Chemical Composition Analysis of TiAlBN Nanocomposite Coating Deposited via RF Magnetron Sputtering

2013 ◽  
Vol 594-595 ◽  
pp. 551-555 ◽  
Author(s):  
Zulkifli Mohd Rosli ◽  
Zainab Mahamud ◽  
Wai Loon Kwan ◽  
Jariah Mohamad Juoi ◽  
K.T. Lau
Keyword(s):  
Chemical Composition ◽  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Boron Concentration ◽  
Rf Magnetron Sputtering ◽  
Nanocomposite Coating ◽  
Composition Analysis ◽  
Chemical Compositions ◽  
Aisi 316 ◽  
Substrate Temperatures

TiAlBN nanocomposite coating have been successfully deposited on AISI 316 substrate via RF magnetron sputtering by varying nitrogen-to-total flow ratio (RN) of 5, 15, 20, 25%, as well as varying substrate temperature of 100, 200, 300, and 400 oC; using single Ti-Al-BN hot-pressed target. Chemical compositions of the coatings were analysed using X-ray photoelectron spectroscopy (XPS). XPS results showed that the TiAlBN nanocomposite coating reaches a nitride saturated state at higher RN(e.g 15, 20, and 25%) and boron concentration was found to be approximately 9 at.%. However, as the concentration of nitrogen decreases at lower RN(5%), boron concentration was found to increase to 16.17 at. %.This is due to the increase of TiB2phase in the coating. Variations of substrate temperatures were found to give no significant effect on the chemical composition of the deposited TiAlBN nanocomposite coating.

Characterization of TiAlBN Nanocomposite Coating Deposited via Radio Frequency Magnetron Sputtering Using Single Hot-Pressed Target

2012 ◽  
Vol 626 ◽  
pp. 298-301 ◽  
Author(s):  
Zulkifli Mohd Rosli ◽  
Kwan Wai Loon ◽  
Jariah Mohd Juoi ◽  
Nayan Nafarizal ◽  
Zainab B. Mahamud ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Bias Voltage ◽  
Photoelectron Spectroscopy ◽  
Rf Magnetron Sputtering ◽  
Deposition Process ◽  
Nanocomposite Coating ◽  
Test Method ◽  
X Ray ◽  
Excellent Adhesion

TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and-150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al)N phase was identified. In addition, the existence of BN and TiB2amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis. Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti,Al)N/a-BN/a-TiB2nanocomposite. On the other hand, it was found that optimum bias voltage used in present study is-60 V where the deposited TiAlBN coating exhibits an excellent adhesion quality. The adhesion quality of the coatings deposited at-60V bias voltage is classified as HF 1 evaluated using the Rockwell-C adhesion test method (developed by the Union of German Engineers).

Effect of Nitrogen-to-Total Gas Flow Ratio on the Nanocomposite TiAlBN Coating

2015 ◽  
Vol 761 ◽  
pp. 431-435
Author(s):  
Zulkifli Rosli ◽  
Wai Loon Kwan ◽  
Mohd Warikh Ab Rashid ◽  
Jariah Mohd Juoi ◽  
Nayan Nafarizal
Keyword(s):  
Grain Size ◽  
Photoelectron Spectroscopy ◽  
Gas Flow ◽  
Boron Concentration ◽  
Rf Magnetron Sputtering ◽  
Crystallographic Structure ◽  
Chemical Compositions ◽  
Flow Ratio ◽  
X Ray ◽  
Gas Flow Ratio

A nanocomposite TiAlBN (n-TiAlBN) coating has been successfully deposited via RF magnetron sputtering by varying the nitrogen-to-total gas flow ratio (RN) at a substrate temperature of 300 °C. The coating was deposited on AISI 316 substrates using a single Ti-Al-BN hot-pressed target. The crystal phases, grain size and chemical composition of the coatings were measured using the glancing angle X-ray diffraction analysis (GAXRD) and X-ray photoelectron spectroscopy (XPS). The grains size of the n-TiAlBN coating was found to be within the range of 3.5 to 5.7 nm calculated using Scherrer’s formula. The n-TiAlBN coating reached a nitride saturated state at a higher RN (e.g >15%) with the amount of boron concentration to be around 9 at. %. Further, reducing the RN (e.g. 5%) has increased the boron concentration to 16.17 at. %. This paper shows that by carefully control the nitrogen-to-total gas flow ratio (RN) in the n-TiAlBN coating, it indeed gives a significant effect on its crystallographic structure, grain size, and chemical compositions.

