Nano-Precision Synergistic Finishing Process Integrated ELID-Grinding and MRF

2009 ◽  
Vol 69-70 ◽  
pp. 49-53
Author(s):  
Shao Hui Yin ◽  
Hitoshi Ohmori ◽  
Wei Min Lin ◽  
Yoshihiro Uehara ◽  
Feng Jun Chen ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Optical Materials ◽  
High Efficiency ◽  
High Surface ◽  
Grinding Wheel ◽  
Form Accuracy ◽  
High Surface Quality ◽  
Elid Grinding ◽  
Finishing Process ◽  
Magneto Rheological

ELID (electrolytic in-process dressing) grinding was proposed by one of the authors for automatic dressing the grinding wheel while performing grinding for a long time. It offers a high effective way and has been widely used for grinding hard and brittle optical materials. However, those surfaces produced by fixed abrasive grinding are characterized by considerable sub-surface damage, micro-crack. Magneto-rheological finishing (MRF) is a novel precision finishing process for deterministic form correction and polishing of optical materials by utilizing magneto-rheological fluid. In this paper, an ultra-precision synergistic finishing process integrated MRF and ELID grinding is proposed for shorten total finishing time and improve finishing quality. A lot of nano-precision experiments have been carried out to grind and finish some optical materials such as silicon, silicon carbide, etc. ELID grinding is employed to obtain high efficiency and high surface quality, and then, MRF is employed to improve further surface roughness and form accuracy. In general, form accuracy of ~ λ/20 nm peak-to-valley (P-V) and surface roughness less than 10 Angstrom are produced in high efficiency.

Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel

2016 ◽  
Vol 1136 ◽  
pp. 311-316 ◽  
Author(s):  
Ke Wu ◽  
Naoki Yamazaki ◽  
Yutaro Ebina ◽  
Li Bo Zhou ◽  
Jun Shimizu ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Chromium Oxide ◽  
Removal Rate ◽  
Semiconductor Industry ◽  
High Surface ◽  
Grinding Wheel ◽  
Sapphire Wafer ◽  
High Surface Quality ◽  
Revolution Speed ◽  
The Revolution

Finishing process of sapphire wafer is meeting huge challenge to fulfill the strict requirement of high surface quality in semiconductor industry. Fixed abrasive process, although can guarantee the profile accuracy, leaves damaged layer on the surface or subsurface of sapphire wafer. Chemical mechanical polishing (CMP) is famous for providing great surface roughness, however, sacrifices surface geometrical accuracy. Therefore, a new chromium oxide (Cr2O3) sapphire grinding wheel based on chemical mechanical grinding (CMG) principle has been developed and its performance has also been put into examination. The experiment result has demonstrated that Cr2O3 possesses an outstanding potential in terms of a high material removal rate of sapphire wafer, meanwhile, largely reduces surface roughness from about 150nm to below 10nm in 1 hour. In addition, the design of experiment (DOE) has also been carried out to study the effect of influencing factors towards ultimate surface roughness of sapphire wafer. It reveals that the revolution speed of sapphire wafer bears twice greater influence towards surface roughness than the revolution speed of grinding wheel.

Precision Finishing Combined with ELID and MRF

2004 ◽  
Vol 471-472 ◽  
pp. 317-320 ◽  
Author(s):  
Gui Wen Kang ◽  
Fei Hu Zhang ◽  
Shen Dong
Keyword(s):  
High Surface ◽  
Brittle Materials ◽  
Diamond Wheel ◽  
High Surface Quality ◽  
High Productivity ◽  
Elid Grinding ◽  
Grinding Method ◽  
Finishing Process ◽  
Hard And Brittle Materials ◽  
Precision Finishing

ELID grinding is widely used as a high-productivity and super-precision grinding method for hard and brittle materials. It continues grinding stably with metal bonded diamond wheel due to its in-process dressing. Magnetorheological finishing (MRF) is a novel precision finishing process for hard and brittle materials. In this paper, ELID grinding and MRF are adopted to get high surface quality and remove subsurface damage of hard and brittle materials. The results show that this combination gives attention to both efficiency and quality and can be used to replace conventional optics manufacturing.

