Study on Parameters Optimization in Ultra-Precise Processing of Germanium Substrate

2009 ◽  
Vol 69-70 ◽  
pp. 442-445 ◽  
Author(s):  
Xun Lv ◽  
Ju Long Yuan ◽  
Yang Yu Wang ◽  
Qian Fa Deng

To improve efficiency in ultra-precision lapping germanium (Ge) substrate, a new ultra-precise process technology is introduced in this paper. Two steps ultra-precise process were semi bonded abrasive lapping in rough machining, and CMP process in finish machining. A good surface quality workpiece was obtained in semi bonded abrasive lapping process efficiently. Several machining parameters were compared and applied. After CMP process, the mirror-like surface of Ge substrate was obtained.

2020 ◽  
pp. 251659842093849
Author(s):  
Vinod Mishra ◽  
Rohit Sharma ◽  
Kuldeep Mahajan ◽  
Jayant Kumar ◽  
Neha Khatri ◽  
...  

Optical plastic lenses are progressively substituting glass optics due to their lightweight and low costs. Polycarbonate (PC) is considered as one of the leading optical materials due to its good mechanical and optical properties. Ultra-precision machining is the most suited process to develop PC optical components. Nevertheless, ultra-precision machining is considered as one of the deterministic processes to ensure the surface quality required for optical components. However, it is important to understand the behavior of the material during each stage of manufacturing. PC offers many challenges during its processing to achieve the nanometric finish and sub-micron form accuracies. In this article, the various issues of PC machining are discussed through experimental investigations. The effect of machining variables, that is, machining parameters, cutting temperature, and vacuum clamping on surface quality is studied. The results show the importance of the selection of optimum conditions for machining PC with good surface quality. The PC optical component is developed with surface finish ( Ra) 18.1 nm and profile accuracies ( Pv) of 0.116 µm. The study is helpful to understand the various issues involved in PC machining and hence to minimize their effects on surface quality.


2008 ◽  
Vol 53-54 ◽  
pp. 299-303
Author(s):  
Zong Wei Niu ◽  
Zhi Yong Li ◽  
F.F. Wang ◽  
Dian Zhu Sun

A simulation system was developed to forecast machining quality and optimize grinding parameters for the machining of ceramic die material. The system can forecast the surface quality of machined ceramic die material with high precision, optimize machining parameters and analyze the dominant factors. Based on the process database, the simulation system is applicable to various machining methods. It can help to raise the automaticity for the machining of ceramic die material and develop the farther intelligent system.


2009 ◽  
Vol 69-70 ◽  
pp. 225-228
Author(s):  
Xun Lv ◽  
Ju Long Yuan

Silver electrode layer of piezoelectric ceramic transducer requires good surface quality and high efficiency. Efficiency of traditional lapping and polishing is very low. Ultra-precision grinding technology is also unsuitable for the thickness of workpiece is extremely thin. Semi bonded abrasive lapping is a new ultra-precision processing method. The new ultra-precise method can achieve good surface quality in short time, and removal stock of workpiece is small. In order to research the optimal technology of semi bonded abrasive lapping about silver electrode layer, this paper research several major processing parameters by experiments. The results show that appropriate processing load can obtain better surface roughness of silver electrode layer,and surface roughness of silver electrode layer has little change with different processing speed. By using ultra-fine semi bonded abrasive plate, 94.08KPa processing load and 40 rpm polishing speed, after 30 minutes, surface roughness of silver electrode layer is 11nm, and removal stock is 11.5μm.


2013 ◽  
Vol 770 ◽  
pp. 352-356
Author(s):  
Kai Zhen Zhang ◽  
Bo Zhu ◽  
Yu Kui Wang ◽  
Zhen Long Wang

In this study, a micro-EDM process of exceeded slender micro-shaft is proposed. It could be divided into two parts, rough machining and finish processing. In rough machining procedure, the micro-shaft feeds along the radial and motions periodically along axial direction. High machining voltage is adopted to improve machining efficiency. In finish machining procedure, the micro-shaft feeds along radial and motions along tangential direction. Low open voltage is adopted to improve surface quality and reduce explosive force. By combining rough machining and finish machining, a high surface-quality micro-shaft with a diameter of 25μm and high aspect ratio of 120:1 was fabricated.


2014 ◽  
Vol 1049-1050 ◽  
pp. 1026-1029
Author(s):  
Yu Kui Wang ◽  
Xiang Chen ◽  
Bo Zhu ◽  
Zhen Long Wang

In this study, an ultrafine WEDM (wire electrical discharge machining) of micro-channel mold is proposed. It could be divided into two parts, rough machining and finish processing. In rough machining procedure, high machining voltage is adopted to improve machining efficiency. In finish machining procedure, extended and trimmed tool path is adopted to obtain the cusp at the corner, low electrical parameters is adopted to improve surface quality and dimensional precision. By conducting finish machining of 40V, a better surface-quality with Ra of 0.32μm and high aspect ratio of 20:1 was fabricated.


