Refining multi-photon polymerization feature size by optimizing solvent content in SU-8 photoresist

2021 ◽  
Vol 112 ◽  
pp. 110800
Author(s):  
Yuchen Shao ◽  
Yuan'an Zhao ◽  
Hao Ma ◽  
Cheng Li ◽  
Dawei Li ◽  
...  
Keyword(s):  
Author(s):  
Peter Egger ◽  
Stefan Müller ◽  
Martin Stiftinger

Abstract With shrinking feature size of integrated circuits traditional FA techniques like SEM inspection of top down delayered devices or cross sectioning often cannot determine the physical root cause. Inside SRAM blocks the aggressive design rules of transistor parameters can cause a local mismatch and therefore a soft fail of a single SRAM cell. This paper will present a new approach to identify a physical root cause with the help of nano probing and TCAD simulation to allow the wafer fab to implement countermeasures.


2021 ◽  
Vol 27 (54) ◽  
pp. 13480-13480
Author(s):  
Maxime Tricoire ◽  
Luca Münzfeld ◽  
Jules Moutet ◽  
Nolwenn Mahieu ◽  
Léo La Droitte ◽  
...  
Keyword(s):  

Jurnal Kimia ◽  
2019 ◽  
Vol 13 (1) ◽  
pp. 22
Author(s):  
N. P. S. E. Cahyani ◽  
J. Susiarni ◽  
K. C.S. Dewi ◽  
N. L.P. Melyandari ◽  
K. W.A. Putra ◽  
...  

Kepuh (Sterculia foetida L) is a type of kapok plant that has been scientifically proven to have activity as an anti-inflammatory and analgesic. 70% ethanol extract of stem stem is obtained by maceration using 70% ethanol. Examination of the characteristics of 70% ethanol extract of kepuh stem included organoleptic, of moisture content and determination of residual solvent content. Phytochemical screening of 70% ethanol extract of kepuh bark includes: alkaloid, flavonoid, saponin, tannin , polyphenol, and examination of glycosides. The results of the examination of the characteristics of 70% ethanol extract of kepuh stem obtained water content of 8.66 ± 0.748%, the residual content of the solvent had a 0 (zero) ethanol level. The results of phytochemical screening showed 70% ethanol extract of stem stem containing steroid compounds, triterpenoids, flavonoids, saponins, tannins and polyphenols. The identification using UV-Vis spectrophotometry produced ? 212, the absorbance was 1.8601 and ? 284, the absorbance was 0.42186.


Metals ◽  
2017 ◽  
Vol 7 (7) ◽  
pp. 275 ◽  
Author(s):  
Huixia Liu ◽  
Wenhao Zhang ◽  
Jenn-Terng Gau ◽  
Zongbao Shen ◽  
Youjuan Ma ◽  
...  

2012 ◽  
Vol 195 ◽  
pp. 128-131 ◽  
Author(s):  
Hun Hee Lee ◽  
Min Sang Yun ◽  
Hyun Wook Lee ◽  
Jin Goo Park

As the feature size of semiconductor device shrinks continuously, various high-K metals for 3-D structures have been applied to improve the device performance, such as high speed and low power consumption. Metal gate fabrication requires the removal of metal and polymer residues after etching process without causing any undesired etching and corrosion of metals. The conventional sulfuric-peroxide mixture (SPM) has many disadvantages like the corrosion of metals, environmental issues etc., DSP+(dilute sulfuric-peroxide-HF mixture) chemical is currently used for the removal of post etch residues on device surface, to replace the conventional SPM cleaning [. Due to the increased usage of metal gate in devices in recent times, the application of DSP+chemicals for cleaning processes also increases [.


1998 ◽  
Vol 54 (1) ◽  
pp. 111-113 ◽  
Author(s):  
Yu Luo ◽  
Min-yuan Chou ◽  
Su-chen Li ◽  
Yu-teh Li ◽  
Ming Luo

Functional monomeric 83 kDa sialidase L, a NeuAcα2→3Gal-specific sialidase from Macrobdella leech, was expressed in Escherichia coli and readily crystallized by a macroseeding technique. The crystal belongs to space group P1 with unit-cell parameters a = 46.4, b = 69.3, c = 72.5 Å, α = 113.5, β = 95.4 and γ = 107.3°. There is one molecule per unit cell, giving a Vm = 2.4 Å3 Da−1 and a solvent content of 40%. Native and mercury-derivative data sets were collected to 2.0 Å resolution. Threading and molecular-replacement calculations confirmed the existence of a bacterial sialidase-like domain.


1968 ◽  
Vol 33 (2) ◽  
pp. 491-497 ◽  
Author(s):  
B.W. Matthews

Sign in / Sign up

Export Citation Format

Share Document