Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel

2016 ◽  
Vol 1136 ◽  
pp. 311-316 ◽  
Author(s):  
Ke Wu ◽  
Naoki Yamazaki ◽  
Yutaro Ebina ◽  
Li Bo Zhou ◽  
Jun Shimizu ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Chromium Oxide ◽  
Removal Rate ◽  
Semiconductor Industry ◽  
High Surface ◽  
Grinding Wheel ◽  
Sapphire Wafer ◽  
High Surface Quality ◽  
Revolution Speed ◽  
The Revolution

Finishing process of sapphire wafer is meeting huge challenge to fulfill the strict requirement of high surface quality in semiconductor industry. Fixed abrasive process, although can guarantee the profile accuracy, leaves damaged layer on the surface or subsurface of sapphire wafer. Chemical mechanical polishing (CMP) is famous for providing great surface roughness, however, sacrifices surface geometrical accuracy. Therefore, a new chromium oxide (Cr2O3) sapphire grinding wheel based on chemical mechanical grinding (CMG) principle has been developed and its performance has also been put into examination. The experiment result has demonstrated that Cr2O3 possesses an outstanding potential in terms of a high material removal rate of sapphire wafer, meanwhile, largely reduces surface roughness from about 150nm to below 10nm in 1 hour. In addition, the design of experiment (DOE) has also been carried out to study the effect of influencing factors towards ultimate surface roughness of sapphire wafer. It reveals that the revolution speed of sapphire wafer bears twice greater influence towards surface roughness than the revolution speed of grinding wheel.

The Experiment Research of Precision Grinding of Li-Ti Ferrite with Graphite Grinding Wheel

2010 ◽  
Vol 431-432 ◽  
pp. 322-325
Author(s):  
Bei Zhang ◽  
Hong Hua Su ◽  
Hong Jun Xu ◽  
Yu Can Fu
Keyword(s):  
Surface Quality ◽  
Material Removal ◽  
Removal Rate ◽  
High Surface ◽  
Ground Surface ◽  
Grinding Wheel ◽  
Precision Grinding ◽  
High Surface Quality ◽  
Good Surface ◽  
Good Surface Quality

Li-Ti ferrite used in aviation occasions needs good surface quality. In conventional grinding it is difficult to meet the surface demand. Accordingly, this paper proposed a new grinding process to change the situation. The process employed graphite grinding wheel which is always used in ultra-precision grinding of steel piece. The process can obtain good surface quality and ensure certain material removal rate. The ground surface appearance is nearly mirror-like. The lowest surface roughness of Ra value of the ground surface is 0.05μm in the experiment. The ground surface morphology is made up of spread glazed area and dispersed minute pits. The ductile regime dominates the material removal mechanism and no surface damage is induced in the process. In consideration of the results in the experiment it can be seen that grinding with graphite grinding wheel is a good finishing procedure in ferrite machining because of its obtained high surface quality.

Study on Grinding Force and Surface Roughness of Ni3Al Based Superalloy

2018 ◽  
Author(s):  
Xiaoxiang Zhu ◽  
Wenhu Wang ◽  
Ruisong Jiang ◽  
Xiaofen Liu
Keyword(s):  
Surface Roughness ◽  
Surface Topography ◽  
Process Parameters ◽  
High Surface ◽  
Temperature Characteristic ◽  
Grinding Force ◽  
Wheel Speed ◽  
Grinding Wheel ◽  
High Surface Quality ◽  
Creep Feed

Ni3Al based superalloy is a kind of intermetallics, it is a relatively new superalloy, its superior high temperature characteristic makes it the fifth generation aero-engine turbine blade material. The machinability of Ni3Al based superalloy is poor, and its process parameters have significant influence on grinding force and surface integrity. The creep feed grinding experiments of Ni3Al based superalloy IC10 were carried out with different process parameters. The experimental results show that the workpiece speed has the greatest effect on grinding force, surface roughness and 3D surface topography, followed by grinding depth, the wheel speed has the smallest influence. Grinding force is positively correlated with grinding depth and workpiece speed, and negatively correlated with grinding wheel speed. Similarly, surface roughness is positively correlated with grinding depth and workpiece speed, and negatively correlated with grinding wheel speed. The higher the workpiece speed, the deeper the grooves and the higher the peaks of the surface topography. In order to maintain high surface quality, small workpiece speed and grinding depth should be chosen during grinding process.

