Study on Low Temperature Deposition of TiN Films and their Tribological Properties

2011 ◽  
Vol 189-193 ◽  
pp. 925-930 ◽  
Author(s):  
Xiu Qin Bai ◽  
Jian Li
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Tribological Properties ◽  
High Speed ◽  
High Speed Steel ◽  
Film Structure ◽  
Tin Films ◽  
Low Temperature Deposition ◽  
Tin Thin Films ◽  
Temperature Deposition

The low temperature deposition principle of magnetron sputtering was discussed. Reactive magnetron sputtering technique was used to gain titanium nitride (TiN) thin films on W18Cr4V high-speed steel substrates at low temperature. A series of experiments had been conducted to study the properties of TiN films. The experimental results showed that at the low temperature(<140 °C), magnetic sputtering can be used for the deposition of TiN film with compact, uniform and high nano-hardness, and their tribological properties were excellent, which co-determined by the film structure of low temperature magnetron sputtering and the counter-parts of rubbing pairs.

The mechanism of low temperature deposition of crystalline anatase by reactive DC magnetron sputtering

2005 ◽  
Vol 190 (2-3) ◽  
pp. 321-330 ◽  
Author(s):  
Mark C. Barnes ◽  
Sunil Kumar ◽  
Len Green ◽  
Nong-Moon Hwang ◽  
Andrea R. Gerson
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Effects of Tungsten Addition on Mechanical and Tribological Properties of Carbon Nitride Prepared by DC Magnetron Sputtering

2015 ◽  
Vol 642 ◽  
pp. 24-29 ◽  
Author(s):  
Yan Liang Su ◽  
Yue Feng Lin ◽  
Sun Hui Yao ◽  
Chia Jui Hsu
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
High Speed ◽  
Carbon Nitride ◽  
Indentation Test ◽  
High Speed Steel ◽  
Xrd Analysis ◽  
Tungsten Content ◽  
Dc Magnetron Sputtering ◽  
Glow Discharge Spectroscopy

Carbon nitride coatings doped with tungsten were deposited on high speed steel disks by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas. The coatings were deposited on three different types of interlayer (Ti, Ti/TiN and Ti/TiC), and the tungsten target current was varied from 0 to 0.9 A. Surface morphology of the coatings were measured by roughness testing and scanning electron microscopy (SEM). In addition, the chemical composition and depth profile were analyzed by X-ray Diffraction (XRD) analysis, Raman spectroscopy, and glow discharge spectroscopy (GDS). Finally, the hardness (H) and elasticity (E) were measured by nanoindentation and a Rockwell indentation test, while the tribological properties were tested using a pin-on-disk tribometer. After all, the coatings were measured by cutting testing of tuning inserts and micro-drillers. It is found that all of the coatings are amorphous and have a thickness of approximately 1.5 μm. Moreover, the nitrogen content is around 30 at%, while the tungsten content varies in the range of 0-9 at%. In addition, the hardness values are in the range of 15-20 GPa and the elasticity varies from 236 to 274 GPa. A good correlation is observed between the wear resistance and the indentation adhesion level. Furthermore, it is found that the hardness is not significantly correlated to the tungsten content and the coatings deposited on the Ti/TiC interlayer have greater adhesion. Finally, the coatings generally have a very low coefficient of friction (0.01-0.3) and a wear coefficient as low as 10-6 mm3/Nm, and the CN/TiC coating reduced 41% and 43% of flank wear in the cutting testing of turning inserts and micro-drillers respectively.

scholarly journals Low‐temperature deposition of polycrystalline germanium on silicon by magnetron sputtering

2018 ◽  
Vol 54 (17) ◽  
pp. 1043-1045
Author(s):  
N. Korivi ◽  
N. Nujhat ◽  
S. Ahmed ◽  
L. Jiang ◽  
K. Das
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Direct Fractographic Evaluation of Multilayer CNx/TiN Films by Magnetron Sputtering

MRS Advances ◽  
2018 ◽  
Vol 3 (18) ◽  
pp. 949-955
Author(s):  
Gongsheng Song ◽  
Qiang Fu ◽  
Chunxu Pan
Keyword(s):  
Fracture Surface ◽  
Magnetron Sputtering ◽  
Film Thickness ◽  
High Speed ◽  
Steel Substrate ◽  
High Speed Steel ◽  
Interfacial Strength ◽  
High Hardness ◽  
Tin Films ◽  
Dc Reactive Magnetron Sputtering

ABSTRACTIn this paper, a multilayer CNx/TiN composite film on high-speed steel substrate was prepared by using a multi-arc assisted DC reactive magnetron sputtering system. The cross-section observations of the fracture surface reveal that the films show a pure cleavage fracture due to its super-high hardness, and the interfacial strength between the film and substrate is associates with the film thickness, i.e., 2μm is a critical thickness for the present deposition. That is to say, there is no disbonding or cracking at the interface when the film thickness is less than 2μm, while the interfacial failure is generated if the film thickness is larger than 2μm. This direct SEM observation of the fracture surface provides a distinct image for evaluating the mechanical property and also analyzing the failure mechanism of the films.

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