Hydrophobicity enhancement of Al2O3 thin films deposited on polymeric substrates by atomic layer deposition with perfluoropropane plasma treatment
2014 ◽
Vol 305
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pp. 554-561
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2020 ◽
Vol 403
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pp. 126414
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2014 ◽
Vol 25
(4)
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pp. 1922-1932
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2019 ◽
Vol 11
(38)
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pp. 35438-35443
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2015 ◽
Vol 33
(1)
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pp. 01A152
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2015 ◽
Vol 764-765
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pp. 138-142
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