Quantitative optical determination of segregation in doped silicon: A comparative analysis with spreading resistance measurements

1988 ◽  
Vol 91 (4) ◽  
pp. 652-654
Author(s):  
D.J. Carlson ◽  
A.F. Witt
Keyword(s):  
Comparative Analysis ◽  
Spreading Resistance ◽  
Doped Silicon ◽  
Optical Determination

Materials Characterization using THz Ellipsometry

2009 ◽  
Vol 1163 ◽  
Author(s):  
Tino Hofmann ◽  
Craig M. Herzinger ◽  
John A. Woollam ◽  
Mathias Schubert
Keyword(s):  
Spectral Range ◽  
Free Charge Carrier ◽  
Monitoring And Control ◽  
Mid Infrared ◽  
Silicon Bulk ◽  
Doped Silicon ◽  
Optical Determination ◽  
And Control ◽  
Non Destructive

AbstractWe employ spectroscopic ellipsometry in the terahertz (0.2 to 1.5 THz) and the mid-infrared (9 to 50 THz) spectral range for the non-contact, non-destructive optical determination of the free-charge-carrier properties of low-doped Silicon bulk and thin film structures. We find that carrier concentrations as low as 1015 cm−3 in thin films can be unambiguously determined. We envision ellipsometry in the THz spectral range for future non-contact, non-destructive monitoring and control applications.

Determination of arsenic atom distribution arsenic doped silicon using HOLZ-line analysis

1996 ◽  
Vol 54 ◽  
pp. 976-977
Author(s):  
Y. Kikuchi ◽  
N. Hashikawa ◽  
F. Uesugi ◽  
E. Wakai ◽  
K. Watanabe ◽  
...  
Keyword(s):  
Inelastic Scattering ◽  
Zone Axis ◽  
Experimental Result ◽  
Background Intensity ◽  
Crystal Thickness ◽  
Arsenic Atom ◽  
Doped Silicon ◽  
P Type ◽  
Line Analysis

In order to measure the concentration of arsenic atoms in nanometer regions of arsenic doped silicon, the HOLZ analysis is carried out underthe exact [011] zone axis observation. In previous papers, it is revealed that the position of two bright lines in the outer SOLZ structures on the[011] zone axis is little influenced by the crystal thickness and the background intensity caused by inelastic scattering electrons, but is sensitive to the concentration of As atoms substitutbnal for Siatomic site.As the result, it becomes possible to determine the concentration of electrically activated As atoms in silicon within an observed area by means of the simple fitting between experimental result and dynamical simulatioan. In the present work, in order to investigate the distribution of electrically activated As in silicon, the outer HOLZ analysis is applied using a nanometer sized probe of TEM equipped with a FEG.Czodiralsld-gown<100>orientated p-type Si wafers with a resistivity of 10 Ώ cm are used for the experiments.TheAs+ implantation is performed at a dose of 5.0X1015cm-2at 25keV.

Reflections on Arctic Maritime Delimitations: A Comparative Analysis between the Case Law and State Practice

2011 ◽  
Vol 80 (4) ◽  
pp. 459-484
Author(s):  
Yoshifumi Tanaka
Keyword(s):  
Comparative Analysis ◽  
Arctic Ocean ◽  
Case Law ◽  
The Arctic ◽  
Coastal State ◽  
Ocean Governance ◽  
State Practice ◽  
The Arctic Ocean

AbstractThe determination of spatial ambit of the coastal State jurisdiction is fundamental for ocean governance and the same applies to the Arctic Ocean. In this regard, a question arises how it is possible to delimit marine spaces where the jurisdiction of two or more coastal States overlaps. Without rules on maritime delimitation in marine spaces where the jurisdiction of coastal States overlaps, the legal uses of these spaces cannot be enjoyed effectively. In this sense, maritime delimitation is of paramount importance in the Arctic Ocean governance. Thus, this study will examine Arctic maritime delimitations by comparing them to the case law concerning maritime delimitation. In so doing, this study seeks to clarify features of Arctic maritime delimitations.

scholarly journals RESEARCH INTO THE METHODS OF ANALYSING THE PRODUCTIVITY INDICATORS OF TRANSPORT TERMINALS

Transport ◽  
2009 ◽  
Vol 24 (3) ◽  
pp. 192-199 ◽  
Author(s):  
Ilona Jaržemskienė
Keyword(s):  
Comparative Analysis ◽  
Functional Dependence ◽  
Data Envelopment ◽  
Analysis Method ◽  
Accurate Evaluation ◽  
Feasible Alternative ◽  
Productivity Indicators ◽  
Insight Into ◽  
Regressive Analysis

The measurement of terminal productivity is the issue of extreme importance to both terminal owners and management and customers. As the sector of transport is highly intensive in terms of investments into the infrastructure, the productivity of a terminal may play a crucial role in competing with other terminals. Productivity is defined in terms of inputs and output. The majority of the available studies, wherein this issue is addressed, are generally focused on the determination of functional dependence between inputs and output using the method of regressive analysis. The present article provides an insight into the Data Envelopment Analysis method as a tool for measuring productivity. This technique enables a rather accurate evaluation of terminal productivity by means of comparative analysis, which, in fact, appears to be the only feasible alternative in cases where statistic data required for performing regressive analysis is lacking.

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