scholarly journals Integrated Nanophotonic Waveguide-Based Devices for IR and Raman Gas Spectroscopy

Sensors ◽  
2021 ◽  
Vol 21 (21) ◽  
pp. 7224
Author(s):  
Sebastián Alberti ◽  
Anurup Datta ◽  
Jana Jágerská
Keyword(s):  
Raman Spectroscopy ◽  
Absorption Spectroscopy ◽  
Gas Sensing ◽  
Light Sources ◽  
Low Loss ◽  
Figures Of Merit ◽  
Sensing Applications ◽  
Sensitivity And Selectivity ◽  
On Chip ◽  
Ir And Raman

On-chip devices for absorption spectroscopy and Raman spectroscopy have been developing rapidly in the last few years, triggered by the growing availability of compact and affordable tunable lasers, detectors, and on-chip spectrometers. Material processing that is compatible with mass production has been proven to be capable of long low-loss waveguides of sophisticated designs, which are indispensable for high-light–analyte interactions. Sensitivity and selectivity have been further improved by the development of sorbent cladding. In this review, we discuss the latest advances and challenges in the field of waveguide-enhanced Raman spectroscopy (WERS) and waveguide infrared absorption spectroscopy (WIRAS). The development of integrated light sources and detectors toward miniaturization will be presented, together with the recent advances on waveguides and cladding to improve sensitivity. The latest reports on gas-sensing applications and main configurations for WERS and WIRAS will be described, and the most relevant figures of merit and limitations of different sensor realizations summarized.

scholarly journals A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Daniel Popa ◽  
Richard Hopper ◽  
Syed Zeeshan Ali ◽  
Matthew Thomas Cole ◽  
Ye Fan ◽  
...  
Keyword(s):  
Gas Sensing ◽  
Low Cost ◽  
Complementary Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Light Sources ◽  
Mir Spectroscopy ◽  
Sensing Applications ◽  
Cmos Mems ◽  
Extended Operation ◽  
On Chip

AbstractThe gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 $$^{\circ }$$ ∘ C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 $$^{\circ }$$ ∘ C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things.

scholarly journals A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing

2021 ◽  
Author(s):  
Daniel Popa ◽  
Richard Hopper ◽  
Syed Zeeshan Ali ◽  
Matthew Cole ◽  
Ye Fan ◽  
...  
Keyword(s):  
Gas Sensing ◽  
Low Cost ◽  
Complementary Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Light Sources ◽  
Mir Spectroscopy ◽  
Sensing Applications ◽  
Cmos Mems ◽  
Extended Operation ◽  
On Chip

Abstract The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 • C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 • C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Sensors.

scholarly journals Recent Advances in ZnO-Based Carbon Monoxide Sensors: Role of Doping

Sensors ◽  
2021 ◽  
Vol 21 (13) ◽  
pp. 4425
Author(s):  
Ana María Pineda-Reyes ◽  
María R. Herrera-Rivera ◽  
Hugo Rojas-Chávez ◽  
Heriberto Cruz-Martínez ◽  
Dora I. Medina
Keyword(s):  
Carbon Monoxide ◽  
High Performance ◽  
Gas Sensing ◽  
Experimental Studies ◽  
Electrical Performance ◽  
Long Term Stability ◽  
Sensing Applications ◽  
Recent Advances ◽  
Sensitivity And Selectivity ◽  
Doped Zno

Monitoring and detecting carbon monoxide (CO) are critical because this gas is toxic and harmful to the ecosystem. In this respect, designing high-performance gas sensors for CO detection is necessary. Zinc oxide-based materials are promising for use as CO sensors, owing to their good sensing response, electrical performance, cost-effectiveness, long-term stability, low power consumption, ease of manufacturing, chemical stability, and non-toxicity. Nevertheless, further progress in gas sensing requires improving the selectivity and sensitivity, and lowering the operating temperature. Recently, different strategies have been implemented to improve the sensitivity and selectivity of ZnO to CO, highlighting the doping of ZnO. Many studies concluded that doped ZnO demonstrates better sensing properties than those of undoped ZnO in detecting CO. Therefore, in this review, we analyze and discuss, in detail, the recent advances in doped ZnO for CO sensing applications. First, experimental studies on ZnO doped with transition metals, boron group elements, and alkaline earth metals as CO sensors are comprehensively reviewed. We then focused on analyzing theoretical and combined experimental–theoretical studies. Finally, we present the conclusions and some perspectives for future investigations in the context of advancements in CO sensing using doped ZnO, which include room-temperature gas sensing.

Correlative STEM-Cathodoluminescence and Low-Loss EELS of Semiconducting Oxide Nano-Heterostructures for Resistive Gas-Sensing Applications

2015 ◽  
Vol 21 (S3) ◽  
pp. 1255-1256
Author(s):  
Derek Miller ◽  
Sheikh Akbar ◽  
Pat Morris ◽  
Robert E.A. Williams ◽  
David W. McComb
Keyword(s):  
Gas Sensing ◽  
Low Loss ◽  
Sensing Applications

Electro Thermal Effects of Geometrically Modified MEMS-Based Micro Heater for Gas Sensing Applications

2019 ◽  
Vol 17 (9) ◽  
pp. 725-732
Author(s):  
Vishal Balasubramanian ◽  
V. S. Selvakumar ◽  
L. Sujatha ◽  
M. Revathi ◽  
C. V. Gayathri
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensing ◽  
Comsol Multiphysics ◽  
Low Power Consumption ◽  
Temperature Uniformity ◽  
Gas Sensitivity ◽  
Average Temperature ◽  
Sensing Applications ◽  
Sensitivity And Selectivity

