Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications
Keyword(s):
Uv Light
◽
This paper presents the fabrication and optical characterization of an ultrathin 3C-SiC membrane for UV light detection. SiC nanoscale film was grown on Si substrate and subsequently released to form a robust membrane with a high aspect ratio of about 5000. Transmission measurements were performed to determine the thickness of the film with a high accuracy of 98%. We also employed a simple and highly effective direct wirebonding technique to form electrical contacts to the SiC membrane. The considerable change in the photocurrent of the SiC membrane was observed under UV illumination, indicating the potential of using 3C-SiC membranes for UV detection.
1996 ◽
Vol 14
(3)
◽
pp. 2275
◽
1994 ◽
Vol 25
(1)
◽
pp. 53-59
◽
2007 ◽
Vol 253
(15)
◽
pp. 6499-6503
◽
Keyword(s):
ALE growth and optical characterization of ZnSe/ZnS strained quantum well structures on Si substrate
2001 ◽
Vol 223
(3)
◽
pp. 369-375
◽
Keyword(s):
2013 ◽
Vol 22
◽
pp. 452-457
◽