Development of a Lens Driving Maglev Actuator for Laser Beam Off-Axis Cutting and Deep Piercing

2012 ◽  
Vol 523-524 ◽  
pp. 774-779
Author(s):  
Dong Jue He ◽  
Tadahiko Shinshi ◽  
Takahiro Nakai

In laser beam cutting and laser piercing process, the machining speed and quality are very sensitive to the flow of assist gas and laser beam focusing position. In order not only to improve the cutting speed and the removal capability of the molten material and to save the consumption of the gas flow in laser beam cutting, but also to realize high speed piercing of high aspect-ratio holes, a magnetic-levitated (maglev) lens driving actuator was proposed and fabricated. The actuator can drive the lens to achieve real-time positioning control of the relative radial displacement between the lens axis and the assist gas jet nozzle axis (off-axis control) in radial directions in a range of ±1mm within 1.5 μm of tracking error and bandwidths more than 150Hz, and to achieve real-time positioning control of laser beam focusing point in axial direction in a range of ±5mm within 3 μm of tracking error and bandwidth more than 100Hz.

2011 ◽  
Vol 105-107 ◽  
pp. 630-634 ◽  
Author(s):  
Xian Wang ◽  
Jian Ping Tan ◽  
Ling Yun Quan ◽  
Xiao Le Cheng

On the basis of systematic study on the existing measurement methods of multi-degrees-of-freedom, A real-time monitoring method for five-degrees-of-freedom of the extruder’s moving parts was proposed based on laser beam measurement reference and machine vision. Simultaneously measuring multi-degrees-of-freedom is implemented by two-collimated laser beam and three-point measurement in this method, laser dispersion technology is used for several measuring points using the same basis simultaneously, the baseline errors are initial adjusted and real-time monitored, the method of machine vision is used for precise extraction of the position signals. Position signals are collected and selected by a Charge Coupled Device (CCD) sensor and a high speed Digital Signal Processor (DSP), long-distance propagation and reconciliation of multi-channel data is implemented by an industrial Ethernet. Experiments indicated the method is effective and steady.


2018 ◽  
Vol 941 ◽  
pp. 1404-1410
Author(s):  
Irmela Burkhardt ◽  
Volker Ventzke ◽  
Stefan Riekehr ◽  
Nikolai Kashaev ◽  
Josephin Enz

Ti6Al2Sn4Zr2Mo exhibits improved oxidation and creep properties compared to Ti6Al4V. Laser beam welding (LBW) is an approved process to receive narrow weld seams at high welding speeds with low heat input. Almost distortion free complex shaped structures can be joined with optimal parameters. For the optimisation of the LBW process the most relevant parameters are the welding speed, the laser input power and the gas shielding strategy. Using a fibre laser, the laser radiation is attenuated by a welding plume the so-called metal-vapour cloud (MVC). The MVC has a large influence on the laser input power. Therefore, an approach for reducing the MVC by optimising the shielding strategy using an additional gas flow in opposite welding direction is examined. Utilizing high-speed camera records, the effectiveness of the approach is assessed. Welded samples are evaluated by visual and radiographic inspection, metallographic assessment as well as microhardness measurements with regard to weld seam geometry, defects, microstructure and local mechanical properties. The obtained results are correlated to the used laser welding parameters.


1997 ◽  
Author(s):  
Makoto Tsubota ◽  
Nobuhito An-naka ◽  
Yukio Tomita

2012 ◽  
Vol 132 (3) ◽  
pp. 347-356 ◽  
Author(s):  
Yuta Nabata ◽  
Tatsuya Nakazaki ◽  
Tokoku Ogata ◽  
Kiyoshi Ohishi ◽  
Toshimasa Miyazaki ◽  
...  

1995 ◽  
Author(s):  
Rod Clark ◽  
John Karpinsky ◽  
Gregg Borek ◽  
Eric Johnson
Keyword(s):  

Author(s):  
Frank S. Arnold

Abstract To be better prepared to use laser based failure isolation techniques on field failures of complex integrated circuits, simple test structures without any failures can be used to study Optical Beam Induced Resistance Change (OBIRCH) results. In this article, four case studies are presented on the following test structures: metal strap, contact string, VIA string, and comb test structure. Several experiments were done to investigate why an OBIRCH image was seen in certain areas of a VIA string and not in others. One experiment showed the OBRICH variation was not related to the cooling and heating effects of the topology, or laser beam focusing. A 4 point probe resistance measurement and cross-sectional views correlated with the OBIRCH results and proved OBIRCH was able to detect a variation in VIA fabrication.


Author(s):  
Kenneth Krieg ◽  
Richard Qi ◽  
Douglas Thomson ◽  
Greg Bridges

Abstract A contact probing system for surface imaging and real-time signal measurement of deep sub-micron integrated circuits is discussed. The probe fits on a standard probe-station and utilizes a conductive atomic force microscope tip to rapidly measure the surface topography and acquire real-time highfrequency signals from features as small as 0.18 micron. The micromachined probe structure minimizes parasitic coupling and the probe achieves a bandwidth greater than 3 GHz, with a capacitive loading of less than 120 fF. High-resolution images of submicron structures and waveforms acquired from high-speed devices are presented.


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