Fabrication of Micro Tetrahedron Patterns Using Ultra-Precision Shaping System

Recently, ultra-precision machining of components and dies for information and communication industries, such as fresnel mirrors, diffraction lens, and die for super high intensity reflective sheet is one of the major target. To machine three-dimensional micro patterns, such as super high-intensity reflective sheets, ultra-precision and mirror surface fabrication processes are required. It has been reported, however, that continuous cutting, such as turning or shaping, is more suitable to ultra-precision machining. Many researchers have studied the manufacturing process of reflective sheet dies to obtain high form accuracy and surface quality. In this paper, ultra-precision shaping system was developed to fabricate micro patterns mechanically. In order to estimate performance of the shaping system, micro V-shaped grooves and tetrahedron pattern arrays for a super high intensity reflective sheet was applied. Also, a new measuring technology to inspect form and machining errors of a machined tetrahedron patterns was proposed. The results show that shaping system has a positioning accuracy of x, y, z axis with 100, 10, 10nm resolution, respectively. Micro V-shaped grooves could be machined at various depths and micro tetrahedron patterns with a good quality were obtained as well.

Download Full-text

A Self-Established “Machining-Measurement-Evaluation” Integrated Platform for Taper Cutting Experiments and Applications

Micromachines ◽

10.3390/mi12080929 ◽

2021 ◽

Vol 12 (8) ◽

pp. 929

Author(s):

Xudong Yang ◽

Zexiao Li ◽

Linlin Zhu ◽

Yuchu Dong ◽

Lei Liu ◽

...

Keyword(s):

Three Dimensional ◽

Precision Machining ◽

Two Dimensional ◽

Dimensional Image ◽

Two Dimensional Image ◽

Integrated Platform ◽

Hard And Brittle Materials ◽

Ultra Precision ◽

Cutting Experiments

Taper-cutting experiments are important means of exploring the nano-cutting mechanisms of hard and brittle materials. Under current cutting conditions, the brittle-ductile transition depth (BDTD) of a material can be obtained through a taper-cutting experiment. However, taper-cutting experiments mostly rely on ultra-precision machining tools, which have a low efficiency and high cost, and it is thus difficult to realize in situ measurements. For taper-cut surfaces, three-dimensional microscopy and two-dimensional image calculation methods are generally used to obtain the BDTDs of materials, which have a great degree of subjectivity, leading to low accuracy. In this paper, an integrated system-processing platform is designed and established in order to realize the processing, measurement, and evaluation of taper-cutting experiments on hard and brittle materials. A spectral confocal sensor is introduced to assist in the assembly and adjustment of the workpiece. This system can directly perform taper-cutting experiments rather than using ultra-precision machining tools, and a small white light interference sensor is integrated for in situ measurement of the three-dimensional topography of the cutting surface. A method for the calculation of BDTD is proposed in order to accurately obtain the BDTDs of materials based on three-dimensional data that are supplemented by two-dimensional images. The results show that the cutting effects of the integrated platform on taper cutting have a strong agreement with the effects of ultra-precision machining tools, thus proving the stability and reliability of the integrated platform. The two-dimensional image measurement results show that the proposed measurement method is accurate and feasible. Finally, microstructure arrays were fabricated on the integrated platform as a typical case of a high-precision application.

Download Full-text

3D Simulation of the Ultra-Precision V-Groove Machine Tool

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.679.111 ◽

2016 ◽

Vol 679 ◽

pp. 111-115

Author(s):

Hui Jing Huang ◽

Wei Qiang Gao ◽

Jian Qun Liu

Keyword(s):

Machine Tool ◽

Collision Detection ◽

Three Dimensional ◽

Numerical Control ◽

Machining Process ◽

3D Simulation ◽

Precision Machining ◽

Hardware Platform ◽

Nc Code ◽

Ultra Precision

This paper develops a three dimensional (3D) simulation system with QT platform and OpenGL 3D library by adopting the driver and Aerotech’s linear motor as hardware platform and INtime and A3200 controller as the software platform. The system uses numerical control (NC) code syntax checking module to test the NC code syntax and applies 3D simulation module to display the actual machining process. The interference and collision detection module is built in this system to detect the problem during the actual processing. The system therefore contributes to avoiding the trial and tests for the ultra-precision machining process and improving the machining efficiency as well as reducing the loss of ultra-precision components of machine tool due to the collision.

Download Full-text

Progress of Traditional Ultra-Precision Machining Processes

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.753-755.314 ◽

2013 ◽

Vol 753-755 ◽

pp. 314-317 ◽

Cited By ~ 1

Author(s):

Zi Xu Han ◽

Li Bao An ◽

Hai Dong Zhao

Keyword(s):

Manufacturing Technology ◽

Precision Machining ◽

Machining Parameters ◽

Machining Processes ◽

Structured Surfaces ◽

Good Surface ◽

Industrial Sectors ◽

High Form ◽

Ultra Precision ◽

Good Surface Roughness

Ultra-precision machining is in the forefront of advanced manufacturing technology and also will become the basis of future manufacturing technology. Ultra-precision machining already has turned into the enabling technology to success in the international competition. Some new progresses in traditional ultra-precision machining processes including processing and measuring techniques, machining equipment, and analysis methods are introduced in this paper. Components with high form accuracy and good surface roughness are widely applied to precision apparatuses. Structured surfaces can be acquired by selecting reasonable machining parameters before mechanical process. The continuous growing markets will fuel many industrial sectors by ultra precision machining. We should pay great attention to the further developments of this technology.

