Infrared spectroscopic techniques for quantitative characterization of dielectric thin films on silicon wafers

1994 ◽  
Vol 50 (10) ◽  
pp. 1687-1723 ◽  
Author(s):  
James E Franke ◽  
Thomas M Niemczyk ◽  
David M Haaland
2003 ◽  
Vol 804 ◽  
Author(s):  
Chen Gao ◽  
Bo Hu ◽  
Mengming Huang ◽  
Pu Zhang ◽  
Wen-han Liu

ABSTRACTWe developed a recursive image charge approach for quantitative characterizations of dielectric thin films using the scanning tip microwave near-field microscope. With this method, frequency shift of the microscope as functions of the dielectric constant and the thickness of a film can be effectively computed in a recursive way. We believe that this approach can promote the high-throughput characterization of the dielectric libraries.


2000 ◽  
Vol 88 (5) ◽  
pp. 3029-3038 ◽  
Author(s):  
Jie-Hua Zhao ◽  
Todd Ryan ◽  
Paul S. Ho ◽  
Andrew J. McKerrow ◽  
Wei-Yan Shih

2012 ◽  
Vol 18 (S2) ◽  
pp. 1248-1249
Author(s):  
J. Wang

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.


2005 ◽  
Vol 82 (3-4) ◽  
pp. 368-373 ◽  
Author(s):  
N. Chérault ◽  
G. Carlotti ◽  
N. Casanova ◽  
P. Gergaud ◽  
C. Goldberg ◽  
...  

2019 ◽  
Vol 479 ◽  
pp. 395-402 ◽  
Author(s):  
Francesca Borghi ◽  
Matteo Milani ◽  
Luca Giacomo Bettini ◽  
Alessandro Podestà ◽  
Paolo Milani

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