Synchrotron X-Ray Topographic Studies of Recombination Activated Shockley Partial Dislocations in 4H-Silicon Carbide Epitaxial Layers
2008 ◽
Vol 600-603
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pp. 357-360
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Electron-hole recombination activated Shockley partial dislocations bounding expanding stacking faults and their interactions with threading dislocations have been studied in 4H-SiC epitaxial layers using synchrotron x-ray topography. The bounding partials appear as white stripes or narrow dark lines in back-reflection X-ray topographs recorded using the basal plane reflections. Such contrast variations are attributable to the defocusing/focusing of the diffracted X-rays due to the edge component of the partial dislocations, which creates a convex/concave distortion of the basal planes. Simulation results based on the ray-tracing principle confirm our argument. The sign of the partial dislocations can be subsequently determined.
2009 ◽
Vol 615-617
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pp. 719-722
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Keyword(s):
2018 ◽
Vol 32
(17)
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pp. 1850185
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2012 ◽
Vol 583
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pp. 86-90
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1996 ◽
Vol 116
(1-4)
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pp. 191-194
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