Reduction in the Density of Interface States at the SiO2/4H-SiC Interface after Dry Oxidation in the Presence of Potassium
2011 ◽
Vol 679-680
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pp. 334-337
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Keyword(s):
We report a strong reduction in the density of near-interface traps (NITs) at the SiO2/4H-SiC interface after dry oxidation in the presence of potassium. This is accompanied by a significant enhancement of the oxidation rate. The results are in line with recent investigations of the effect of sodium on oxidation of 4H-SiC. It is evident that both alkali metals enhance the oxidation rate of SiC and strongly influence the energy distribution of interface states.
Keyword(s):
2012 ◽
Vol 717-720
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pp. 761-764
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Keyword(s):
2000 ◽
Vol 338-342
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pp. 1069-1072
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Keyword(s):
1989 ◽
Vol 7
(5)
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pp. 1096
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