The piezoresistive properties research of SiC thin films prepared by RF magnetron sputtering

2019 ◽  
Vol 33 (15) ◽  
pp. 1950152 ◽  
Author(s):  
Jing Wu ◽  
Xiaofeng Zhao ◽  
Chunpeng Ai ◽  
Zhipeng Yu ◽  
Dianzhong Wen
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Cantilever Beam ◽  
Photoelectron Spectroscopy ◽  
Film Surface ◽  
Rf Magnetron Sputtering ◽  
Micro Electro Mechanical System ◽  
Gauge Factor ◽  
X Ray ◽  
Sputtering Power

To research the piezoresistive properties of SiC thin films, a testing structure consisting of a cantilever beam, SiC thin films piezoresistors and a Cr/Pt electrode is proposed in this paper. The chips of testing structure were fabricated by micro-electro-mechanical system (MEMS) technology on a silicon wafer with [Formula: see text]100[Formula: see text] orientation, in which SiC thin films were deposited by using radio-frequency (13.56 MHz) magnetron sputtering method. The effect of sputtering power, annealing temperature and time on the microstructure and morphology of the SiC thin films were investigated by the X-ray diffraction (XRD) and scanning electron microscopy (SEM). It indicates that a good continuity and uniform particles on the SiC thin film surface can be achieved at sputtering power of 160 W after annealing. To verify the existence of Si–C bonds in the thin films, X-ray photoelectron spectroscopy (XPS) was used. Meanwhile, the piezoresistive properties of SiC thin films piezoresistors were measured using the proposed cantilever beam. The test result shows that it is possible to achieve a gauge factor of 35.1.

Application of V2O5 in Thin Film Microbatteries Prepared by RF Magnetron Sputtering

2009 ◽  
Vol 79-82 ◽  
pp. 931-934 ◽  
Author(s):  
Liang Tang Zhang ◽  
Jie Song ◽  
Quan Feng Dong ◽  
Sun Tao Wu
Keyword(s):  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Unit Area ◽  
Rf Magnetron Sputtering ◽  
Micro Electro Mechanical System ◽  
X Ray Diffraction ◽  
X Ray ◽  
Mems Technology ◽  
Surface Morphologies ◽  
Sputtering System

The polycrystalline V2O5 films as the anode in V2O5 /LiPON /LiCoO2 lithium microbattary were prepared by RF magnetron sputtering system. The V2O5 films’ crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500μm×500μm, and the thickness of V2O5, LiPON and LiCoO2 films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36μAhcm-2μm-1 and 9.63μAhcm-2μm-1 after 40 cycles.

scholarly journals Research on NDT Technology in Inference of Steel Member Strength Based on Macro/Micro Model

2017 ◽  
Vol 2017 ◽  
pp. 1-11
Author(s):  
Beidou Ding ◽  
Naiqiang Xiao ◽  
Shuxun Zhang ◽  
Yong Wang
Keyword(s):  
Grain Size ◽  
Regression Analysis ◽  
Chemical Composition ◽  
Carbon Steel ◽  
Quantitative Relationship ◽  
Engineering Practice ◽  
Composition Analysis ◽  
Chemical Compositions ◽  
Steel Strength ◽  
Tension Properties

In consideration of correlations among hardness, chemical composition, grain size, and strength of carbon steel, a new nondestructive testing technology (NDT) of inferring the carbon steel strength was explored. First, the hardness test, chemical composition analysis, and metallographic analysis of 162 low-carbon steel samples were conducted. Second, the following works were carried out: (1) quantitative relationship between steel Leeb hardness and carbon steel strength was studied on the basis of regression analysis of experimental data; (2) influences of chemical composition and grain size on tension properties of carbon steel were analyzed on the basis of stepwise regression analysis, and quantitative relationship between conventional compositions and grain size with steel strength was obtained; (3) according to the macro and/or micro factors such as hardness, chemical compositions, and grain size of carbon steel, the fitting formula of steel strength was established based on MLR (multiple linear regressions) method. The above relationships and fitting formula based on MLR method could be used to estimate the steel strength with no damage to the structure in engineering practice.