Study on Grinding Force and Surface Roughness of Ni3Al Based Superalloy

2018 ◽  
Author(s):  
Xiaoxiang Zhu ◽  
Wenhu Wang ◽  
Ruisong Jiang ◽  
Xiaofen Liu
Keyword(s):  
Surface Roughness ◽  
Surface Topography ◽  
Process Parameters ◽  
High Surface ◽  
Temperature Characteristic ◽  
Grinding Force ◽  
Wheel Speed ◽  
Grinding Wheel ◽  
High Surface Quality ◽  
Creep Feed

Ni3Al based superalloy is a kind of intermetallics, it is a relatively new superalloy, its superior high temperature characteristic makes it the fifth generation aero-engine turbine blade material. The machinability of Ni3Al based superalloy is poor, and its process parameters have significant influence on grinding force and surface integrity. The creep feed grinding experiments of Ni3Al based superalloy IC10 were carried out with different process parameters. The experimental results show that the workpiece speed has the greatest effect on grinding force, surface roughness and 3D surface topography, followed by grinding depth, the wheel speed has the smallest influence. Grinding force is positively correlated with grinding depth and workpiece speed, and negatively correlated with grinding wheel speed. Similarly, surface roughness is positively correlated with grinding depth and workpiece speed, and negatively correlated with grinding wheel speed. The higher the workpiece speed, the deeper the grooves and the higher the peaks of the surface topography. In order to maintain high surface quality, small workpiece speed and grinding depth should be chosen during grinding process.

Theoretical Modeling and Experimental Verification of Surface Roughness in Abrasive Jet Finishing

2009 ◽  
Vol 16-19 ◽  
pp. 450-455
Author(s):  
Chang He Li ◽  
Zhan Rui Liu ◽  
Guang Qi Cai
Keyword(s):  
Surface Roughness ◽  
High Efficiency ◽  
High Surface ◽  
Experimental Results ◽  
Surface Shape ◽  
Grinding Wheel ◽  
Geometrical Parameters ◽  
Machined Surface ◽  
Carrier Fluid ◽  
Fluid Concentration

Based on the modeling and experiments concerning the surface roughness in abrasive jet finishing with grinding wheel as restraint, the effect of abrasive size, abrasive fluid concentration, machining cycle, wheel velocity and carrier fluid on machined surface quality was investigated. Surface grinder M7120 was employed in a jet machining experiment conducted with W18Cr4V and 40Cr materials, profilometer TALYSURF was used to measure the micro geometrical parameters after machining, and SEM was used to observe surface micro-morphology. Experimental results show that with W7 Al2O3 powder at the mass fraction of 10% and antirust lubricating liquid being adopted in jet machining for 20 to 30 cycles, not only high surface shape precision can be kept or obtained, but also defect-free machined surface with the roughness of Ra0.15～1.6µm can be obtained with high efficiency. Experimental observation and experimental results proved that the experimental results agree well with a mechanism-based machining model.

scholarly journals Effect of Optical and Morphological Control of Single-Structured LEC Device

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 843
Author(s):  
Woo Jin Jeong ◽  
Jong Ik Lee ◽  
Hee Jung Kwak ◽  
Jae Min Jeon ◽  
Dong Yeol Shin ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Surface Roughness ◽  
Surface Properties ◽  
High Efficiency ◽  
High Surface ◽  
Reduction Rate ◽  
Operating Characteristics ◽  
Emission Layer ◽  
Light Emitting ◽  
Stable Operating