2007 ◽  
Vol 359-360 ◽  
pp. 158-161 ◽  
Author(s):  
Xiao Feng Zheng ◽  
Ju Long Yuan ◽  
Dong Hui Wen ◽  
Fei Yan Lou

9Cr18 is a type of martensite stainless steel. It has high hardness, chemical stability, fine anticorrosion, wearable and quench stability. It has been used in different areas with high-anticorrosion and high polishing surface as mirror. So it requires for the high level surface quality after lapping and polishing. In this paper, the surface quality (surface roughness and flatness) of 9Cr18 is discussed with lapping parameters which include velocity, load and time distribution of two lapping steps(rough lapping and Ultra-precision lapping). In order to optimize those parameters, an optimization experiment for lapping 9Cr18 with Al2O3 was designed by Taguchi method. Finally, the optimum condition of each factor can be determined that speed: 80rpm, load:3.0kPa, and time distribution: rough lapping time=15min, Ultra-precision lapping time=45min are the optimum conditions for both Ra and Wt.


2022 ◽  
Author(s):  
Peng Wang ◽  
Qingshun Bai ◽  
Kai Cheng ◽  
Liang Zhao ◽  
Hui Ding

Abstract The surface integrity and machining accuracy of thin-walled micro parts are significantly affected by micro-milling parameters mostly because of their weak stiffness. Furthermore, there is still a lack of studies focusing on parameters optimization for the fabrication of thin-walled microscale parts. In this paper, an innovative approach is proposed for the optimization of machining parameters with the objectives of surface quality and dimension accuracy, which integrates the Taguchi method, principal component analysis method (PCA) and the Non-dominated sorting genetic algorithm (NSGA-II). In the study, surface arithmetic average height Sa, surface root mean square height Sq, and 3-D fractal dimension Ds are selected to evaluate surface quality. Then micro-milling experiments are conducted based on the Taguchi method. According to the experimental results, the significance of machining parameters can be determined by range analysis. Besides, regression models for the responses are developed comparatively, and the PCA method is employed for dimension reduction of the optimization objective space. Finally, two combinations of machining parameters with the highest satisfaction are obtained through NSGA-II, and verification experiments are carried out. The results show that the surface quality and dimension accuracy of the thin-walled microscale parts can be simultaneously improved by using the proposed approach.


Micromachines ◽  
2018 ◽  
Vol 9 (8) ◽  
pp. 402 ◽  
Author(s):  
Yong Liu ◽  
Yong Jiang ◽  
Chunsheng Guo ◽  
Shihui Deng ◽  
Huanghai Kong

Micro electrochemical machining is becoming increasingly important in the microfabrication of metal parts. In this paper, the machining characteristics of micro electrochemical milling with nanosecond pulse were studied. Firstly, a mathematical model for the localization control of micro electrochemical milling with nanosecond pulse was established. Secondly, groups of experiments were conducted on nickel-based superalloy and the effects of parameters such as applied voltage, pulse on time, pulse period, electrolyte concentration and electrode diameter on machining localization and surface roughness were analyzed. Finally, by using the optimized machining parameters, some 2D complex shapes and 3D square cavity structures with good shape precision and good surface quality were successfully obtained. It was proved that the micro electrochemical milling with nanosecond pulse technique is an effective machining method to fabricate metal microstructures.


Author(s):  
Jiasheng Li ◽  
Yang Jiao ◽  
Pinkuan Liu

To improve the surface quality of the copper and reduce the diamond tool wear, a prediction model is established experimentally for the relationship between surface roughness and machining parameters. Based on the processing principle of flycutting machining, the prediction model for surface roughness is set up by response surface methodology. Then, a machining experiment for the copper is conducted under different cutting parameters designed by Taguchi method and the surface roughness is tested by 4D technology dynamic laser interferometer. After that, the prediction model is obtained by analyzing the experimental data, and the accuracy of the model is verified by analysis of variance (ANOVA), R2 value and residual analysis. Furthermore, the effect of cutting parameters upon the surface roughness is analyzed. Finally, validation tests are conducted to verify the model. Experimental results demonstrate that the prediction model is adequate at 95% confidence level. The output of prediction model helps to select cutting parameters to reduce surface roughness which ensures surface quality in ultra-precision fly cutting machining.


2015 ◽  
Vol 789-790 ◽  
pp. 105-110 ◽  
Author(s):  
Saiful Bahri Mohamed ◽  
Wan Noor Fatihah Mohamad ◽  
Been Seok Yew ◽  
Mohamad Minhat ◽  
Mohd Shahir Kasim ◽  
...  

Trimming process using Solid Carbide, 4 flute endmill of 8mm diameter tool on stacks of multidirectional CFRP/Al-2024 in a CNC Milling machine was experimentally investigated. The machining parameters considered were spindle speed (N), feed rate (fr) and depth of cut (dc). The aims were to analyze the influence factors and the interaction of these parameters with respect to surface quality produced. A Two Level Factorial Design method was used to plan systematic experiments. The influence factors and the interaction between these parameters are analyzed and the optimum machining parameters for minimizing the surface roughness is determined. The analysis of variance (ANOVA) shows that dc and fr are the most significant parameters to the overall performance of surface quality. Surface roughness of CFRP is found to be 1.778 µm and Al2024 is found to be 0.983 µm at the setting of N = 1860 rpm, fr = 620 mm/min and dc = 0.12 mm respectively. The validation test shows deviation of predicted to actual value surface roughness is 7.87% for CFRP and 6.61 % for Al2024.


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