Dose Characteristics of Multilayer Chitosan-Metal-Dielectric Nanostructures for Electronic Nanolithography
2015 ◽
Vol 245
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pp. 195-199
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Keyword(s):
This paper presents the results of the study of chitosan-metal nanofilms for the formation of submicron structures on glass substrates by electron lithography. The dependence of their basic lithographic characteristics from the selection of the metal for intermediate layer is obtained.
2015 ◽
Vol 4
(1)
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pp. 85-90
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Keyword(s):
2017 ◽
Vol 7
(10)
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pp. 1713-1720
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Keyword(s):
1997 ◽
Vol 11
(02n03)
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pp. 87-92
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Keyword(s):