Effects of background doping concentration on electrostatic discharge protection of high voltage operating extended drain N-type MOS device

2007 ◽  
Vol 84 (1) ◽  
pp. 161-164 ◽  
Author(s):  
Yong-Jin Seo ◽  
Kil-Ho Kim
Keyword(s):  
High Voltage ◽  
Doping Concentration ◽  
Electrostatic Discharge ◽  
Background Doping ◽  
Mos Device

Influence of Lateral Straggling of Implated Aluminum Ions on High Voltage 4H-SiC Device Edge Termination Design

2018 ◽  
Vol 924 ◽  
pp. 361-364 ◽  
Author(s):  
Yi Fan Jiang ◽  
B. Jayant Baliga ◽  
Alex Q. Huang
Keyword(s):  
High Voltage ◽  
Doping Concentration ◽  
Secondary Electron ◽  
Electric Field Distribution ◽  
Simulation Tool ◽  
Edge Termination ◽  
Interface Charge ◽  
Aluminum Ions ◽  
Background Doping ◽  
Tcad Simulation

This paper presents the analysis of Aluminum profile implanted into 4H-SiC with low background doping concentration. A strong lateral straggling effect was discovered with secondary electron potential contrast (SEPC) method, and analyzed by Sentaurus Monto Carlo simulations. The effect of lateral straggling was included in the edge termination design using Sentaurus TCAD simulation tool, and the results are compared with design not including the lateral straggling effect. The effect of interface charge on the electric field distribution and breakdown voltage of different 10 kV device edge termination designs was compared and analyzed.

Epitaxial Growth and Characterization of 4H-SiC(11–20) and (03–38)

2002 ◽  
Vol 742 ◽  
Author(s):  
T. Kimoto ◽  
K. Hashimoto ◽  
K. Fujihira ◽  
K. Danno ◽  
S. Nakamura ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Schottky Barrier ◽  
Breakdown Voltage ◽  
Doping Concentration ◽  
Schottky Barrier Diodes ◽  
Homoepitaxial Growth ◽  
Nitrogen Incorporation ◽  
Impurity Doping ◽  
Background Doping

ABSTRACTHomoepitaxial growth, impurity doping, and diode fabrication on 4H-SiC(11–20) and (03–38) have been investigated. Although the efficiency of nitrogen incorporation is higher on the non-standard faces than on (0001), a low background doping concentration of 2∼3×1014 cm-3 can be achieved. On these faces, boron and aluminum are less effectively incorporated, compared to the growth on off-axis (0001). 4H-SiC(11–20) epilayers are micropipe-free, as expected. More interestingly, almost perfect micropipe closing has been realized in 4H-SiC (03–38) epitaxial growth. Ni/4H-SiC(11–20) and (03–38) Schottky barrier diodes showed promising characteritics of 3.36 kV-24 mΩcm2 and 3.28 kV–22 mΩcm2, respectively. The breakdown voltage of 4H-SiC(03–38) Schottky barrier diodes was significantly improved from 1 kV to above 2.5 kV by micropipe closing.

scholarly journals Sensing and Reliability Improvement of Electrostatic-Discharge Transient by Discrete Engineering for High-Voltage 60-V n-Channel Lateral-Diffused MOSFETs with Embedded Silicon-Controlled Rectifiers

Sensors ◽  
2018 ◽  
Vol 18 (10) ◽  
pp. 3340
Author(s):  
Shen-Li Chen ◽  
Yi-Cih Wu
Keyword(s):  
High Voltage ◽  
Field Effect Transistor ◽  
Electrostatic Discharge ◽  
Reference Sample ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Physical Parameters ◽  
Reliability Improvement ◽  
Drain Side ◽  
Effect Transistor

