4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions

2011 ◽  
Vol 679-680 ◽  
pp. 55-58 ◽  
Author(s):  
Birgit Kallinger ◽  
Bernd Thomas ◽  
Patrick Berwian ◽  
Jochen Friedrich ◽  
Gerd Trachta ◽  
...  
Keyword(s):  
Growth Process ◽  
Screw Dislocations ◽  
Force Microscopy ◽  
Step Flow ◽  
Homoepitaxial Growth ◽  
Atomic Force ◽  
P Type ◽  
Step Flow Growth ◽  
Edge Dislocations ◽  
Doping Range

Homoepitaxial growth on 4° off-axis substrates with different off-cut directions, i.e. [11-20] and [1-100], was investigated using a commercial CVD reactor. The characteristics of the growth process on substrates with different off-cut directions were determined with respect to applicable C/Si ratio, growth rate and n- and p-type doping range. Stable step flow growth was achieved over a broad range of C/Si ratio at growth rates ~ 15 µm/h in both cases. The n-type doping level of epilayers can be controlled at least in the range from 5  1014 cm-3 to 3  1017 cm-3 on both types of substrates. Highly p-type epilayers with p = 2  1019 cm-3 can also be grown on [1-100] off-cut substrates. Hence, the growth process for standard substrates was successfully transferred to [1-100] off-cut substrates resulting in epilayers with similar doping levels. The dislocation content of the grown epilayers was investigated by means of defect selective etching (DSE) in molten KOH. For both off-cut directions of the substrates, similar densities of threading edge dislocations (TED), threading screw dislocations (TSD) and basal plane dislocations (BPD) were found in the epilayers. Epilayers with very low BPD density can be grown on both kinds of substrates. The remaining BPDs in epilayers are inclined along the off-cut direction of the substrate. The surface morphology and roughness was investigated by atomic force microscopy (AFM). The epilayers grown on [1-100] off-cut substrates are smoother than those on standard substrates.

Development of Cross-Hatch Morphology During Growth of Lattice Mismatched Layers

2001 ◽  
Vol 673 ◽  
Author(s):  
A. Maxwell Andrews ◽  
J.S. Speck ◽  
A.E. Romanov ◽  
M. Bobeth ◽  
W. Pompe
Keyword(s):  
Misfit Dislocation ◽  
Film Growth ◽  
Strain Relaxation ◽  
Dislocation Generation ◽  
Force Microscopy ◽  
Step Flow ◽  
Atomic Force ◽  
Subsequent Step ◽  
Step Flow Growth ◽  
Lateral Scale

ABSTRACTAn approach is developed for understanding the cross-hatch morphology in lattice mismatched heteroepitaxial film growth. It is demonstrated that both strain relaxation associated with misfit dislocation formation and subsequent step elimination (e.g. by step-flow growth) are responsible for the appearance of nanoscopic surface height undulations (0.1-10 nm) on a mesoscopic (∼100 nm) lateral scale. The results of Monte Carlo simulations for dislocation- assisted strain relaxation and subsequent film growth predict the development of cross-hatch patterns with a characteristic surface undulation magnitude ∼50 Å in an approximately 70% strain relaxed In0.25Ga0.75As layers. The model is supported by atomic force microscopy (AFM) observations of cross-hatch morphology in the same composition samples grown well beyond the critical thickness for misfit dislocation generation.

The Initial Stages of Growth of Ordered GaInP and GaInAs Grown by Metal Organic Vapor Phase Epitaxy

1999 ◽  
Vol 583 ◽  
Author(s):  
M. C. Hanna ◽  
A. Mascarenhas ◽  
Hyeonsik M. Cheong
Keyword(s):  
Raman Spectroscopy ◽  
Atomic Force Microscopy ◽  
Direct Evidence ◽  
Force Microscopy ◽  
Step Flow ◽  
Organic Vapor ◽  
Stages Of Growth ◽  
Atomic Force ◽  
Metal Organic ◽  
Step Flow Growth