Nano-Precision Synergistic Finishing Process Integrated ELID-Grinding and MRF

2009 ◽  
Vol 69-70 ◽  
pp. 49-53
Author(s):  
Shao Hui Yin ◽  
Hitoshi Ohmori ◽  
Wei Min Lin ◽  
Yoshihiro Uehara ◽  
Feng Jun Chen ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Optical Materials ◽  
High Efficiency ◽  
High Surface ◽  
Grinding Wheel ◽  
Form Accuracy ◽  
High Surface Quality ◽  
Elid Grinding ◽  
Finishing Process ◽  
Magneto Rheological

ELID (electrolytic in-process dressing) grinding was proposed by one of the authors for automatic dressing the grinding wheel while performing grinding for a long time. It offers a high effective way and has been widely used for grinding hard and brittle optical materials. However, those surfaces produced by fixed abrasive grinding are characterized by considerable sub-surface damage, micro-crack. Magneto-rheological finishing (MRF) is a novel precision finishing process for deterministic form correction and polishing of optical materials by utilizing magneto-rheological fluid. In this paper, an ultra-precision synergistic finishing process integrated MRF and ELID grinding is proposed for shorten total finishing time and improve finishing quality. A lot of nano-precision experiments have been carried out to grind and finish some optical materials such as silicon, silicon carbide, etc. ELID grinding is employed to obtain high efficiency and high surface quality, and then, MRF is employed to improve further surface roughness and form accuracy. In general, form accuracy of ~ λ/20 nm peak-to-valley (P-V) and surface roughness less than 10 Angstrom are produced in high efficiency.

Study on Chemical Mechanical Polishing with Ultrasonic Vibration

2010 ◽  
Vol 126-128 ◽  
pp. 311-315 ◽  
Author(s):  
Pei Lum Tso ◽  
Yao Cheng Chang
Keyword(s):  
Surface Quality ◽  
Ultrasonic Vibration ◽  
Chemical Mechanical Polishing ◽  
Removal Rate ◽  
Semiconductor Industry ◽  
High Surface ◽  
Mechanical Polishing ◽  
High Surface Quality ◽  
Wafer Size

Chemical Mechanical Polishing(CMP) is currently the most effective planarization method used in the semiconductor industry. Because of the continuous improvement of the wafer size and line width, the CMP process must be promoted and improved. Many studies have been undertaken to try and achieve both a high material remval rate (MRR) while maintaing a high surface quality of silicon wafer, however up until this point it appears that the two objectives are mutually exclusive. In this paper, an innovative method which integrated ultrasonic vibration assisted machining and CMP (UCMP) has been developed. With the use of ultrasonic vibration, the CMP efficiency and the quality of ploished suface improves considerably as shown in this paper. The basic principle effects of ultrasonic vibration are further illustrated and the experiments had been done to demostrate the proper procedure. The results showed that UCMP achieves a higher material removal rate (MRR) and better surface quality at the same time.

scholarly journals Study on the Effect of Grinding Pressure on Material Removal Behavior Performed on a Self-Designed Passive Grinding Simulator

2021 ◽  
Vol 11 (9) ◽  
pp. 4128
Author(s):  
Peng-Zhan Liu ◽  
Wen-Jun Zou ◽  
Jin Peng ◽  
Xu-Dong Song ◽  
Fu-Ren Xiao
Keyword(s):  
Residual Stress ◽  
Surface Roughness ◽  
Service Life ◽  
Material Removal ◽  
Removal Rate ◽  
Grinding Force ◽  
Grinding Wheel ◽  
Grinding Process ◽  
Grinding Temperature ◽  
Grinding Efficiency