Download Full-text

Design of a Three-Axis Desktop Micro Milling Machine Tool

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.589-590.735 ◽

2013 ◽

Vol 589-590 ◽

pp. 735-739 ◽

Cited By ~ 1

Author(s):

Xiang Cheng ◽

Xian Hai Yang ◽

Li Li ◽

Jun Ying Liu

Keyword(s):

Machine Tool ◽

Three Dimensional ◽

Milling Process ◽

Micro Milling ◽

Precision Machining ◽

Milling Machine ◽

Design And Optimization ◽

Linear Motors ◽

Ultra Precision ◽

Open Control

Micro milling process is more favorite than other processes for its unique advantages in ultra-precision machining of miniature components with intricate three-dimensional geometrical feature made of various materials. Aiming at micro milling applications, a three-axis desktop milling machine tool with linear motors and nano-meter linear scales has been introduced. Natural granite is used as the frame material and air-bearing cylinders are used for z-axis gravity balancing. Finite element method is applied to the design and optimization of the machine structures. The designed machine adopts linear motors and 5nm resolution linear scale using an open control architecture. The workspace is 100mm×100mm×100mm and the overall size is 610mm×650mm×630mm. Experimental evaluations show the sub-micron machining feasibility of the introduced machine.

Download Full-text

An Investigation of the Cutting Strategy for the Machining of Polar Microstructures Used in Ultra-Precision Machining Optical Precision Measurement

Micromachines ◽

10.3390/mi12070755 ◽

2021 ◽

Vol 12 (7) ◽

pp. 755

Author(s):

Chen-Yang Zhao ◽

Chi-Fai Cheung ◽

Wen-Peng Fu

Keyword(s):

Precision Measurement ◽

Detection Algorithm ◽

Surface Generation ◽

Precision Machining ◽

Tool Geometry ◽

Depth Of Cut ◽

Machining Parameters ◽

Ultra Precision ◽

Transition Points ◽

Cutting Strategy

In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.

Download Full-text

Two tool path generation methods for ultra-precision machining of off-axis convex ellipsoidal surface

Proceedings of the Institution of Mechanical Engineers Part N Journal of Nanoengineering and Nanosystems ◽

10.1177/1740349914530682 ◽

2014 ◽

Vol 229 (4) ◽

pp. 147-153 ◽

Cited By ~ 2

Author(s):

Shijun Ji ◽

Huijuan Yu ◽

Ji Zhao

Keyword(s):

Tool Path ◽

Tool Path Generation ◽

Precision Machining ◽

Path Generation ◽

Ellipsoidal Surface ◽

Ultra Precision

Download Full-text

Residual stresses with different tool flank wear lengths in the ultra-precision machining of NiP alloys

Journal of Materials Processing Technology ◽

10.1016/0924-0136(95)02251-1 ◽

1997 ◽

Vol 65 (1-3) ◽

pp. 116-126 ◽

Cited By ~ 20

Author(s):

Zone-Ching Lin ◽

Wun-Ling Lai ◽

H.Y. Lin ◽

C.R. Liu

Keyword(s):

Residual Stresses ◽

Flank Wear ◽

Precision Machining ◽

Tool Flank Wear ◽

Ultra Precision

Download Full-text

Study on Ultra-Precision Ball Surface Floating Polishing Kinematics Mechanism

Materials Science Forum ◽

10.4028/www.scientific.net/msf.532-533.109 ◽

2006 ◽

Vol 532-533 ◽

pp. 109-112

Author(s):

Xun Lv ◽

Ju Long Yuan ◽

Dong Hui Wen ◽

Qian Fa Deng ◽

Fei Yan Lou

Keyword(s):

Chemical Conversion ◽

Processing Parameters ◽

Precision Machining ◽

High Tech ◽

National Defense ◽

Ball Surface ◽

Angular Velocities ◽

Ultra Precision ◽

Relationship Of ◽

The Mathematical Model

The high precision balls are requested in national defense, astronautics and high-tech commercial domain urgently. Conventional precision machining methods are sensitive to uniformity of abrasives and machining environment. After precision machining, there are easily to produce thick damaged layer on the ball surface because of machining stress and chemical conversion. On the basis of the floating polishing mechanism, a new scatheless ultra-precision polishing method of ball surface can solve the problems of abrasives uniformity effectively and damaged layer. In order to ensure that the new polishing method polishes ball surface equally, the appropriate angular velocities of the ball should be selected. This paper sets up the mathematical model about the motion of ball. By analyzing and simulating the relationship of the angular velocities, the best processing parameters are acquired.

Download Full-text