AbstractWe have used atomic force microscopy (AFM) and Raman spectroscopy to investigate the development of the surface morphology of (001) direct and vicinal GaInP and GaInAs grown under conditions to produce strong CUPtB ordering. Raman spectroscopy provided direct evidence of CuPtB ordering in layers as thin as 10 nm for GaInP and 5 nm for GaInAs. We find that the morphology of GaInP and GaInAs on (001)6B substrates consists of ridges, which are aligned predominately along the [110] direction (A-direction). These ridges are well developed even at layer thicknesses of 2 nm, and their sides consist of step-bunches and near (001) terraces. On (001) direct substrates, the GaInP morphology is similar to that obtained on 6B substrates, although the step bunches have no preferential orientation, while GaInAs (001) growth proceeds by a combination of 2D-island and step flow growth. We discuss possible reasons for the differences in the morphology of ordered GaInP and GaInAs. The results of this work suggest it may be difficult to produce abrupt heterointerfaces in structures containing ordered GalnP and GaInAs alloys.

HVPE and MOVPE GaN Growth on Slightly Misoriented Sapphire Substrates

1999 ◽  
Vol 595 ◽  
Author(s):  
Olivier Parillaud ◽  
Volker Wagner ◽  
Hans-Jörg Bühlmann ◽  
François Lelarge ◽  
Marc Ilegems
Keyword(s):  
Substrate Surface ◽  
Growth Conditions ◽  
X Ray Diffraction ◽  
X Ray ◽  
Force Microscopy ◽  
Step Flow ◽  
Sapphire Substrates ◽  
Atomic Force ◽  
Step Flow Growth ◽  
Gan Buffer Layer

AbstractWe present preliminary results on gallium nitride growth by HVPE on C-plane sapphire with 2, 4 and 6 degrees misorientation towards M and A directions. A nucleation GaN buffer layer is deposited prior the growth by MOVPE. Surface morphology and growth rates are compared with those obtained on exact C-plane oriented sapphire, for various growth conditions. As expected, the steps already present on the substrate surface help to initiate a directed step-flow growth mode. The large hillocks, which are typical for HVPE GaN layers on (0001) sapphire planes, are replaced by more or less parallel macro-steps. The width and height of these steps, due to step bunching effect, depend directly on the angle of misorientation and on the growth conditions, and are clearly visible by optical or scanning electron microscopy. Atomic force microscopy and X-ray diffraction measurements have been carried out to quantify the surface roughness and crystal quality.

Atomic Force Microscopy Study of GaN Grown on Al2O3(0001) by LP-MOVPE

2000 ◽  
Vol 639 ◽  
Author(s):  
K. Xu ◽  
D. H. Lim ◽  
B. L. Liu ◽  
X. L. Du ◽  
G. H. Yu ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Growth Temperature ◽  
Spiral Growth ◽  
Initial Growth ◽  
Growth Mechanisms ◽  
Remarkable Effect ◽  
Force Microscopy ◽  
Step Flow ◽  
Atomic Force ◽  
Step Flow Growth

ABSTRACTThere is currently a high degree of interest in understanding the diverse mechanisms that determine the growth morphology of epitaxial films. To understand and control over these mechanisms, it is essential to know how the growth mechanisms are correlated with morphologies. In GaN MOVPE processes, growth temperature has a remarkable effect on the film morphologies and properties. In present work, the temperature dependency of surface morphology of GaN epilayers grown by low-pressure metal-organic vapor phase epitaxy (LP-MOVPE) was studied using atomic force microscopy. It was demonstrated that dislocations strongly influence the growth mechanisms and the morphology of the films. Three growth modes were identified at different growth temperature ranged from 1030°C to 1100°C, which are, (1) spiral growth dominated by dislocation with screw type, (2) monolayer step flow, and (3) nucleation-assisted step flow growth. The significant effect of dislocation on the surface morphologies and growth mechanisms may be attributed to the high dislocation density and higher activation energy for a step overcoming the dislocation pinning in GaN. Because few dislocations will be introduced under monolayer step flow growth mode, we can infer the useful information about GaN initial growth.

scholarly journals HVPE and MOVPE GaN growth on slightly misoriented sapphire substrates