We investigated the performance of single-structured light-emitting electrochemical cell (LEC) devices with Ru(bpy)3(PF6)2 polymer composite as an emission layer by controlling thickness and heat treatment. When the thickness was smaller than 120–150 nm, the device performance decreased because of the low optical properties and non-dense surface properties. On the other hand, when the thickness was over than 150 nm, the device had too high surface roughness, resulting in high-efficiency roll-off and poor device stability. With 150 nm thickness, the absorbance increased, and the surface roughness was low and dense, resulting in increased device characteristics and better stability. The heat treatment effect further improved the surface properties, thus improving the device characteristics. In particular, the external quantum efficiency (EQE) reduction rate was shallow at 100 °C, which indicates that the LEC device has stable operating characteristics. The LEC device exhibited a maximum luminance of 3532 cd/m2 and an EQE of 1.14% under 150 nm thickness and 100 °C heat treatment.

scholarly journals Investigation on the Surface Quality Obtained during Trochoidal Milling of 6082 Aluminum Alloy

Machines ◽  
2021 ◽  
Vol 9 (4) ◽  
pp. 75
Author(s):  
Nikolaos E. Karkalos ◽  
Panagiotis Karmiris-Obratański ◽  
Szymon Kurpiel ◽  
Krzysztof Zagórski ◽  
Angelos P. Markopoulos
Keyword(s):  
Surface Roughness ◽  
Surface Quality ◽  
Process Parameters ◽  
Manufacturing Industry ◽  
High Surface ◽  
Cutting Tools ◽  
Cutting Speed ◽  
Depth Of Cut ◽  
High Surface Quality ◽  
Trochoidal Milling

Surface quality has always been an important goal in the manufacturing industry, as it is not only related to the achievement of appropriate geometrical tolerances but also plays an important role in the tribological behavior of the surface as well as its resistance to fatigue and corrosion. Usually, in order to achieve sufficiently high surface quality, process parameters, such as cutting speed and feed, are regulated or special types of cutting tools are used. In the present work, an alternative strategy for slot milling is adopted, namely, trochoidal milling, which employs a more complex trajectory for the cutting tool. Two series of experiments were initially conducted with traditional and trochoidal milling under various feed and cutting speed values in order to evaluate the capabilities of trochoidal milling. The findings showed a clear difference between the two milling strategies, and it was shown that the trochoidal milling strategy is able to provide superior surface quality when the appropriate process parameters are also chosen. Finally, the effect of the depth of cut, coolant and trochoidal stepover on surface roughness during trochoidal milling was also investigated, and it was found that lower depths of cut, the use of coolant and low values of trochoidal stepover can lead to a considerable decrease in surface roughness.

scholarly journals Research on ELID Grinding Mechanism and Process Parameter Optimization of Aluminum-Based Diamond Composites for Electronic Packaging

2019 ◽  
Vol 26 (1) ◽  
pp. 550-562
Author(s):  
Jialiang Guan ◽  
Longyue Zhang ◽  
Shujun Liu ◽  
Yang Yang
Keyword(s):  
Surface Roughness ◽  
Duty Cycle ◽  
Electronic Packaging ◽  
Process Parameter ◽  
Combination Method ◽  
Grinding Wheel ◽  
Diamond Composite ◽  
Linear Speed ◽  
Elid Grinding ◽  
Grinding Mechanism

AbstractAiming at the problem of poor processing performance and difficult processing in the process of aluminum-based diamond composites for electronic packaging, this paper uses electrolytic in-process dressing (ELID) grinding technology to grind the aluminum-based diamond composites. The quadratic orthogonal rotation combination method was used to investigate the influence law and degree of grinding depth, grinding wheel linear velocity, duty cycle and electrolysis current on surface roughness. The ELID grinding optimization process parameters of aluminum-based diamond composites obtained by LINGO software are: grinding depth 9.3μm, grinding wheel linear speed 36m/s, duty cycle 63.7%, electrolysis current 11.5A. The surface of the aluminum-based diamond composite with a surface roughness of 125 nm was machined by this optimized process parameter combination.