Passive grinding is a new rail grinding strategy. In this work, the influence of grinding pressure on the removal behaviors of rail material in passive grinding was investigated by using a self-designed passive grinding simulator. Meanwhile, the surface morphology of the rail and grinding wheel were observed, and the grinding force and temperature were measured during the experiment. Results show that the increase of grinding pressure leads to the rise of rail removal rate, i.e., grinding efficiency, surface roughness, residual stress, grinding force and grinding temperature. Inversely, the enhancement of grinding pressure and grinding force will reduce the grinding ratio, which indicates that service life of grinding wheel decreases. The debris presents dissimilar morphology under different grinding pressure, which reflects the distinction in grinding process. Therefore, for rail passive grinding, the appropriate grinding pressure should be selected to balance the grinding quality and the use of grinding wheel.

scholarly journals Investigation on the Surface Quality Obtained during Trochoidal Milling of 6082 Aluminum Alloy

Machines ◽  
2021 ◽  
Vol 9 (4) ◽  
pp. 75
Author(s):  
Nikolaos E. Karkalos ◽  
Panagiotis Karmiris-Obratański ◽  
Szymon Kurpiel ◽  
Krzysztof Zagórski ◽  
Angelos P. Markopoulos
Keyword(s):  
Surface Roughness ◽  
Surface Quality ◽  
Process Parameters ◽  
Manufacturing Industry ◽  
High Surface ◽  
Cutting Tools ◽  
Cutting Speed ◽  
Depth Of Cut ◽  
High Surface Quality ◽  
Trochoidal Milling

Surface quality has always been an important goal in the manufacturing industry, as it is not only related to the achievement of appropriate geometrical tolerances but also plays an important role in the tribological behavior of the surface as well as its resistance to fatigue and corrosion. Usually, in order to achieve sufficiently high surface quality, process parameters, such as cutting speed and feed, are regulated or special types of cutting tools are used. In the present work, an alternative strategy for slot milling is adopted, namely, trochoidal milling, which employs a more complex trajectory for the cutting tool. Two series of experiments were initially conducted with traditional and trochoidal milling under various feed and cutting speed values in order to evaluate the capabilities of trochoidal milling. The findings showed a clear difference between the two milling strategies, and it was shown that the trochoidal milling strategy is able to provide superior surface quality when the appropriate process parameters are also chosen. Finally, the effect of the depth of cut, coolant and trochoidal stepover on surface roughness during trochoidal milling was also investigated, and it was found that lower depths of cut, the use of coolant and low values of trochoidal stepover can lead to a considerable decrease in surface roughness.

Development of a New Plate Polishing Technique with an Instantaneous Tiny-Grinding Wheel Cluster Based on Magnetorheological Effect

2008 ◽  
Vol 53-54 ◽  
pp. 155-160 ◽  
Author(s):  
Qiu Sheng Yan ◽  
Ai Jun Tang ◽  
Jia Bin Lu ◽  
Wei Qiang Gao
Keyword(s):  
Surface Roughness ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Grinding Wheel ◽  
Abrasive Particles ◽  
Magnetorheological Effect ◽  
Material Removal Model ◽  
Mr Effect ◽  
Removal Model

A new plate polishing technique with an instantaneous tiny-grinding wheel cluster based on the magnetorheological (MR) effect is presented in this paper, and some experiments were conducted to prove its effectiveness and applicability. Under certain experimental condition, the material removal rate was improved by a factor of 20.84% as compared with the conventional polishing methods with dissociative abrasive particles, while the surface roughness of the workpiece was not obviously increased. Furthermore, the composite of the MR fluid was optimized to obtain the best polishing performance. On the basis of the experimental results, the material removal model of the new plate polishing technique was presented.

