Effect of annealing temperature on microstructure, hardness and adhesion properties of TiSixNy superhard coatings
2011 ◽
Vol 257
(15)
◽
pp. 6380-6386
◽
1967 ◽
Vol 25
◽
pp. 312-313
1991 ◽
Vol 49
◽
pp. 562-563
1984 ◽
Vol 42
◽
pp. 498-499
Defect reduction in oxygen implanted silicon-on-insulator material during high-temperature annealing
1989 ◽
Vol 47
◽
pp. 604-605
2013 ◽
Vol 51
(10)
◽
pp. 735-741
Keyword(s):
2011 ◽
Vol 3
(5)
◽
pp. 544-548
◽
Keyword(s):