High-voltage n-channel lateral-diffused metal-oxide-semiconductor field-effect transistor (nLDMOS) components, fabricated by a TSMC 0.25-m 60-V bipolar-CMOS-DMOS (BCD) process with drain-side embedded silicon-controlled rectifier (SCR) of the n-p-n-arranged and p-n-p-arranged types, were investigated, in order to determine the devices’ electrostatic discharge (ESD)-sensing behavior and capability by discrete anode engineering. As for the drain-side n-p-n-arranged type with discrete-anode manners, transmission–line–pulse (TLP) testing results showed that the ESD ability (It2 value) was slightly upgraded. When the discrete physical parameter was 91 rows, the optimal It2 reached 2.157 A (increasing 17.7% compared with the reference sample). On the other hand, the drain-side SCR p-n-p-arranged type with discrete-anode manner had excellent SCR behavior, and its It2 values could be increased to >7 A (increasing >281.9% compared with the reference DUT). Moreover, under discrete anode engineering, the drain-side SCR n-p-n-arranged and p-n-p-arranged types had clearly higher ESD ability, except for the few discrete physical parameters. Therefore, using the anode discrete engineering, the ESD dissipation ability of a high-voltage (HV) nLDMOS with drain-side SCRs will have greater effectiveness.

No-Snapback Silicon-Controlled Rectifier for Electrostatic Discharge Protection of High-Voltage ICs

2015 ◽  
Vol 36 (11) ◽  
pp. 1121-1123 ◽  
Author(s):  
Zhixin Wang ◽  
Maxim Klebanov ◽  
Richard B. Cooper ◽  
Wei Liang ◽  
Sebastian Courtney ◽  
...  
Keyword(s):  
High Voltage ◽  
Electrostatic Discharge

Chloride-Based CVD at High Rates of 4H-SiC on On-Axis Si-Face Substrates

2011 ◽  
Vol 679-680 ◽  
pp. 59-62 ◽  
Author(s):  
Stefano Leone ◽  
Yuan Chih Lin ◽  
Franziska Christine Beyer ◽  
Sven Andersson ◽  
Henrik Pedersen ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Doping Concentration ◽  
Epitaxial Layers ◽  
Power Devices ◽  
High Quality ◽  
Homoepitaxial Growth ◽  
Basal Plane Dislocation ◽  
Background Doping ◽  
Quality Material

The epitaxial growth at 100 µm/h on on-axis 4H-SiC substrates is demonstrated in this study. Chloride-based CVD, which has been shown to be a reliable process to grow SiC epitaxial layers at rates above 100 µm/h on off-cut substrates, was combined with silane in-situ etching. A proper tuning of C/Si and Cl/Si ratios and the combination of different chlorinated precursors resulted in the homoepitaxial growth of 4H-SiC on Si-face substrates at high rates. Methyltrichlorosilane, added with silane, ethylene and hydrogen chloride were employed as precursors to perform epitaxial growths resulting in very low background doping concentration and high quality material, which could be employed for power devices structure on basal-plane-dislocation-free epitaxial layers.

4.5kV SiC JBS Diodes

2013 ◽  
Vol 347-350 ◽  
pp. 1506-1509 ◽  
Author(s):  
Yong Hong Tao ◽  
Run Hua Huang ◽  
Gang Chen ◽  
Song Bai ◽  
Yun Li
Keyword(s):  
Numerical Simulations ◽  
Breakdown Voltage ◽  
High Voltage ◽  
Current Density ◽  
Doping Level ◽  
Doping Concentration ◽  
Device Structure ◽  
Reverse Voltage ◽  
Edge Termination ◽  
Drift Layer

High voltage 4H-SiC junction barrier schottky (JBS) diode with breakdown voltage higher than 4.5 kV has been fabricated. The doping level and thickness of the N-type drift layer and the device structure have been performed by numerical simulations. The thickness of the device epilayer is 50 μm, and the doping concentration is 1.2×1015 cm3. A floating guard rings edge termination has been used to improve the effectiveness of the edge termination technique. The diodes can block a reverse voltage of at least 4.5 kV, and the on-state current density was 80 A/cm2 at VF =4 V.

A Novel High Latch-Up Immunity Electrostatic Discharge Protection Device for Power Rail in High-Voltage ICs

2016 ◽  
Vol 16 (2) ◽  
pp. 266-268
Author(s):  
Chunwei Zhang ◽  
Siyang Liu ◽  
Kaikai Xu ◽  
Jiaxing Wei ◽  
Ran Ye ◽  
...  
Keyword(s):  
High Voltage ◽  
Electrostatic Discharge ◽  
Protection Device ◽  
Latch Up
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