Effect of target frequency, bias voltage and bias frequency on microstructure and mechanical properties of pulsed DC CFUBM sputtered TiN coating

2010 ◽  
Vol 204 (21-22) ◽  
pp. 3684-3697 ◽  
Author(s):  
Debajyoti Bhaduri ◽  
Arnab Ghosh ◽  
Soumya Gangopadhyay ◽  
Soumitra Paul
2020 ◽  
Vol 528 ◽  
pp. 146966
Author(s):  
S. Mirzaei ◽  
M. Alishahi ◽  
P. Souček ◽  
V. Buršíková ◽  
L. Zábranský ◽  
...  

2017 ◽  
Vol 31 (16-19) ◽  
pp. 1744032 ◽  
Author(s):  
X. Zuo ◽  
F. Xia ◽  
D. Zhang ◽  
P. L. Ke ◽  
Q. M. Wang ◽  
...  

Chromium nitride coatings were prepared by reactive DC-superimposed high-power-impulse magnetron sputtering (HiPIMS) system. The influence of substrate bias on the microstructure and mechanical properties of CrN coatings was investigated. XRD and cross-sectional SEM were utilized to characterize the film structures. Mechanical properties were characterized by nanoindentation and Vickers indentation test. The results revealed that the microstructure and mechanical properties of CrN coatings were affected by bias voltage. The CrN coatings exhibited dense and fine columnar grain structure with the hardness of about 18.7 GPa. The fracture toughness of CrN coatings was around 3.16 MPa ⋅ m[Formula: see text]. However, further increase of the bias voltage from −250 V to −300 V led to the degradation of coating properties.


2013 ◽  
Vol 281 ◽  
pp. 426-429
Author(s):  
Tao Chen ◽  
Hua Wu ◽  
Qing Hui Wang

PVD method is used to deposit (Ti,Al)N coatings on the surface of W6Mo5Cr4V2 steels. The value of bias voltage changes from -100V to -400V. X-ray diffraction (XRD), Scanning electron microscope(SEM) and UNMT-1 were employed to analysis the microstructure and mechanical properties of (Ti,Al)N coatings. The research results showed that the microstructure and mechanical properties of coatings became better when the value of bias voltage was -400V. The size and quantity of particles on coatings both decreased obviously. The adhesion between coatings and substrates increase to 54.6N. The hardness of (Ti,Al)N coatings rise to 39.7N.


Scanning ◽  
2018 ◽  
Vol 2018 ◽  
pp. 1-11 ◽  
Author(s):  
Ji Cheng Ding ◽  
Teng Fei Zhang ◽  
Zhi Xin Wan ◽  
Hai Juan Mei ◽  
Myung Chang Kang ◽  
...  

The Cr-Cu-N coatings with various Cu contents (0–25.18 (±0.17) at.%) were deposited on Si wafer and stainless steel (SUS 304) substrates in reactive Ar+N2 gas mixture by a hybrid coating system combining pulsed DC and RF magnetron sputtering techniques. The influence of Cu content on the coating composition, microstructure, and mechanical properties was investigated. The microstructure of the coatings was significantly altered by the introduction of Cu. The deposited coatings exhibit solid solution structure with different compositions in all of the samples. Addition of Cu is intensively favored for preferred orientation growth along (200) direction by restricting in (111) direction. With increasing Cu content, the surface and cross-sectional morphology of coatings were changed from triangle cone-shaped, columnar feature to broccoli-like and compact glassy microstructure, respectively. The mechanical properties including the residual stress, nanohardness, and toughness of the coatings were explored on the basis of Cu content. The highest hardness was obtained at the Cu content of 1.49 (±0.10) at.%.


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