Synthesis and Characterization of Nb-Doped TiO2 Thin Films Prepared by RF Magnetron Sputtering

2015 ◽  
Vol 1117 ◽  
pp. 139-142 ◽  
Author(s):  
Marius Dobromir ◽  
Radu Paul Apetrei ◽  
A.V. Rogachev ◽  
Dmitry L. Kovalenko ◽  
Dumitru Luca
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Rf Magnetron Sputtering ◽  
X Ray ◽  
Force Microscopy ◽  
Glass Substrates ◽  
Atomic Force ◽  
Vis Spectroscopy ◽  
Diffraction Patterns

Amorphous Nb-doped TiO2 thin films were deposited on (100) Si and glass substrates at room temperature by RF magnetron sputtering and a mosaic-type Nb2O5-TiO2 sputtering target. To adjust the amount of the niobium dopant in the film samples, appropriate numbers of Nb2O5 pellets were placed on the circular area of the magnetron target with intensive sputtering. By adjusting the discharge conditions and the number of niobium oxide pellets, films with dopant content varying between 0 and 16.2 at.% were prepared, as demonstrated by X-ray photoelectron spectroscopy data. The X-ray diffraction patterns of the as-deposited samples showed the lack of crystalline ordering in the samples. Surfaces roughness and energy band gap values increase with dopant concentration, as showed by atomic force microscopy and UV-Vis spectroscopy measurements.

scholarly journals Investigation of the Resistance and Sensitivity of Infectious Bacteria to Dendrostellera lessertii and Chemical Composition Analysis

2021 ◽  
Vol 6 (1) ◽  
pp. 30-36
Author(s):  
Mostafa Alamholo
Keyword(s):  
Chemical Composition ◽  
Methanolic Extract ◽  
Antibacterial Properties ◽  
Gas Chromatography Mass Spectrometry ◽  
Total Phenolic ◽  
Dilution Method ◽  
Composition Analysis ◽  
Chemical Compositions ◽  
Root Extract ◽  
Chemical Composition Analysis

Introduction: Herbal plants are important sources for finding new and rare products of medicinal value for drug development. The present research aimed to investigate the antibacterial properties of Dendrostellera lessertii against infectious bacteria and analyze its chemical composition. Methods: The different organs comprising root, stem, and leaf of D. lessertii from Lorestan province, Iran, were tested. Antibacterial activity was assessed using the agar well-diffusion assay. The total phenolic content (TPC) and total flavonoid content (TFC) were assessed by the Folin Ciocalteu and aluminum chloride methods, respectively. Minimum inhibitory concentration (MIC) and minimum bactericidal concentration (MBC) were tested by the serial dilution method, and chemical compositions were analyzed by gas chromatography-mass spectrometry (GC/MS). Results: The chemical composition analysis showed the dominance of bergamotol (10.62%) and bis (2-ethylhexyl) phthalate (7.49%) in the stem extract. However, phytol (12.64%) and E-11-hexadecenal (12.53%) were major constituents in the root extract. Furthermore, major constituents in the leaf extract were phytol (19.658%) and hexadecanoic acid (7.151%). The methanolic extract of root exhibited the highest TPC as 109.1±2.2 mgGA/g and TFC as 2.1±0.33 mgQ/g. The root methanolic extract demonstrated a MIC of 3.125 mg/mL against Enterococcus faecalis. Accordingly, the highest sensitivity and resistance were observed on E. faecalis and Pseudomonas aeruginosa, respectively. Conclusion: Dendrostellera lessertii extract is suggested as a source for antimicrobial drugs, especially to treat bacterial infections.

Sign in / Sign up

Export Citation Format

Share Document