scholarly journals A Flexible Pressure Sensor Based on Magnetron Sputtered MoS2

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1130
Author(s):  
Xing Pang ◽  
Qi Zhang ◽  
Yiwei Shao ◽  
Mingjie Liu ◽  
Dongliang Zhang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Flexible Substrate ◽  
Chemical Characterization ◽  
High Sensitivity ◽  
Pdms Substrate ◽  
Piezoresistive Sensors ◽  
Atomic Force ◽  
Good Repeatability ◽  
Flexible Pressure Sensor ◽  
Resistance Performance

Although two-dimensional (2D) layered molybdenum disulfide (MoS2) has widespread electrical applications in catalysis, energy storage, and photodetection, there are few reports available regarding sputtered MoS2 for piezoresistive sensors. In this research, we found that the resistance of magnetron sputtered MoS2 on a flexible substrate changed significantly and regularly when pressure was applied. Scanning electron microscope (SEM) and atomic force microscope (AFM) images revealed an MoS2 micro-grain-like structure comprising nano-scale particles with grooves between the particles. Chemical characterization data confirmed the successful growth of amorphous MoS2 on a polydimethylsiloxane (PDMS) substrate. A micro-thickness film flexible sensor was designed and fabricated. In particular, the sensor with a 1.5 μm thick polydimethylsiloxane (PDMS) substrate exhibited the best resistance performance, displaying a maximum ΔR/R of 70.39 with a piezoresistive coefficient as high as 866.89 MPa−1 while the pressure was 0.46 MPa. A proposed flexible pressure sensor based on an MoS2 film was also successfully used as a wearable pressure sensor to measure plantar pressure and demonstrated good repeatability. The results showed that the thin film pressure sensor had good piezoresistive performance and high sensitivity.

Flexible Pressure Sensor Based on Photo Paper-Molded Micro-Structural AgNWs/PDMS Electrode

2015 ◽  
Vol 748 ◽  
pp. 1-4 ◽  
Author(s):  
Li Xin Mo ◽  
Yu Qun Hou ◽  
Qing Bin Zhai ◽  
Wen Guan Zhang ◽  
Lu Hai Li
Keyword(s):  
Pressure Sensor ◽  
Silver Nanowires ◽  
Low Cost ◽  
Flexible Substrate ◽  
High Sensitivity ◽  
Low Energy ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Energy Consuming ◽  
Flexible Pressure Sensor

The novel flexible pressure sensor with skin-like stretchability and sensibility has attracted tremendous attention in academic and industrial world in recent years. And it also has demonstrated great potential in the applications of electronic skin and wearable devices. It is significant and challenging to develop a highly sensitive flexible pressure sensor with a simple, low energy consuming and low cost method. In this paper, the silver nanowires (AgNWs) as electrode material were synthesized by polyol process. The polydimethylsiloxane (PDMS) was chosen as a flexible substrate and polyimide (PI) film as dielectric layer. The AgNWs based electrode was prepared in two methods. One is coating the AgNWs on photographic paper followed by in situ PDMS curing. Another one is suction filtration of the AgNWs suspension followed by glass slide transfer and PDMS curing. Then the capacitive pressure sensor was packaged in a sandwich structure with two face to face electrodes and a PI film in the middle. The sensitivity of the sensor as well as the micro-structure of the electrodes was compared and studied. The results indicate that the roughness of the electrode based on AgNWs/PDMS micro-structure plays an important role in the sensitivity of sensor. The as-prepared flexible pressure sensor demonstrates high sensitivity of 0.65kPa-1. In addition, the fabrication method is simple, low energy consuming and low cost, which has great potential in the detection of pulse, heart rate, sound vibration and other tiny pressure.

A highly sensitive and flexible capacitive pressure sensor based on a micro-arrayed polydimethylsiloxane dielectric layer

2018 ◽  
Vol 6 (48) ◽  
pp. 13232-13240 ◽  
Author(s):  
Longquan Ma ◽  
Xingtian Shuai ◽  
Yougen Hu ◽  
Xianwen Liang ◽  
Pengli Zhu ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Sandwich Structure ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Pdms Substrate ◽  
Highly Sensitive ◽  
Flexible Pressure Sensor

A flexible pressure sensor with high sensitivity has been proposed which consists of a typical sandwich structure by integrating a PDMS substrate with a micro-arrayed PDMS dielectric layer.

scholarly journals Design of Flexible Pressure Sensor Based on Conical Microstructure PDMS-Bilayer Graphene

Sensors ◽  
2021 ◽  
Vol 21 (1) ◽  
pp. 289
Author(s):  
Lixia Cheng ◽  
Renxin Wang ◽  
Xiaojian Hao ◽  
Guochang Liu
Keyword(s):  
Pressure Sensor ◽  
Flexible Substrate ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Bilayer Graphene ◽  
Local Deformation ◽  
Vertical Force ◽  
Detection Range ◽  
Large Pressure ◽  
Flexible Pressure Sensor

As a new material, graphene shows excellent properties in mechanics, electricity, optics, and so on, which makes it widely concerned by people. At present, it is difficult for graphene pressure sensor to meet both high sensitivity and large pressure detection range at the same time. Therefore, it is highly desirable to produce flexible pressure sensors with sufficient sensitivity in a wide working range and with simple process. Herein, a relatively high flexible pressure sensor based on piezoresistivity is presented by combining the conical microstructure polydimethylsiloxane (PDMS) with bilayer graphene together. The piezoresistive material (bilayer graphene) attached to the flexible substrate can convert the local deformation caused by the vertical force into the change of resistance. Results show that the pressure sensor based on conical microstructure PDMS-bilayer graphene can operate at a pressure range of 20 kPa while maintaining a sensitivity of 0.122 ± 0.002 kPa−1 (0–5 kPa) and 0.077 ± 0.002 kPa−1 (5–20 kPa), respectively. The response time of the sensor is about 70 ms. In addition to the high sensitivity of the pressure sensor, it also has excellent reproducibility at different pressure and temperature. The pressure sensor based on conical microstructure PDMS-bilayer graphene can sense the motion of joint well when the index finger is bent, which makes it possible to be applied in electronic skin, flexible electronic devices, and other fields.