Development of polymer abrasive medium for nanofinishing of microholes on surgical stainless steel using abrasive flow finishing process

2019 ◽  
Vol 234 (3) ◽  
pp. 355-370 ◽  
Author(s):  
Sachin Singh ◽  
M Ravi Sankar
Keyword(s):  
Surface Roughness ◽  
Stainless Steel ◽  
High Surface ◽  
Machining Process ◽  
Abrasive Medium ◽  
Finishing Process ◽  
Drug Eluting ◽  
Finishing Processes ◽  
Abrasive Flow Finishing

The finishing operation completes the manufacturing cycle of a component. Depending on the level of finish (micro and nano) required on the component surface, different finishing processes are employed. Several components employed in medical, automotive and chemical industries use different types of passages for the flow of fluid. The surface roughness of such passages decides the functionality of the component. Drug-eluting stents are one of the recent advancements in the medical industry. They possess microholes for release of the drugs to the point of cure. Microholes are mostly fabricated by thermal-based micromachining processes that generate metallurgically destroyed surface layers with high surface roughness. Later, these are polished using chemical or electrochemical polishing techniques, which chemically destroy the quality of the surface. These metallurgically and chemically modified (destroyed/changed) rough surfaces on the microhole wall can cause contamination of the drug. So in this article, microholes of diameter 850 ± 30 µm are fabricated in surgical stainless steel (SS 316L) workpieces using the electric discharge micromachining process. Machined microholes are finished by employing a non-traditional finishing process called the abrasive flow finishing process. Instead of using a commercially available expensive abrasive flow finishing medium, the economic medium is fabricated in-house, and its rheological study is carried out. Machining process produces microholes with a surface roughness of about 1.40 ± 0.10 µm. Later, by finishing of microholes with the abrasive flow finishing process, the surface roughness is reduced to 150 nm (percentage surface roughness improvement of about 88.53%). Therefore, the abrasive flow finishing process is a viable alternative to chemical-based polishing processes as it removes the recast layer and achieves nanosurface roughness.

Influences of Polishing Tool’s Shape on Surface Roughness in Magneto-Rheological Finishing

2010 ◽  
Vol 97-101 ◽  
pp. 4092-4095 ◽  
Author(s):  
Shao Hui Yin ◽  
Ke Jun Zhu ◽  
Yu Feng Fan ◽  
Yong Jian Zhu ◽  
Yue Chen ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Rotational Speed ◽  
Magnetic Field Intensity ◽  
Optical Glass ◽  
Orthogonal Experiment ◽  
Optical Field ◽  
Basic Material ◽  
Finishing Process ◽  
Magneto Rheological ◽  
The Magnetic Field

Optical glass is widely used as the most important basic material in optical field. In this paper, four different shape finishing tools are designed for polishing flat K9 glass by using magneto-rheological finishing process. Influences of the finishing tool’s shape on surface roughness are investigated and analyzed under different related parameters such as finishing time, rotational speed of tool and finishing gap. The result shows that the slotted tool could obtain better surface roughness than the non-slotted tool under the same conditions. Through changing the magnetic field intensity, finishing gap, rotational speed of tool and finishing time, an orthogonal experiment is conducted to obtain the optimal finishing process parameters.

Development of a Rubber-Bonded Grinding Wheel - Studies on Aspherical Grinding -

2007 ◽  
Vol 329 ◽  
pp. 465-470 ◽  
Author(s):  
Nobuhito Yoshihara ◽  
Ji Wang Yan ◽  
Tsunemoto Kuriyagawa
Keyword(s):  
Surface Roughness ◽  
Grinding Wheel ◽  
Optical Instrument ◽  
Form Accuracy ◽  
Optical Instruments

Aspherical surfaces are an important technology in optical instruments. Until now, only improvements in form accuracy and surface roughness of aspherical surfaces have been investigated. However, when the surface roughness becomes low, the small waviness of the surface becomes marked. This small waviness is termed “Nano-topography.” Nano-topography causes grinding marks and reduces the accuracy of an optical instrument. Nano-topography is caused by the vibration of a grinding wheel during the manufacture of the surface. This paper will reveal how a rubber-bonded grinding wheel has been developed to absorb that vibration. The dressing of the grinding wheel was also investigated. As a result, it is possible to eliminate the generation of nano-topography.

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