2000 ◽  
Vol 5 (S1) ◽  
pp. 124-130 ◽  
Author(s):  
Olivier Parillaud ◽  
Volker Wagner ◽  
Hans-Jörg Bühlmann ◽  
François Lelarge ◽  
Marc Ilegems
Keyword(s):  
Substrate Surface ◽  
Growth Conditions ◽  
X Ray Diffraction ◽  
X Ray ◽  
Force Microscopy ◽  
Step Flow ◽  
Sapphire Substrates ◽  
Atomic Force ◽  
Step Flow Growth ◽  
Gan Buffer Layer

We present preliminary results on gallium nitride growth by HVPE on C-plane sapphire with 2, 4 and 6 degrees misorientation towards M and A directions. A nucleation GaN buffer layer is deposited prior the growth by MOVPE. Surface morphology and growth rates are compared with those obtained on exact C-plane oriented sapphire, for various growth conditions. As expected, the steps already present on the substrate surface help to initiate a directed step-flow growth mode. The large hillocks, which are typical for HVPE GaN layers on (0001) sapphire planes, are replaced by more or less parallel macro-steps. The width and height of these steps, due to step bunching effect, depend directly on the angle of misorientation and on the growth conditions, and are clearly visible by optical or scanning electron microscopy. Atomic force microscopy and X-ray diffraction measurements have been carried out to quantify the surface roughness and crystal quality.

ANNEALING TIME EFFECT ON NANOSTRUCTURED n-ZnO/p-Si HETEROJUNCTION PHOTODETECTOR PERFORMANCE

2015 ◽  
Vol 22 (02) ◽  
pp. 1550027 ◽  
Author(s):  
NADIR. F. HABUBI ◽  
RAID. A. ISMAIL ◽  
WALID K. HAMOUDI ◽  
HASSAM. R. ABID
Keyword(s):  
Annealing Time ◽  
Silicon Substrates ◽  
X Ray Diffraction ◽  
Zno Nps ◽  
Force Microscopy ◽  
Atomic Force ◽  
Junction Type ◽  
P Type ◽  
Quartz Substrates ◽  
Two Peaks

In this work, n- ZnO /p- Si heterojunction photodetectors were prepared by drop casting of ZnO nanoparticles (NPs) on single crystal p-type silicon substrates, followed by (15–60) min; step-annealing at 600∘C. Structural, electrical, and optical properties of the ZnO NPs films deposited on quartz substrates were studied as a function of annealing time. X-ray diffraction studies showed a polycrystalline, hexagonal wurtizte nanostructured ZnO with preferential orientation along the (100) plane. Atomic force microscopy measurements showed an average ZnO grain size within the range of 75.9 nm–99.9 nm with a corresponding root mean square (RMS) surface roughness between 0.51 nm–2.16 nm. Dark and under illumination current–voltage (I–V) characteristics of the n- ZnO /p- Si heterojunction photodetectors showed an improving rectification ratio and a decreasing saturation current at longer annealing time with an ideality factor of 3 obtained at 60 min annealing time. Capacitance–voltage (C–V) characteristics of heterojunctions were investigated in order to estimate the built-in-voltage and junction type. The photodetectors, fabricated at optimum annealing time, exhibited good linearity characteristics. Maximum sensitivity was obtained when ZnO / Si heterojunctions were annealed at 60 min. Two peaks of response, located at 650 nm and 850 nm, were observed with sensitivities of 0.12–0.19 A/W and 0.18–0.39 A/W, respectively. Detectivity of the photodetectors as function of annealing time was estimated.

Bi induced step-flow growth in the homoepitaxial growth of Au(111)

2005 ◽  
Vol 252 (2) ◽  
pp. 364-371 ◽  
Author(s):  
M. Kamiko ◽  
H. Mizuno ◽  
H. Chihaya ◽  
J.-H. Xu ◽  
I. Kojima ◽  
...  
Keyword(s):  
Step Flow ◽  
Homoepitaxial Growth ◽  
Step Flow Growth

scholarly journals Surface Morphology and Microstructure Evolution of Single Crystal Diamond during Different Homoepitaxial Growth Stages