High transparency flexible sensor for pressure and proximity sensing

2018 ◽  
Vol 32 (32) ◽  
pp. 1850394 ◽  
Author(s):  
Dan Bu ◽  
Si Qi Li ◽  
Yun Ming Sang ◽  
Cheng Jun Qiu
Keyword(s):  
Indium Tin Oxide ◽  
Pressure Range ◽  
Piecewise Linear ◽  
High Sensitivity ◽  
Maximum Error ◽  
Piecewise Linear Function ◽  
Good Repeatability ◽  
Flexible Pressure Sensor ◽  
Human Finger ◽  
Proximity Sensing

A high-sensitivity and high-transmittance flexible pressure sensor is presented in this paper. Using polydimethylsiloxane (PDMS) sensing film to cover indium tin oxide (ITO) electrodes interdigitated on the polyethylene terephthalate (PET) substrate, an interdigital capacitance (IDC) structure is constructed. The pressure and proximity sensing characteristics of the fabricated IDC sensor are investigated. The experiment results show that the IDC sensor has the piecewise linear function in different pressure range, especially sensitive to the low-pressure range with the pressure sensitivity of 6.64 kPa[Formula: see text]. Moreover, it has a good repeatability with the maximum error rate of 2.73% and a high transmittance over 90% in the wavelength range from 400 nm to 800 nm. As a human finger approaches or leaves, the proximity sensing characteristic emerges, with a maximum sensing distance of about 20 cm.

A high-sensitivity and low-hysteresis flexible pressure sensor based on carbonized cotton fabric

2019 ◽  
Vol 294 ◽  
pp. 45-53 ◽  
Author(s):  
Shengnan Chang ◽  
Jin Li ◽  
Yin He ◽  
Hao Liu ◽  
Bowen Cheng
Keyword(s):  
Cotton Fabric ◽  
Pressure Sensor ◽  
High Sensitivity ◽  
Flexible Pressure Sensor

scholarly journals High-sensitivity, fast-response flexible pressure sensor for electronic skin using direct writing printing

RSC Advances ◽  
2020 ◽  
Vol 10 (44) ◽  
pp. 26188-26196 ◽  
Author(s):  
Xiaojun Chen ◽  
Xitong Lin ◽  
Deyun Mo ◽  
Xiaoqun Xia ◽  
Manfeng Gong ◽  
...  
Keyword(s):  
Human Computer Interaction ◽  
Pressure Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Wearable Electronics ◽  
Direct Writing ◽  
Electronic Skin ◽  
Medical Health ◽  
Flexible Pressure Sensor ◽  
Health Diagnosis

Bionic electronic skin with human sensory capabilities has attracted extensive research interest, which has been applied in the fields of medical health diagnosis, wearable electronics, human–computer interaction, and bionic prosthetics.

High-Sensitivity Flexible Pressure Sensor With Low Working Voltage Based on Sphenoid Microstructure

2020 ◽  
Vol 20 (13) ◽  
pp. 7354-7361
Author(s):  
Yaling Wang ◽  
Wei Zhu ◽  
Yuedong Yu ◽  
Pengcheng Zhu ◽  
Qingsong Song ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Flexible Pressure Sensor

A facile method to prepare a wearable pressure sensor based on fabric electrodes for human motion monitoring

2019 ◽  
Vol 89 (23-24) ◽  
pp. 5144-5152 ◽  
Author(s):  
Ronghui Wu ◽  
Liyun Ma ◽  
Aniruddha Balkrishna Patil ◽  
Chen Hou ◽  
Zhaohui Meng ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Information Transfer ◽  
Research Work ◽  
High Sensitivity ◽  
Human Motion ◽  
Pressing Method ◽  
Nylon Fabric ◽  
Flexible Pressure Sensor ◽  
Human Motion Monitoring ◽  
The Military

Intelligent textile that endow traditional fabric with functionalities have attracted increasing attention. In this research work, we fabricated a flexible and wearable pressure sensor with conductive nylon fabric as the electrodes and elastomer Ecoflex as the dielectric layer. The conductive nylon fabric in the twill structure, which showed a high conductivity of 0.268 Ω·cm (specific resistance), was prepared by magnetron sputtering with silver films. The flexible pressure sensor shows a high sensitivity of 0.035 kPa−1, a good linear response under pressure from 0 to 16 kPa, and a quick response time of 0.801 s. The fabricated pressure sensor was found to be highly reproducible and repeatable against repeated mechanical loads for 9500 times, with a small capacitance loss rate of 0.0534. The fabric-based flexible and wearable sensor with good properties can be incorporated into a fabric garment by the hot-pressing method without sacrificing comfort, which can then be used for human motion detecting or touch sensing. The smart glove with finger touch function was proved to be efficient in Morse code editing, which has potential for information transfer in the military field.

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