Traps at the SiC/SiO2-Interface
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ABSTRACTThe density of interface states Dit at SiC/SiO2 interfaces of different SiC polytypes (4H-, 6H- and 15R-SiC) is monitored and the origin of these states is discussed. The hydrogenation behavior of interface states in the temperature range from 250°C to 1000°C is studied by C-V and G-V investigations. The strong increase of Dit close to the 4H-SiC conduction band is attributed to defects located in the oxide (so-called “Near Interface Traps”).
2011 ◽
Vol 679-680
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pp. 334-337
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2000 ◽
Vol 338-342
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pp. 1069-1072
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2012 ◽
Vol 717-720
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pp. 761-764
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2005 ◽
Vol 483-485
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pp. 559-562
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1989 ◽
Vol 7
(5)
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pp. 1096
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