Nanoscale W/Be multilayers: Intermixing during magnetron sputtering deposition and effect of heat treatment

2022 ◽  
Vol 571 ◽  
pp. 151265
Author(s):  
Sergei S. Sakhonenkov ◽  
Elena O. Filatova
Keyword(s):  
Heat Treatment ◽  
Magnetron Sputtering ◽  
Sputtering Deposition

Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN

2021 ◽  
pp. 138792
Author(s):  
K. Bobzin ◽  
T. Brögelmann ◽  
N.C. Kruppe ◽  
M. Engels ◽  
C. Schulze
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Substrate Bias ◽  
Sputtering Deposition ◽  
Pulsed Magnetron

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale

Preparation of Sn doped SiO2thin films by magnetron sputtering deposition using metal and metal-oxide powder targets

2018 ◽  
Vol 58 (SA) ◽  
pp. SAAD04 ◽  
Author(s):  
Hiroharu Kawasaki ◽  
Tamiko Ohshima ◽  
Yoshihito Yagyu ◽  
Takeshi Ihara ◽  
Masanori Shinohara ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Metal Oxide ◽  
Oxide Powder ◽  
Sputtering Deposition ◽  
Metal Oxide Powder
Sign in / Sign up

Export Citation Format

Share Document