Optimized ECD Cu RDL Process with Via Filling Capability for Next Generation Packaging

2019 ◽  
Vol 2019 (1) ◽  
pp. 000046-000050
Author(s):  
Ralf Schmidt

Abstract Next generation mobile devices, especially those with 5G capability, will require higher functionality and speed in combination with shrinking component as well as package dimensions. These requirements pose challenges to upcoming heterogeneous integration. In order to account for the increasingly complex technologies, filling of vias with copper will be required for packaging of the various components. Examples for such via filling applications include next generation radio frequency (RF) filters and multilayer redistribution layers (RDLs). However, the size scales of these applications vary from 100 μm to sub 5 μm. In addition to via filling of different dimensions and aspect ratios, the copper electrodeposition process is also supposed to be able to plate lines and pads within the RDLs. A combination of electrochemical and spectroscopic experiments was applied to optimize organic plating additives with respect to their suitability to deposit copper into this broad variety of structures.

Author(s):  
Maria P. Larionova ◽  
Nina D. Solovieva ◽  
Elena A. Savelieva

It is studied the regeneration and utilization possibility of spent nitric acid solutions for copper and its alloys etching for the creating an environmentally clean closed-cycle production of regenerated electrolytes. It is established that some difficulties arise when using the electrochemical method in the regeneration process of these solutions: during copper electrodeposition from spent copper-containing nitric acid solutions, nitric acid decomposes with vigorous evolution of nitrogen dioxide, which prevents copper ions reduction. In order to suppress the side process, it was proposed to partially neutralize the solution, not reaching the pH of copper hydration (pH 4-5). It is revealed that a decrease in the concentration of metal cations occurs due to partial neutralization of the nitric acid contained in the solution by concentrated alkali solution. The pulsed electrolysis mode was used to increase the efficiency of the metal ions electrodeposition process from dilute solutions. It is established that the using of pulsed electrolysis can reduce diffusion difficulties that arise in a dilute spent nitric acid copper-containing solution, thereby intensify the process of copper electrodeposition. It is showed that the prospects of using ultrasound to increase the rate of the copper electrodeposition process and improve the quality of the resulting coating. It is studied the ultrasound field effect on nucleation during copper electrodeposition in a pulsed mode from a partially neutralized electrolyte simulating the spent nitrate solution of etching copper alloys on various materials by the potentiostatic. It is established an increase in the number of copper nucleus that form on the studied substrates (graphite, copper, steel) at the initial time under the action of an ultrasonic field. It is concluded that the use of ultrasound allows to intensify the process of metal electrodeposition. An increase in current efficiency during copper electrodeposition and an increase in the copper extraction degree using ultrasonic field are achieved at lower cathodic current densities in a pulse. It is substantiated using of graphite foil and steel as cathode materials in the copper extraction from the spent nitric acid etching solution.


2021 ◽  
Author(s):  
Xingyou Liang ◽  
Xuefeng Ren ◽  
Runshan He ◽  
Tingli Ma ◽  
Anmin Liu

Through theoretical calculation and experimental research, the electrodeposition process of preparing copper catalyst in acid electrolyte with polyethylene glycol (PEG), polyethylene imine (PEI), PEG and PEI mixture as additives was...


2006 ◽  
Vol 110 (42) ◽  
pp. 21109-21117 ◽  
Author(s):  
Eduardo C. Muñoz ◽  
Ricardo S. Schrebler ◽  
Paula K. Cury ◽  
Claudio A. Suárez ◽  
Ricardo A. Córdova ◽  
...  

2021 ◽  
Author(s):  
◽  
Pierre Mousnier

<p><b>The emerging field of magnetoelectric electronics opens significant opportunities for the next generation of sensors and wireless devices. A key feature of magneto-electric materials is the coupling between their magnetic and electronic properties that enables a voltage to be induced by a magnetic field, or a magnetic response to be induced by an electric field. This occurs in ferroelectric and ferromagnetic bi-layers. It also intrinsically occurs in multiferroics but obtaining a large room temperature magneto-electric effect with such materials can be challenging.</b></p> <p>The National Isotope Centre, part of the Institute of Geological and Nuclear Sciences (GNS Science), has been working with Victoria University of Wellington (VUW) on a novel idea to use low energy ion implantation to create ferromagnetic nanoparticles on ferroelectric and multiferroic thin films to create a magneto-electric nanoparticle composite thin film. They demonstrated the viability of magneto-electric nano-composites in two early stage proofs-ofconcept: a tunable radio frequency filter for wireless systems and a zero-power magnetometer measuring small electrical signals. The aim of this project is to assess the range of fields that this composite could have applications in, identifying the most promising of those fields and assessing the most promising applications in that field. Furthermore, this project also seeks out potential partners in New Zealand and a business case was subsequently prepared, which will be used to apply for government funding to pursue research on the technology, and to begin its commercialisation.</p> <p>In this study nine fields were found to potentially benefit from the use of this technology. They were analysed and compared, using preliminary market validation, resulting in the decision to investigate further the tunable radio frequency (RF) filter market, which is projected at US$13 billion by 2020. RF filters are designed using an original method patented in the 1930s allowing a filter to address only one frequency. As a result, a device must integrate as many filters as frequencies it needs to use, which could be more than 50 for a recent smartphone. A tunable RF filter with a 20% tunability could disrupt this market by providing a huge gain of space, weight, and power efficiency. The RF market is also promising because of the wireless trend, which is occurring all over the world where everything is progressively connected to the what is called the ‘Internet of Things’ – the most important market for the next generation of interconnected electronics. During a year of literature review, interviews and participation at international fairs, the research team has built a value proposition case, a technology review, a market and competitive analysis, an intellectual property assessment and a commercialisation pathway, which are detailed in this project report.</p> <p>The initial Smart Idea funding from the government has now ended and, if the project is to be kept alive, it needs to produce a quick-to-market application to unlock new credits. This report proposes a structured roadmap for several applications, starting with a tunable RF filter prototype for underwater communication. This has been progressed by GNS Science, embarking on a grant application during this writing. If granted, this funding could open the way to make New Zealand a champion in tunable RF filters and a research and development (R&D) hub for next generation nano-electronics.</p>


Author(s):  
Дмитро Юрійович Ущаповський ◽  
Ольга Володимирівна Лінючева ◽  
Маргарита Іванівна Донченко ◽  
Михайло Володимирович Бик ◽  
Андрій Сергійович Цимбалюк

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