Intelligent Fuzzy Ziegler-Nichols-Based Controller Design of a SPM System with Parameters Variation

2012 ◽  
Vol 516 ◽  
pp. 402-407
Author(s):  
Jium Ming Lin ◽  
Kun Tai Cho ◽  
Po Kuang Chang
Keyword(s):  
Contact Force ◽  
Relative Stability ◽  
Controller Design ◽  
Parameter Variation ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Lever Arm ◽  
Fuzzy Methods ◽  
Previous Design ◽  
Probe Microscope

This research applied a stylus probe without balance and lever arm as in the previous design of a contact-force-controlled Scanning Probe Microscope (SPM) system. The controller integrated both Ziegler-Nichols-based and intelligent fuzzy methods; thus the systems relative stability can be reserved under the nominal conditions. In addition, one can see that both hysteresis and parameter variation effects of the force actuator can be reduced. Comparing the results with the traditional Ziegler-Nichols-based controller by simulation, one can see that the proposed systems are much more robust.

Ziegler-Nichols Based Intelligent Fuzzy PID Controller Design of a SPM System with Parameters Variation

2011 ◽  
Vol 201-203 ◽  
pp. 2113-2118 ◽  
Author(s):  
Jium Ming Lin ◽  
Po Kuang Chang
Keyword(s):  
Relative Stability ◽  
Pid Controller ◽  
Controller Design ◽  
Design Method ◽  
Scanning Probe ◽  
Practical Implementation ◽  
Fuzzy Pid ◽  
Fuzzy Pid Controller ◽  
Pid Controller Design ◽  
Probe Microscope

This research is to extend Ziegler-Nichols based PID controller design method to the intelligent fuzzy PID controller design of a Scanning Probe Microscope (SPM) system, thus the relative stability can be reserved. In addition, one can see the hysteresis and parameters variation effects of the force actuator can be reduced. This improvement had been verified by practical implementation. Comparing the results with the design with the Ziegler-Nichols based PID controller, one can see that the proposed system is more robust.

scholarly journals IMPROVING THE EFFICIENCY OF THE CONTACT FORCE METHOD OF THE ATOMIC FORCE SPECTROSCOPY

2021 ◽  
pp. 243-249
Author(s):  
Юлия Васильевна Кузнецова
Keyword(s):  
Contact Force ◽  
Polymer Surface ◽  
Force Spectroscopy ◽  
Young Modulus ◽  
Control Program ◽  
Interaction Force ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Force Curves ◽  
Probe Microscope

Предложена методика, оптимизирующая метод контактной силовой спектроскопии. С помощью макроязыка, интегрированного в программное обеспечение NOVA установки сканирующего зондового микроскопа Solver P47, был разработан алгоритм, позволяющий анализировать силовые кривые, не покидая его основного интерфейса. Апробация метода выполнена на образцах синтезированного полимера, поскольку одним из важнейших механических свойств, определяющим их спектр областей применения, является упругость. В работе получены локальные значения модуля Юнга на поверхности полимера методом контактной силовой спектроскопии с применением скрипта YUNG, разработанного с помощью макроязыка, интегрированного в программу управления сканирующего зондового микроскопа. Показано, что применение скрипта YUNG позволяет оптимизировать метод контактной силовой спектроскопии по поиску показателя степени γ, выбору модели для расчета силы взаимодействия для дальнейшего определения локального модуля Юнга. We propose a technique that optimizing the method of contact force spectroscopy. With the help of a macro language integrated into the NOVA software of the Solver P47 scanning probe microscope, an algorithm was developed that allows analyzing force curves without leaving its main interface. The approbation of the method was done on samples of synthesized polymer, since one of the most important mechanical properties determining their range of applications is elasticity. In this paper, local values of the Young's modulus on the polymer surface are obtained by the method of contact force spectroscopy using the YUNG script developed using a macro language integrated into the control program of a scanning probe microscope. It is shown that the use of the YUNG script makes it possible to optimize the method of contact force spectroscopy by searching for the exponent γ, choosing a model for calculating the interaction force for further determination of the local Young modulus.

Scanning-probe microscope analysis of optical thin films: A new analytical tool in a manufacturing environment

1994 ◽  
Vol 52 ◽  
pp. 1068-1069
Author(s):  
S. P. Sapers ◽  
R. Clark ◽  
P. Somerville
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Control ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
List Type ◽  
Manufacturing Environment ◽  
Physical Measurements ◽  
Probe Microscope

OCLI is a leading manufacturer of thin films for optical and thermal control applications. The determination of thin film and substrate topography can be a powerful way to obtain information for deposition process design and control, and about the final thin film device properties. At OCLI we use a scanning probe microscope (SPM) in the analytical lab to obtain qualitative and quantitative data about thin film and substrate surfaces for applications in production and research and development. This manufacturing environment requires a rapid response, and a large degree of flexibility, which poses special challenges for this emerging technology. The types of information the SPM provides can be broken into three categories:(1)Imaging of surface topography for visualization purposes, especially for samples that are not SEM compatible due to size or material constraints;(2)Examination of sample surface features to make physical measurements such as surface roughness, lateral feature spacing, grain size, and surface area;(3)Determination of physical properties such as surface compliance, i.e. “hardness”, surface frictional forces, surface electrical properties.

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