Li/Garnet Interface Stabilization by Thermal‐Decomposition Vapor Deposition of an Amorphous Carbon Layer

The high-capacity of Nb2O5 nanosheets has been successfully realized through introducing amorphous carbon layers, which have been demonstrated to have a large capacity owing to the existence of defects on amorphous carbon layers.

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Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

Thin Solid Films ◽

10.1016/j.tsf.2018.08.007 ◽

2018 ◽

Vol 663 ◽

pp. 21-24 ◽

Cited By ~ 4

Author(s):

Se Jun Park ◽

Dohyung Kim ◽

Seungmoo Lee ◽

Yongjoon Ha ◽

Mingyoo Lim ◽

...

Keyword(s):

Amorphous Carbon ◽

Inductively Coupled Plasma ◽

Carbon Layer ◽

Next Generation ◽

Plasma System ◽

Layer Film ◽

Hard Mask ◽

Inductively Coupled ◽

Amorphous Carbon Layer

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Efficient moisture barrier of nitrogen-doped amorphous-carbon layer by room temperature fabrication for copper metallization

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/ab9487 ◽

2020 ◽

Vol 59 (SL) ◽

pp. SLLD03

Author(s):

Ploybussara Gomasang ◽

Kazuyoshi Ueno

Keyword(s):

Amorphous Carbon ◽

Room Temperature ◽

Carbon Layer ◽

Copper Metallization ◽

Moisture Barrier ◽

Nitrogen Doped ◽

Amorphous Carbon Layer

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Partial Crystallization of Amorphous Carbon Layer Coated on the Surface of LiFePO4 by Heat Treatment Using Microwave Induced Arc

ECS Meeting Abstracts ◽

10.1149/ma2009-02/8/643 ◽

2009 ◽

Keyword(s):

Heat Treatment ◽

Amorphous Carbon ◽

Carbon Layer ◽

Partial Crystallization ◽

Amorphous Carbon Layer

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Microstructural evolution of diamond/Si(100) interfaces with pretreatments in chemical vapor deposition

Journal of Materials Research ◽

10.1557/jmr.1995.3041 ◽

1995 ◽

Vol 10 (12) ◽

pp. 3041-3049 ◽

Cited By ~ 25

Author(s):

C.J. Chen ◽

L. Chang ◽

T.S. Lin ◽

F.R. Chen

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Carbon Layer ◽

Chemical Vapor Deposition Method ◽

Interfacial Region ◽

Cross Sectional ◽

Evolution Of Microstructure

Diamond was deposited on Si(100) substrates by the microwave plasma-assisted chemical vapor deposition method in three steps: carburization, biasing, and growth. High-resolution transmission electron microscopy in cross-sectional view has been used to observe the evolution of microstructures around the interfacial region between diamond and Si in each processing step. The chemistry near the interface was characterized with elemental mapping using an energy-filtered imaging technique with electron energy loss spectroscopy. An amorphous carbon layer, β-SiC and diamond particles, and graphite plates have been observed in the carburization stage. β-SiC can form in epitaxial orientation with Si in the following stage of biasing. Graphite and amorphous carbon were not observed after the bias was applied. Diamond grains were aligned in a strongly textured condition in the growth stage. It has been found that diamond, SiC, and Si all have (111) planes in parallel. The relation of the evolution of microstructure with the processing conditions is also discussed.

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Defect Structure of Diamond Film at the Interface with Amorphous Carbon

MRS Proceedings ◽

10.1557/proc-270-353 ◽

1992 ◽

Vol 270 ◽

Author(s):

Li Chang

Keyword(s):

Amorphous Carbon ◽

Microwave Plasma ◽

Chemical Vapor ◽

Amorphous Layer ◽

Carbon Layer ◽

Silicon Substrates ◽

Plasma Chemical Vapor Deposition ◽

Diamond Crystals ◽

Transmission Electron ◽

Amorphous Carbon Layer

ABSTRACTDiamond films prepared by microwave plasma chemical vapor deposition, using a gas mixture of methane and hydrogen with ethanol, were formed on silicon substrates. Highresolution transmission electron microscopy was employed to characterize the microstructure at interface regions. It was found that the diamond crystals were grown on an amorphous carbon layer. Twins and stacking faults were observed at the regions interfaced with the amorphous carbon layer, suggesting that the defects may already exist in the nucleation stage and at the very first stage of growth. Also, some diamond nuclei embedded in the amorphous layer were observed.

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