Micro heaters play a major role in gas sensing applications owing to their accuracy, selectivity and low power consumption. The proposed micro heater employs a window type polysilicon micro-hotplate structure, which is a square cell of side 500 μm, designed using COMSOL Multiphysics. It is highly imperative that an evenly distributed temperature is necessary over the broad area of the heater in order to improve its gas sensitivity and selectivity. In this paper, we have explained the design and analysis of a novel window-type micro heater made of polysilicon. The main aim of the work is to achieve temperature uniformity and low power consumption. By optimizing the geometry of the micro heater, we can obtain both temperature uniformity and low power consumption. This geometrical optimization also improves the sensitivity and response time of the sensor. To support them, we have carried out simulations using COMSOL Multiphysics. The proposed structure has obtained a uniform temperature of 1134.1 K and an average temperature of 1130.39 K. Such high and uniform temperatures finds applications in gas sensors. This work also analyzes the proper choice and placement of electrodes across the geometry of the heater.

scholarly journals Inverse design of photonic meta-structure for beam collimation in on-chip sensing

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Robin Singh ◽  
Yuqi Nie ◽  
Mingye Gao ◽  
Anuradha Murthy Agarwal ◽  
Brian W. Anthony
Keyword(s):  
Optical Excitation ◽  
Descent Method ◽  
Design Approach ◽  
Inverse Design ◽  
Light Sources ◽  
Gradient Descent Method ◽  
Optical Elements ◽  
Structured Surfaces ◽  
Sensing Applications ◽  
On Chip

AbstractDesigned or patterned structured surfaces, metasurfaces, enable the miniaturization of complex arrangements of optical elements on a plane. Most of the existing literature focuses on miniaturizing the optical detection; little attention is directed to on-chip optical excitation. In this work, we design a metasurface to create a planar integrated photonic source beam collimator for use in on-chip optofluidic sensing applications. We use an iterative inverse design approach in order to optimize the metasurface to achieve a target performance using gradient descent method. We then fabricate beam collimators and experimentally compare performance characteristics with conventional uniform binary grating-based photonic beam diffractors. The optimal design enhances the illumination power by a factor of 5. The reinforced beam is more uniform with 3 dB beam spot increased almost ~ 3 times for the same device footprint area. The design approach will be useful in on-chip applications of fluorescence imaging, Raman, and IR spectroscopy and will enable better multiplexing of light sources for high throughput biosensing.

scholarly journals Tunable Infrared Metamaterial Emitter for Gas Sensing Application

Nanomaterials ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 1442 ◽  
Author(s):  
Ruijia Xu ◽  
Yu-Sheng Lin
Keyword(s):  
High Efficiency ◽  
Gas Sensing ◽  
High Sensitivity ◽  
Energy Conversion Efficiency ◽  
High Energy ◽  
Ir Radiation ◽  
Optical Efficiency ◽  
Sensing Applications ◽  
On Chip ◽  
Ir Emission

We present an on-chip tunable infrared (IR) metamaterial emitter for gas sensing applications. The proposed emitter exhibits high electrical-thermal-optical efficiency, which can be realized by the integration of microelectromechanical system (MEMS) microheaters and IR metamaterials. According to the blackbody radiation law, high-efficiency IR radiation can be generated by driving a Direct Current (DC) bias voltage on a microheater. The MEMS microheater has a Peano-shaped microstructure, which exhibits great heating uniformity and high energy conversion efficiency. The implantation of a top metamaterial layer can narrow the bandwidth of the radiation spectrum from the microheater to perform wavelength-selective and narrow-band IR emission. A linear relationship between emission wavelengths and deformation ratios provides an effective approach to meet the requirement at different IR wavelengths by tailoring the suitable metamaterial pattern. The maximum radiated power of the proposed IR emitter is 85.0 µW. Furthermore, a tunable emission is achieved at a wavelength around 2.44 µm with a full-width at half-maximum of 0.38 µm, which is suitable for high-sensitivity gas sensing applications. This work provides a strategy for electro-thermal-optical devices to be used as sensors, emitters, and switches in the IR wavelength range.

scholarly journals Broadband mid-infrared amplified spontaneous emission from Er/Dy co-doped fluoride fiber with a simple diode-pumped configuration

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Kenji Goya ◽  
Akira Mori ◽  
Shigeki Tokita ◽  
Ryo Yasuhara ◽  
Tetsuo Kishi ◽  
...  
Keyword(s):  
Light Source ◽  
Spontaneous Emission ◽  
Gas Sensing ◽  
Amplified Spontaneous Emission ◽  
Ion Concentration ◽  
Light Sources ◽  
Multimode Laser ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Co Doped

AbstractEr3+/Dy3+ co-doped double-clad ZBLAN optical fiber has been used to obtain amplified spontaneous emission (ASE) broadband light sources cladding-pumped by 980-nm multimode laser diode (LD) sources. It has been demonstrated that mid-infrared broadband emission extending from 2515 to 3735 nm was obtained by energy transfer between Er3+ and Dy3+. We experimentally investigated the optimum design of Er3+/Dy3+ co-doped ZBLAN fiber in terms of ion concentration, fiber length, pumping configuration, and pumping power. The ASE output power was more than 2.5 mW when the LD pump power was set at 5 W. To assess its potential for gas sensing applications, the fabricated ASE light source was used to successfully detect methane gas with concentrations at 1% and 5%. The simple and stable construction of our ASE light source is suitable for practical purposes.

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