It is shown that increasing the role of control methods, identifying patterns and accuracy of performing technological operations, establishing the relationship between the characteristics of the technological process and the yield of suitable products, will ensure the reproducibility of technology and the formation of instrument structures with specified parameters. In the technological process of production, instrument structures are formed and constructive and technological foundations are implemented, on which the specified parameters are established in technological and final tests. Providing the specified parameters of device structures, depending on the production processes, is carried out on the basis of increasing the dielectric strength of oxide layers, improving the production process, and reducing the number of defects in oxide films. Improving the cleanliness during the production process allows you to reduce the level of defective structures. The inconsistency of the coefficients of thermal expansion of the materials used is the cause of failures of elements of integral electronics and a decrease in their reliability. Analysis of thermal effects and associated mechanical loads allows one to assess the optimality of the selected materials and to clarify the likely failure mechanisms. Knowledge of the failure mechanisms makes it possible to calculate the reliability of the device at the design stage, as well as to predict the reliability of the equipment being developed. The reproducibility of the technology is ensured by conducting a statistical analysis of the technological process, containing statistical processing, establishing statistical relationships between parameters, determining the regularities of the technological process, constructing regression models for the relationship between the yield of good products and modes of technological operations, and analyzing the stability of the technological process. The traceability of the relationship between the parameters of instrument structures and the technology of their manufacture allows to reduce the level of their defectiveness, statistical regulation, based on the measured values of the parameters, and determining their position relative to the regulation limits, ensures the accuracy of the production process.