Measurement-based Signal Quality Test of High-speed TSV Channel
In this paper, measurements of high-speed TSV channel were performed in frequency- and time-domains for the signal quality test. The channel loss was measured up to 20 GHz in frequency-domain and the eye-diagram was measured up to 10 Gbps in time-domain. To analyze the measurement results, the equivalent-circuit model of high-speed TSV channel and the worst eye-diagram estimation algorithm were introduced. By using them, the impacts of silicon-conductance and oxide-capacitance on channel loss were analyzed. Moreover, the negligible impact of reflection on the signal quality of the high-speed TSV channel was also analyzed. These measurement-based signal quality analyses can provide the useful insight and design guidance for high-speed TSV channel.