered and modular actuator design facilitates simple and fast modification of actuator properties for characterization purposes. The tested actuators allow a membrane center deflection in the range of over 50 μm with applied voltages lower than 1 kV. The observable membrane center deflection exhibits a viscoelastic creep behavior. With the aim to achieve a more stable membrane deflection, a simple correction function was applied to the constant electrode voltage thus compensating the linear creep rate. With this method, the creep rate was changed from +0.27 μm/s to −0.08 μm/s. This method already improves the stability of the actuator deflection to a high degree.