Analytical modeling and simulation of MEMS piezoresistive pressure sensors with a square silicon carbide diaphragm as the primary sensing element under different loading conditions
2018 ◽
Vol 17
(4)
◽
pp. 1780-1789
◽
2010 ◽
Vol 2010
(HITEC)
◽
pp. 000373-000378
2003 ◽
Vol 70
(5-2003)
◽
pp. 258-264
◽
2013 ◽
Vol 647
◽
pp. 315-320
◽
2021 ◽
Vol 48
(4)
◽
pp. 53-61
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