Materials ◽  
2021 ◽  
Vol 14 (20) ◽  
pp. 5964
Author(s):  
Guoqing Shao ◽  
Juan Wang ◽  
Shumiao Zhang ◽  
Yanfeng Wang ◽  
Wei Wang ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Single Crystal ◽  
Cross Section ◽  
Growth Model ◽  
Diamond Growth ◽  
Step Flow ◽  
Homoepitaxial Growth ◽  
Diamond Substrate ◽  
Single Crystal Diamond ◽  
Step Flow Growth

Homoepitaxial growth of step-flow single crystal diamond was performed by microwave plasma chemical vapor deposition system on high-pressure high-temperature diamond substrate. A coarse surface morphology with isolated particles was firstly deposited on diamond substrate as an interlayer under hillock growth model. Then, the growth model was changed to step-flow growth model for growing step-flow single crystal diamond layer on this hillock interlayer. Furthermore, the surface morphology evolution, cross-section and surface microstructure, and crystal quality of grown diamond were evaluated by scanning electron microscopy, high-resolution transmission electron microcopy, and Raman and photoluminescence spectroscopy. It was found that the surface morphology varied with deposition time under step-flow growth parameters. The cross-section topography exhibited obvious inhomogeneity in crystal structure. Additionally, the diamond growth mechanism from the microscopic point of view was revealed to illustrate the morphological and structural evolution.

Electrical Properties of Hydrogen Intercalated Epitaxial Graphene/SiC Interface Investigated by Nanoscale Current Mapping

2015 ◽  
Vol 821-823 ◽  
pp. 929-932 ◽  
Author(s):  
Filippo Giannazzo ◽  
Stefan Hertel ◽  
Andreas Albert ◽  
Gabriele Fisichella ◽  
Antonino La Magna ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Barrier Height ◽  
Free Standing ◽  
Conductive Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
P Type ◽  
Micrometer Scale ◽  
Contact Size ◽  
Step Edges

The electrical properties of the interface between quasi free standing bilayer graphene (QFBLG) and SiC(0001) have been investigated by nanoscale resolution current measurements using conductive atomic force microscopy (CAFM). I-V analyses were carried out on Au-capped QFBLG contacts with different sizes (from 200 down to 0.5 μm) fabricated on SiC samples with different miscut angles (from on-axis to 3.5° off-axis). The extracted QFBLG/SiC Schottky barrier height (SBH) was found to depend on the contact size. SBH values ∼0.9-1 eV were obtained for large contacts, whereas a gradual increase was observed below a critical (micrometer scale) contact size (depending on the SiC miscut angle) up to values approaching ∼1.5 eV. Nanoscale resolution current mapping on bare QFLBG contacts revealed that SiC step edges and facets represent preferential current paths causing the effective SBH lowering for larger contacts. The reduced barrier height in these regions can be explained in terms of a reduced doping of QFBLG from SiC substrate at (11-20) step edges with respect to the p-type doping on the (0001) terraces.

Laser cleaning of exfoliated graphene

2012 ◽  
Vol 1455 ◽  
Author(s):  
Oliver Ochedowski ◽  
Benedict Kleine Bußmann ◽  
Marika Schleberger
Keyword(s):  
Local Heating ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Ambient Conditions ◽  
Kelvin Probe ◽  
Structural Modifications ◽  
Force Microscopy ◽  
Exfoliated Graphene ◽  
Atomic Force ◽  
P Type

ABSTRACTWe have employed atomic force and Kelvin-Probe force microscopy to study graphene sheets exfoliated on TiO2 under the influence of local heating achieved by laser irradiation. Exfoliation and irradiation took place under ambient conditions, the measurements were performed in ultra high vacuum. We show that after irradiation times of 6 min, an increase of the surface potential is observed which indicates a decrease of p-type carrier concentration. We attribute this effect to the removal of adsorbates like water and oxygen. After irradiation times of 12 min our topography images reveal severe structural modifications of graphene. These resemble the nanocrystallite network which form on graphene/SiO2 but after much longer irradiation times. From our results we propose that short laser heating at moderate powers might offer a way to clean graphene without inducing unwanted structural modifications.

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