Study on Effect of Composite Particles in Polishing Process and Its Mechanism

2007 ◽  
Vol 24-25 ◽  
pp. 155-159 ◽  
Author(s):  
Xue Feng Xu ◽  
B.X. Ma ◽  
Feng Chen ◽  
Wei Peng
Keyword(s):  
Removal Rate ◽  
High Surface ◽  
Composite Particles ◽  
Particle Interactions ◽  
Polymer Particles ◽  
Layer Model ◽  
Polishing Process ◽  
High Surface Quality ◽  
Wafer Polishing ◽  
Double Layer Model

In this paper, mixed slurries containing silica abrasives and polystyrene (PS) polymer particles in deionized water at pH 10.5 have been evaluated for silicon wafer polishing. By applying the theory of electric double layer model, the effect of the particle interactions in mixed slurry is investigated. Zeta potential measurements and TEM images have been used to show the formation of composite particles. The polishing mechanism with composite particles slurries is discussed. Polishing experiments with the mixed slurries formed by coating smaller (~30nm) abrasives onto softer and larger (~2000nm) polymer particles have shown the superior characteristic with higher removal rate and high surface quality.

Investigation to Semi-Fixed Abrasives Plate Lapping SUS440 Stainless Steel

2009 ◽  
Vol 69-70 ◽  
pp. 113-117
Author(s):  
Qian Fa Deng ◽  
Dong Hui Wen ◽  
Feng Chen ◽  
Li Tao ◽  
Ju Long Yuan
Keyword(s):  
Stainless Steel ◽  
Surface Quality ◽  
Load Distribution ◽  
Material Removal ◽  
Removal Rate ◽  
High Surface ◽  
High Surface Quality ◽  
Rotating Speed ◽  
Size Dispersion ◽  
Fixed Abrasive

To obtain high surface quality and high finishing efficiency in machining SUS440 stainless steel, a novel machining technology employing a semi-fixed abrasive plate (SFAP) is adopted. The SFAP is developed for preventing lapped surface from damage caused by larger particles (from grain size dispersion or from outside of processing area, larger particles could bring uneven load distribution on processing region). The effects of different parameters on the surface quality and the material removal rate (MRR) of SUS440 stainless steel which is lapped by SFAP are investigated in this paper. The control parameters of the lapping process include the lapping time, the load, the rotating speed of the lapping plate, and etc. SFAP of 800# SiC abrasive used, Experimental results indicate that SFAP can avoid the large scratch effectively and the surface roughness (Ra) of the workpiece could be improved from 250 nm to 50 nm in 12 Min. A nearly mirror-like surface can be obtained.

scholarly journals Effects of CNC Machining on Surface Roughness in Fused Deposition Modelling (FDM) Products

Materials ◽  
2020 ◽  
Vol 13 (11) ◽  
pp. 2608 ◽  
Author(s):  
Mohammadreza Lalegani Dezaki ◽  
Mohd Khairol Anuar Mohd Ariffin ◽  
Mohd Idris Shah Ismail
Keyword(s):  
Surface Roughness ◽  
Surface Quality ◽  
High Surface ◽  
Great Influence ◽  
Cnc Machining ◽  
Numerical Control ◽  
Fused Deposition Modelling ◽  
High Surface Quality ◽  
Complex Products ◽  
Fused Deposition

Fused deposition modelling (FDM) opens new ways across the industries and helps to produce complex products, yielding a prototype or finished product. However, it should be noted that the final products need high surface quality due to their better mechanical properties. The main purpose of this research was to determine the influence of computer numerical control (CNC) machining on the surface quality and identify the average surface roughness (Ra) and average peak to valley height (Rz) when the specimens were printed and machined in various build orientations. In this study, the study samples were printed and machined to investigate the effects of machining on FDM products and generate a surface comparison between the two processes. In particular, the block and complex specimens were printed in different build orientations, whereby other parameters were kept constant to understand the effects of orientation on surface smoothness. As a result, wide-ranging values of Ra and Rz were found in both processes for each profile due to their different features. The Ra values for the block samples, printed samples, and machined samples were 21, 91, and 52, respectively, whereas the Rz values were identical to Ra values in all samples. These results indicated that the horizontal surface roughness yielded the best quality compared to the perpendicular and vertical specimens. Moreover, machining was found to show a great influence on thermoplastics in which the surfaces became smooth in the machined samples. In brief, this research showed that build orientation had a great effect on the surface texture for both processes.

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