Techniques for the Dry Transfer of Epitaxial Graphene onto Arbitrary Substrates
2010 ◽
Vol 645-648
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pp. 633-636
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Keyword(s):
Epitaxial graphene (EG) grown on the carbon-face of SiC has been shown to exhibit high carrier mobilities, in comparison to other growth techniques amenable to wafer-scale graphene fabrication. The transfer of large area (>mm2) graphene films to substrates amenable for specific applications is desirable. We demonstrate the dry transfer of EG from the C-face of 4H-SiC onto SiO2, GaN and Al2O3 substrates via two approaches using either 1) thermal release tape or 2) a spin-on, chemically-etchable dielectric. We will report on the impact that these transfer processes has upon the electrical properties of the transferred EG films.
Keyword(s):
Keyword(s):
2014 ◽
Vol 2
(30)
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pp. 6048-6055
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2020 ◽
Vol 90
(3)
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pp. 30502
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Keyword(s):
2012 ◽
Vol 717-720
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pp. 641-644