Design, Fabrication and Study of Micro-Electrospray Chips

2006 ◽  
Vol 505-507 ◽  
pp. 1249-1254 ◽  
Author(s):  
Tzong Shyng Leu ◽  
Chi Hsiung Teng
Keyword(s):  
Biological Sample ◽  
Wedge Angle ◽  
Micro Electro Mechanical System ◽  
The Other ◽  
Constant Current ◽  
Sample Analysis ◽  
Mems Technology ◽  
Stable Cone ◽  
Visualization Techniques ◽  
High Viscous Fluid

This paper described design, fabrication and study of micro electrospray chips. The micro electrospray chips are fabricated by using micro-electro-mechanical system (MEMS) technology. The micro electrospray techniques can be used in many applications, including high viscous fluid dispenses for 3D rapid prototyping and biological sample analysis in mass spectrometer. In this study, micro electrospray chips with different wedge angels are investigated by using microscopic visualization techniques. Four spray modes are identified at various operation voltages and currents. It is found that the voltage for stable cone-jet mode decrease as wedge angle becomes smaller. On the other hand, it is also found that stable cone-jet mode represent a constant current range in current (I)-voltage(Ф) curve. It allows us to easily identify if the micro electrospray chips operate at cone-jet mode.

Investigation on Properties of MEMS Based Micropyrotechnic Igniter

2014 ◽  
Vol 1055 ◽  
pp. 78-83
Author(s):  
Yan Xue ◽  
Chuan Ping ◽  
Rui Zhang ◽  
Xiao Ming Ren ◽  
Lan Liu ◽  
...  
Keyword(s):  
Power Consumption ◽  
Mechanical System ◽  
Potassium Salt ◽  
Electrical Power ◽  
Micro Electro Mechanical System ◽  
Experimental Results ◽  
The Other ◽  
Mems Technology ◽  
Reliability Performance

Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of the potassium salt of 7-hydroxy-4,6-dinitro-5,7-dihydrobenzofuroxanide (KDNBF) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, KDNBF). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω and Al bridges with about 350Ω, which are triggered by electrical power delivered to KDNBF. The resistance of Ni-Cr and Al bridges is used to sense the temperature on the KDNBF which are in contact. The other one point is firing testing of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested that including Ni-Cr bridges of the 50% sensitivity on voltage, current ignition is 10.83V,0.26A; including Al bridges of the 50% sensitivity on current ignition is 0.176A; the ignition of voltage is unstable. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.

Study of MEMS Based Micropyrotechnic Igniter

2014 ◽  
Vol 472 ◽  
pp. 750-755 ◽  
Author(s):  
Yan Xue ◽  
Chang Jun Shi ◽  
Xiao Ming Ren ◽  
Lan Liu ◽  
Rui Zhen Xie
Keyword(s):  
Power Consumption ◽  
Mechanical System ◽  
Electrical Power ◽  
Micro Electro Mechanical System ◽  
Experimental Results ◽  
The Other ◽  
Ignition Voltage ◽  
Mems Technology ◽  
Reliability Performance ◽  
Lead Styphnate

Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of lead styphnate (LTNR) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, lead styphnate). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω, which is triggered by electrical power delivered to LTNR. The resistance of Ni-Cr bridges is used to sense the temperature on the LTNR which is in contact. The other one point is the optimization of silicon chamber process obtaining incorporate configuration of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested with ignition voltage less than 13V. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.

scholarly journals Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Sensors ◽  
2021 ◽  
Vol 21 (11) ◽  
pp. 3731
Author(s):  
Maik Bertke ◽  
Ina Kirsch ◽  
Erik Uhde ◽  
Erwin Peiner
Keyword(s):  
Mass Concentration ◽  
Limit Of Detection ◽  
A Priori ◽  
Micro Electro Mechanical System ◽  
Single Chip ◽  
Air Stream ◽  
Mems Technology ◽  
Clean Air ◽  
Particle Sizer ◽  
Ultrafine Aerosol

To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by aligning their trajectories onto the cantilever under the action of a perpendicular electrostatic field of variable strength. We use previously described µFCs and piezoresistive micro cantilevers (PMCs) of 16 ng mass fabricated using micro electro mechanical system (MEMS) technology, which offer a limit of detection of captured particle mass of 0.26 pg and a minimum detectable particulate mass concentration in air of 0.75 µg/m3. Mobility sizing in 4 bins of a nebulized carbon aerosol NPs is demonstrated based on finite element modelling (FEM) combined with a-priori knowledge of particle charge state. Good agreement of better than 14% of mass concentration is observed in a chamber test for the novel MEMS-DMPS vs. a simultaneously operated standard fast mobility particle sizer (FMPS) as reference instrument. Refreshing of polluted cantilevers is feasible without de-mounting the sensor chip from its package by multiply purging them alternately in acetone steam and clean air.

