Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator
2011 ◽
Vol 254
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pp. 46-49
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Keyword(s):
In this paper, a new cost-effective and reliable high performance biomass sensor is presented. Compared to previous biomass sensors, the developed sensor shows a potential to detect smaller biological agents by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, with quality factor of 10,000 and the mass sensitivity of -400 Hz/pg.
Keyword(s):
2016 ◽
Vol 4
(34)
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pp. 8094-8103
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2008 ◽
Vol 19
(1)
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pp. 015016
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Keyword(s):
2016 ◽
Keyword(s):
2014 ◽
Vol 34
◽
pp. 171-179
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Keyword(s):