Thermal Bubble Dynamics Under the Effect of Acoustic Vibration

2009 ◽  
Author(s):  
Xiaopeng Qu ◽  
Huihe Qiu
Keyword(s):  
Heat Transfer ◽  
Acoustic Field ◽  
Vapor Bubble ◽  
Boiling Heat Transfer ◽  
High Speed ◽  
Bubble Dynamics ◽  
Acoustic Vibration ◽  
Micro Electro Mechanical System ◽  
Mems Technology ◽  
Enhanced Boiling

The effect of acoustic field on the dynamics of micro thermal bubble is investigated in this paper. The micro thermal bubbles were generated by a micro heater which was fabricated by standard Micro-Electro-Mechanical-System (MEMS) technology and integrated into a mini chamber. The acoustic field formed in the mini chamber was generated by a piezoelectric plate which was adhered on the top side of the chamber’s wall. The dynamics and related heat transfer induced by the micro heater generated vapor bubble with and without the existing of acoustic field were characterized by a high speed photograph system and a micro temperature sensor. Through the experiments, it was found that in two different conditions, the temperature changing induced by the micro heater generated vapor bubble was significantly different. From the analysis of the high speed photograph results, the acoustic force induced micro thermal bubble movements, such as forcibly removing, collapsing and sweeping, were the main effects of acoustic enhanced boiling heat transfer. The experimental results and theoretical analysis were helpful for understanding of the mechanisms of acoustic enhanced boiling heat transfer and development of novel micro cooling devices.

High Q Circular-Section Solenoid-Type Inductor

2008 ◽  
Author(s):  
Xiuhan Li ◽  
Guanghua Shu ◽  
Jinan Sao ◽  
Xiongwei Zhang
Keyword(s):  
Flip Chip ◽  
Micro Electro Mechanical System ◽  
The Self ◽  
Cmos Process ◽  
Structure Parameters ◽  
Q Factor ◽  
Circular Section ◽  
High Q ◽  
Ansoft Hfss ◽  
Mems Technology

A* high Q-factor circular-section solenoid-type inductor is designed and fabricated through micro electro mechanical system (MEMS) technology. The radius of the circular-section is 100μm. Ansoft HFSS is used to design and optimize the structure parameters of the inductor. The stable inductance of 10nH and maximum Q-factor of 46 is gained at the N of 10, wire width w of 10μm, space between wires d of 15μm and the self-resonance frequency of the inductor is above 10GHz. A novel fabrication method—flip chip bonding is proposed to bond the two parts of the inductor, and the process is compatible with CMOS process.

scholarly journals Is There an Issuance Premium for SRI Bonds?: Evidence from the Periods Before and After the COVID-19 Outbreak

2021 ◽  
Vol 50 (4) ◽  
pp. 369-409
Author(s):  
Hak-Kyum Kim ◽  
Hee-Joon Ahn
Keyword(s):  
Social Bonds ◽  
Bond Market ◽  
The Other ◽  
Bond Markets ◽  
Sample Analysis ◽  
Socially Responsible ◽  
Responsible Investment ◽  
South Korean ◽  
Before And After ◽  
Empirical Approaches

This study empirically examines whether there are any issuance premia for Socially Responsible Investment (SRI) bonds, using the data from the South Korean bond market from May 2018 to December 2020. We classify SRI bonds into three types: green, social, and sustainability. We divide the sample period into pre-COVID-19 and post-COVID-19 to understand how the pandemic has impacted the pricing of SRI bonds. We employ two empirical approaches: a matching sample analysis and a regression analysis that controls various bond and market characteristics. We find the following. First, significant issuance premia of at least 8bp existed for our sample of social bonds. However, we do not find any evidence of an issuance premium from the other two types of bonds. The premia on social bonds decreased significantly after the outbreak of COVID-19. As most studies have focused on green bonds, the literature on SRI bonds has largely been silent about social bonds and sustainability bonds. By focusing on these two less researched SRI bond types in addition to green bonds, we help expand our knowledge on SRI bond markets. Moreover, to the best of our knowledge, this is the first study to examine the SRI bond market in South Korea.

Design and operation of a bio-inspired micropump based on blood-sucking mechanism of mosquitoes

2018 ◽  
Vol 32 (12n13) ◽  
pp. 1840027 ◽  
Author(s):  
Tzong-Shyng Leu ◽  
Ruei-Hung Kao
Keyword(s):  
Taguchi Method ◽  
Power Density ◽  
Flow Rate ◽  
Transient Flow ◽  
Micro Electro Mechanical System ◽  
Experimental Result ◽  
Channel Size ◽  
Lumped Model ◽  
Blood Sucking ◽  
Mems Technology

The study is to develop a novel bionic micropump, mimicking blood-suck mechanism of mosquitos with a similar efficiency of 36%. The micropump is produced by using micro-electro-mechanical system (MEMS) technology, PDMS (polydimethylsiloxane) to fabricate the microchannel, and an actuator membrane made by Fe-PDMS. It employs an Nd-FeB permanent magnet and PZT to actuate the Fe-PDMS membrane for generating flow rate. A lumped model theory and the Taguchi method are used for numerical simulation of pulsating flow in the micropump. Also focused is to change the size of mosquito mouth for identifying the best waveform for the transient flow processes. Based on computational results of channel size and the Taguchi method, an optimization actuation waveform is identified. The maximum pumping flow rate is 23.5 [Formula: see text]L/min and the efficiency is 86%. The power density of micropump is about 8 times of that produced by mosquito’s suction. In addition to using theoretical design of the channel size, also combine with Taguchi method and asymmetric actuation to find the optimization actuation waveform, the experimental result shows the maximum pumping flowrate is 23.5 [Formula: see text]L/min and efficiency is 86%, moreover, the power density of micropump is 8 times higher than mosquito’s.

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